JP2025517914A5 - - Google Patents
Info
- Publication number
- JP2025517914A5 JP2025517914A5 JP2024568226A JP2024568226A JP2025517914A5 JP 2025517914 A5 JP2025517914 A5 JP 2025517914A5 JP 2024568226 A JP2024568226 A JP 2024568226A JP 2024568226 A JP2024568226 A JP 2024568226A JP 2025517914 A5 JP2025517914 A5 JP 2025517914A5
- Authority
- JP
- Japan
- Prior art keywords
- carbon atoms
- optional
- formula
- group
- represented
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202263343331P | 2022-05-18 | 2022-05-18 | |
| US63/343,331 | 2022-05-18 | ||
| PCT/US2023/022478 WO2023225046A1 (en) | 2022-05-18 | 2023-05-17 | Radiation sensitive organotin compositions having oxygen heteroatoms in hydrocarbyl ligand |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2025517914A JP2025517914A (ja) | 2025-06-12 |
| JP2025517914A5 true JP2025517914A5 (https=) | 2026-03-31 |
Family
ID=88792199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024568226A Pending JP2025517914A (ja) | 2022-05-18 | 2023-05-17 | ヒドロカルビル配位子に酸素ヘテロ原子を有する放射線感受性有機スズ組成物 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20230374338A1 (https=) |
| EP (1) | EP4526734A1 (https=) |
| JP (1) | JP2025517914A (https=) |
| KR (1) | KR20250011129A (https=) |
| TW (1) | TW202402768A (https=) |
| WO (1) | WO2023225046A1 (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI796816B (zh) * | 2018-06-21 | 2023-03-21 | 美商英培雅股份有限公司 | 單烷基錫烷氧化物的穩定溶液及其水解與縮合產物 |
| WO2023235534A1 (en) | 2022-06-02 | 2023-12-07 | Gelest, Inc. | High purity alkyl tin compounds and manufacturing methods thereof |
| KR102703674B1 (ko) * | 2022-08-02 | 2024-09-04 | 삼성에스디아이 주식회사 | 반도체 포토레지스트용 조성물 및 이를 이용한 패턴 형성 방법 |
| EP4568977A1 (en) | 2022-08-12 | 2025-06-18 | Gelest, Inc. | High purity tin compounds containing unsaturated substituent and method for preparation thereof |
| US12607929B2 (en) * | 2022-08-29 | 2026-04-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist and formation method thereof |
| US12606577B2 (en) | 2022-09-28 | 2026-04-21 | Gelest, Inc. | Iodoalkyl tin compounds and preparation methods thereof |
| CN121866261A (zh) | 2023-09-13 | 2026-04-14 | 默克专利有限公司 | 具有改善的热和光稳定性的分子内稳定化单烷基金属化合物及其用途 |
| KR20250106992A (ko) * | 2024-01-04 | 2025-07-11 | 삼성에스디아이 주식회사 | 패턴 형성 방법 및 포토레지스트 막 |
| KR20250125796A (ko) * | 2024-02-15 | 2025-08-22 | 삼성에스디아이 주식회사 | 반도체 포토레지스트용 조성물 및 이를 이용한 패턴 형성 방법 |
| WO2026052767A1 (en) | 2024-09-09 | 2026-03-12 | Merck Patent Gmbh | Intramolecular stabilized mono alkyl metal alkoxides and their use thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9310684B2 (en) * | 2013-08-22 | 2016-04-12 | Inpria Corporation | Organometallic solution based high resolution patterning compositions |
| CA2975104A1 (en) * | 2017-08-02 | 2019-02-02 | Seastar Chemicals Inc. | Organometallic compounds and methods for the deposition of high purity tin oxide |
| US10787466B2 (en) * | 2018-04-11 | 2020-09-29 | Inpria Corporation | Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods |
| US12211691B2 (en) * | 2018-12-20 | 2025-01-28 | Lam Research Corporation | Dry development of resists |
| WO2022046736A1 (en) * | 2020-08-25 | 2022-03-03 | Inpria Corporation | Methods to produce organotin compositions with convenient ligand providing reactants |
-
2023
- 2023-05-17 US US18/198,360 patent/US20230374338A1/en active Pending
- 2023-05-17 TW TW112118297A patent/TW202402768A/zh unknown
- 2023-05-17 EP EP23808215.0A patent/EP4526734A1/en active Pending
- 2023-05-17 JP JP2024568226A patent/JP2025517914A/ja active Pending
- 2023-05-17 KR KR1020247040538A patent/KR20250011129A/ko active Pending
- 2023-05-17 WO PCT/US2023/022478 patent/WO2023225046A1/en not_active Ceased
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