JP2502929Y2 - 保温筒を有する縦型熱処理装置 - Google Patents

保温筒を有する縦型熱処理装置

Info

Publication number
JP2502929Y2
JP2502929Y2 JP11993690U JP11993690U JP2502929Y2 JP 2502929 Y2 JP2502929 Y2 JP 2502929Y2 JP 11993690 U JP11993690 U JP 11993690U JP 11993690 U JP11993690 U JP 11993690U JP 2502929 Y2 JP2502929 Y2 JP 2502929Y2
Authority
JP
Japan
Prior art keywords
heat insulating
heat
base
cylinder
storage space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11993690U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0476032U (enrdf_load_stackoverflow
Inventor
信一 大越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP11993690U priority Critical patent/JP2502929Y2/ja
Publication of JPH0476032U publication Critical patent/JPH0476032U/ja
Application granted granted Critical
Publication of JP2502929Y2 publication Critical patent/JP2502929Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11993690U 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置 Expired - Lifetime JP2502929Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11993690U JP2502929Y2 (ja) 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11993690U JP2502929Y2 (ja) 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置

Publications (2)

Publication Number Publication Date
JPH0476032U JPH0476032U (enrdf_load_stackoverflow) 1992-07-02
JP2502929Y2 true JP2502929Y2 (ja) 1996-06-26

Family

ID=31867866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11993690U Expired - Lifetime JP2502929Y2 (ja) 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置

Country Status (1)

Country Link
JP (1) JP2502929Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0476032U (enrdf_load_stackoverflow) 1992-07-02

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