JP2502929Y2 - 保温筒を有する縦型熱処理装置 - Google Patents
保温筒を有する縦型熱処理装置Info
- Publication number
- JP2502929Y2 JP2502929Y2 JP11993690U JP11993690U JP2502929Y2 JP 2502929 Y2 JP2502929 Y2 JP 2502929Y2 JP 11993690 U JP11993690 U JP 11993690U JP 11993690 U JP11993690 U JP 11993690U JP 2502929 Y2 JP2502929 Y2 JP 2502929Y2
- Authority
- JP
- Japan
- Prior art keywords
- heat insulating
- heat
- base
- cylinder
- storage space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 title claims description 24
- 238000009413 insulation Methods 0.000 title claims description 21
- 238000003860 storage Methods 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 235000012431 wafers Nutrition 0.000 description 22
- 239000010453 quartz Substances 0.000 description 5
- 238000009423 ventilation Methods 0.000 description 5
- 210000002268 wool Anatomy 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 238000001947 vapour-phase growth Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000006837 decompression Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000011494 foam glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11993690U JP2502929Y2 (ja) | 1990-11-16 | 1990-11-16 | 保温筒を有する縦型熱処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11993690U JP2502929Y2 (ja) | 1990-11-16 | 1990-11-16 | 保温筒を有する縦型熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0476032U JPH0476032U (enrdf_load_stackoverflow) | 1992-07-02 |
| JP2502929Y2 true JP2502929Y2 (ja) | 1996-06-26 |
Family
ID=31867866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11993690U Expired - Lifetime JP2502929Y2 (ja) | 1990-11-16 | 1990-11-16 | 保温筒を有する縦型熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2502929Y2 (enrdf_load_stackoverflow) |
-
1990
- 1990-11-16 JP JP11993690U patent/JP2502929Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0476032U (enrdf_load_stackoverflow) | 1992-07-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R323117 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |