JP2024534061A5 - - Google Patents

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Publication number
JP2024534061A5
JP2024534061A5 JP2024509372A JP2024509372A JP2024534061A5 JP 2024534061 A5 JP2024534061 A5 JP 2024534061A5 JP 2024509372 A JP2024509372 A JP 2024509372A JP 2024509372 A JP2024509372 A JP 2024509372A JP 2024534061 A5 JP2024534061 A5 JP 2024534061A5
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JP
Japan
Prior art keywords
composition according
copolymer
iii
mol
alkyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024509372A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024534061A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2022/072817 external-priority patent/WO2023021016A2/en
Publication of JP2024534061A publication Critical patent/JP2024534061A/ja
Publication of JP2024534061A5 publication Critical patent/JP2024534061A5/ja
Pending legal-status Critical Current

Links

JP2024509372A 2021-08-18 2022-08-16 新規親水性ピン止めmatの開発 Pending JP2024534061A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163234301P 2021-08-18 2021-08-18
US63/234,301 2021-08-18
PCT/EP2022/072817 WO2023021016A2 (en) 2021-08-18 2022-08-16 Development of novel hydrophilic pinning mat

Publications (2)

Publication Number Publication Date
JP2024534061A JP2024534061A (ja) 2024-09-18
JP2024534061A5 true JP2024534061A5 (https=) 2025-07-07

Family

ID=83271669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024509372A Pending JP2024534061A (ja) 2021-08-18 2022-08-16 新規親水性ピン止めmatの開発

Country Status (7)

Country Link
US (1) US20240336716A1 (https=)
EP (1) EP4388021A2 (https=)
JP (1) JP2024534061A (https=)
KR (1) KR20240042077A (https=)
CN (1) CN117794964A (https=)
TW (1) TW202319412A (https=)
WO (1) WO2023021016A2 (https=)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5658988A (en) * 1994-06-30 1997-08-19 Kansai Paint Co., Ltd. Resinous composition for coating
JP2000129200A (ja) * 1998-10-23 2000-05-09 Toray Ind Inc 塗料用樹脂組成物
JP5067482B2 (ja) * 2008-06-20 2012-11-07 東亞合成株式会社 接着剤組成物
US8691925B2 (en) * 2011-09-23 2014-04-08 Az Electronic Materials (Luxembourg) S.A.R.L. Compositions of neutral layer for directed self assembly block copolymers and processes thereof
US8697336B2 (en) * 2011-12-15 2014-04-15 Az Electronic Materials Usa Corp. Composition for forming a developable bottom antireflective coating
US8853101B1 (en) * 2013-03-15 2014-10-07 GlobalFoundries, Inc. Methods for fabricating integrated circuits including formation of chemical guide patterns for directed self-assembly lithography
US9093263B2 (en) 2013-09-27 2015-07-28 Az Electronic Materials (Luxembourg) S.A.R.L. Underlayer composition for promoting self assembly and method of making and using
US9181449B2 (en) * 2013-12-16 2015-11-10 Az Electronic Materials (Luxembourg) S.A.R.L. Underlayer composition for promoting self assembly and method of making and using
JP6475963B2 (ja) * 2014-12-05 2019-02-27 東京応化工業株式会社 下地剤組成物及び相分離構造を含む構造体の製造方法
JP6610764B2 (ja) * 2017-12-26 2019-11-27 東洋インキScホールディングス株式会社 熱硬化性ハードコート剤、積層フィルム、及び加飾成型体
JP2021024929A (ja) * 2019-08-02 2021-02-22 昭和電工株式会社 樹脂組成物及びレジスト

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