JP2024525339A5 - - Google Patents
Info
- Publication number
- JP2024525339A5 JP2024525339A5 JP2023577346A JP2023577346A JP2024525339A5 JP 2024525339 A5 JP2024525339 A5 JP 2024525339A5 JP 2023577346 A JP2023577346 A JP 2023577346A JP 2023577346 A JP2023577346 A JP 2023577346A JP 2024525339 A5 JP2024525339 A5 JP 2024525339A5
- Authority
- JP
- Japan
- Prior art keywords
- carbon atoms
- photosensitive composition
- coating
- composition according
- ligand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163210769P | 2021-06-15 | 2021-06-15 | |
| US63/210,769 | 2021-06-15 | ||
| US17/682,639 US12032291B2 (en) | 2021-06-15 | 2022-02-28 | Organotin patterning materials with ligands having silicon/germanium; precursor compositions; and synthesis methods |
| US17/682,639 | 2022-02-28 | ||
| PCT/US2022/029747 WO2022265792A1 (en) | 2021-06-15 | 2022-05-18 | Organotin patterning materials with ligands having silicon/germanium; precursor compositions; and synthesis methods |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024525339A JP2024525339A (ja) | 2024-07-12 |
| JP2024525339A5 true JP2024525339A5 (https=) | 2025-05-23 |
Family
ID=84389774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023577346A Pending JP2024525339A (ja) | 2021-06-15 | 2022-05-18 | シリコン／ゲルマニウムを有する配位子を有する有機スズパターニング材料、前駆体組成物及び合成方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US12032291B2 (https=) |
| EP (1) | EP4356198A4 (https=) |
| JP (1) | JP2024525339A (https=) |
| KR (1) | KR20240019779A (https=) |
| TW (1) | TW202300497A (https=) |
| WO (1) | WO2022265792A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022046736A1 (en) * | 2020-08-25 | 2022-03-03 | Inpria Corporation | Methods to produce organotin compositions with convenient ligand providing reactants |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6238734B1 (en) | 1999-07-08 | 2001-05-29 | Air Products And Chemicals, Inc. | Liquid precursor mixtures for deposition of multicomponent metal containing materials |
| US9310684B2 (en) | 2013-08-22 | 2016-04-12 | Inpria Corporation | Organometallic solution based high resolution patterning compositions |
| EP3100299A1 (en) * | 2014-01-31 | 2016-12-07 | Merck Patent GmbH | Preparation of semiconductor films |
| KR102508142B1 (ko) | 2015-10-13 | 2023-03-08 | 인프리아 코포레이션 | 유기주석 옥사이드 하이드록사이드 패터닝 조성물, 전구체 및 패터닝 |
| WO2018063382A1 (en) * | 2016-09-30 | 2018-04-05 | Intel Corporation | Ligand-capped main group nanoparticles as high absorption extreme ultraviolet lithography resists |
| US11673903B2 (en) | 2018-04-11 | 2023-06-13 | Inpria Corporation | Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods |
| KR20200144580A (ko) | 2018-05-11 | 2020-12-29 | 램 리써치 코포레이션 | Euv 패터닝 가능한 하드 마스크들을 제조하기 위한 방법들 |
| US11966158B2 (en) | 2019-01-30 | 2024-04-23 | Inpria Corporation | Monoalkyl tin trialkoxides and/or monoalkyl tin triamides with low metal contamination and/or particulate contamination, and corresponding methods |
| TWI837391B (zh) | 2019-06-26 | 2024-04-01 | 美商蘭姆研究公司 | 利用鹵化物化學品的光阻顯影 |
| CN115768777A (zh) | 2020-07-03 | 2023-03-07 | 恩特格里斯公司 | 制备有机锡化合物的方法 |
| WO2022046736A1 (en) | 2020-08-25 | 2022-03-03 | Inpria Corporation | Methods to produce organotin compositions with convenient ligand providing reactants |
-
2022
- 2022-02-28 US US17/682,639 patent/US12032291B2/en active Active
- 2022-05-18 KR KR1020237043568A patent/KR20240019779A/ko active Pending
- 2022-05-18 WO PCT/US2022/029747 patent/WO2022265792A1/en not_active Ceased
- 2022-05-18 EP EP22825515.4A patent/EP4356198A4/en active Pending
- 2022-05-18 JP JP2023577346A patent/JP2024525339A/ja active Pending
- 2022-06-09 TW TW111121492A patent/TW202300497A/zh unknown
-
2024
- 2024-05-03 US US18/654,160 patent/US12298666B2/en active Active
-
2025
- 2025-04-09 US US19/174,135 patent/US20250258432A1/en active Pending
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