JP2504337Y2 - 基板の搬出・搬入装置 - Google Patents

基板の搬出・搬入装置

Info

Publication number
JP2504337Y2
JP2504337Y2 JP8106890U JP8106890U JP2504337Y2 JP 2504337 Y2 JP2504337 Y2 JP 2504337Y2 JP 8106890 U JP8106890 U JP 8106890U JP 8106890 U JP8106890 U JP 8106890U JP 2504337 Y2 JP2504337 Y2 JP 2504337Y2
Authority
JP
Japan
Prior art keywords
substrate
cassette
arm
unloading
carry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP8106890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438051U (enrdf_load_stackoverflow
Inventor
正美 大谷
義二 岡
健男 岡本
義光 福冨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP8106890U priority Critical patent/JP2504337Y2/ja
Publication of JPH0438051U publication Critical patent/JPH0438051U/ja
Application granted granted Critical
Publication of JP2504337Y2 publication Critical patent/JP2504337Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP8106890U 1990-07-30 1990-07-30 基板の搬出・搬入装置 Expired - Fee Related JP2504337Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8106890U JP2504337Y2 (ja) 1990-07-30 1990-07-30 基板の搬出・搬入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8106890U JP2504337Y2 (ja) 1990-07-30 1990-07-30 基板の搬出・搬入装置

Publications (2)

Publication Number Publication Date
JPH0438051U JPH0438051U (enrdf_load_stackoverflow) 1992-03-31
JP2504337Y2 true JP2504337Y2 (ja) 1996-07-10

Family

ID=31626684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8106890U Expired - Fee Related JP2504337Y2 (ja) 1990-07-30 1990-07-30 基板の搬出・搬入装置

Country Status (1)

Country Link
JP (1) JP2504337Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0438051U (enrdf_load_stackoverflow) 1992-03-31

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