JP2024526786A5 - - Google Patents

Info

Publication number
JP2024526786A5
JP2024526786A5 JP2024502156A JP2024502156A JP2024526786A5 JP 2024526786 A5 JP2024526786 A5 JP 2024526786A5 JP 2024502156 A JP2024502156 A JP 2024502156A JP 2024502156 A JP2024502156 A JP 2024502156A JP 2024526786 A5 JP2024526786 A5 JP 2024526786A5
Authority
JP
Japan
Prior art keywords
layer
alloy
ferromagnetic layer
seed layer
tunnel barrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024502156A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024526786A (ja
JP7731495B2 (ja
Filing date
Publication date
Priority claimed from US17/472,019 external-priority patent/US12035634B2/en
Application filed filed Critical
Publication of JP2024526786A publication Critical patent/JP2024526786A/ja
Publication of JP2024526786A5 publication Critical patent/JP2024526786A5/ja
Application granted granted Critical
Publication of JP7731495B2 publication Critical patent/JP7731495B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2024502156A 2021-09-10 2022-05-08 改良されたシード層を有するトンネル磁気抵抗(tmr)デバイス Active JP7731495B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/472,019 2021-09-10
US17/472,019 US12035634B2 (en) 2021-09-10 2021-09-10 Tunneling magnetoresistive (TMR) device with improved seed layer
PCT/US2022/028238 WO2023038680A1 (en) 2021-09-10 2022-05-08 Tunneling magnetoresistive (tmr) device with improved seed layer

Publications (3)

Publication Number Publication Date
JP2024526786A JP2024526786A (ja) 2024-07-19
JP2024526786A5 true JP2024526786A5 (https=) 2024-09-13
JP7731495B2 JP7731495B2 (ja) 2025-08-29

Family

ID=85478752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024502156A Active JP7731495B2 (ja) 2021-09-10 2022-05-08 改良されたシード層を有するトンネル磁気抵抗(tmr)デバイス

Country Status (4)

Country Link
US (1) US12035634B2 (https=)
JP (1) JP7731495B2 (https=)
CN (1) CN117730640A (https=)
WO (1) WO2023038680A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12040114B2 (en) 2022-09-14 2024-07-16 Western Digital Technologies, Inc. Magnetoresistive device comprising a synthetic antiferromagnetic coupling layer of RuAl having a (001) texture
US12207563B2 (en) * 2022-09-23 2025-01-21 Western Digital Technologies, Inc. Magnetoresistive devices comprising a synthetic antiferromagnetic coupling layer of RuAl having a (110) texture
US12482588B2 (en) * 2024-01-09 2025-11-25 Western Digital Technologies, Inc. Nitrogen doped oxides for lower bandgap

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6846543B2 (en) 1999-04-20 2005-01-25 Hitachi Global Storage Technologies Netherlands, B.V. Thin film magnetic recording disk with ruthenium-aluminum layer
US7035062B1 (en) 2001-11-29 2006-04-25 Seagate Technology Llc Structure to achieve sensitivity and linear density in tunneling GMR heads using orthogonal magnetic alignments
US6872478B2 (en) 2003-06-26 2005-03-29 Hitachi Global Storage Technologies Netherlands, B.V. Magnetic thin film media with a pre-seed layer of CrTiAl
JP4082711B2 (ja) * 2004-03-12 2008-04-30 独立行政法人科学技術振興機構 磁気抵抗素子及びその製造方法
US7360299B2 (en) * 2005-03-31 2008-04-22 Hitachi Global Storage Technologies Netherlands B. V. Method for manufacturing a magnetic read sensor employing oblique etched underlayers for inducing uniaxial magnetic anisotropy in a hard magnetic in-stack bias layer
US7497007B2 (en) * 2005-07-14 2009-03-03 Headway Technologies, Inc. Process of manufacturing a TMR device
US7859034B2 (en) 2005-09-20 2010-12-28 Grandis Inc. Magnetic devices having oxide antiferromagnetic layer next to free ferromagnetic layer
US7780820B2 (en) * 2005-11-16 2010-08-24 Headway Technologies, Inc. Low resistance tunneling magnetoresistive sensor with natural oxidized double MgO barrier
US8057925B2 (en) * 2008-03-27 2011-11-15 Magic Technologies, Inc. Low switching current dual spin filter (DSF) element for STT-RAM and a method for making the same
JP2010212631A (ja) * 2009-03-12 2010-09-24 Fujitsu Ltd 磁気抵抗効果素子および磁気記憶装置
JP2011108320A (ja) * 2009-11-17 2011-06-02 Hitachi Global Storage Technologies Netherlands Bv 磁気ヘッド及びその製造方法
US20130107616A1 (en) * 2010-07-09 2013-05-02 Hideo Ohno Magnetoresistive effect element and random access memory using same
US8564080B2 (en) * 2010-07-16 2013-10-22 Qualcomm Incorporated Magnetic storage element utilizing improved pinned layer stack
US20120299132A1 (en) 2011-05-27 2012-11-29 Hitachi Global Storage Technologies Netherlands B.V. Tunneling magnetoresistance (tmr) read sensor with low-contact-resistance interfaces
US20130001717A1 (en) * 2011-07-01 2013-01-03 Yuchen Zhou Perpendicular mram with mtj including laminated magnetic layers
KR20130008929A (ko) 2011-07-13 2013-01-23 에스케이하이닉스 주식회사 개선된 자성층의 두께 마진을 갖는 자기 메모리 디바이스
US8670217B1 (en) 2013-02-11 2014-03-11 HGST Netherlands B.V. Scissoring-type current-perpendicular-to-the-plane (CPP) magnetoresistive sensor with free layers having shape anisotropy
KR102255436B1 (ko) * 2014-05-27 2021-05-24 한양대학교 산학협력단 자기터널접합 소자 및 그 제조방법
US9099124B1 (en) * 2014-09-28 2015-08-04 HGST Netherlands B.V. Tunneling magnetoresistive (TMR) device with MgO tunneling barrier layer and nitrogen-containing layer for minimization of boron diffusion
JP6411186B2 (ja) * 2014-11-19 2018-10-24 株式会社東芝 磁気抵抗素子および磁気メモリ
KR102397904B1 (ko) 2015-09-17 2022-05-13 삼성전자주식회사 낮은 보론 농도를 갖는 영역 및 높은 보론 농도를 갖는 영역을 포함하는 자유 층, 자기 저항 셀, 및 자기 저항 메모리 소자, 및 그 제조 방법

Similar Documents

Publication Publication Date Title
US12414476B2 (en) Method for forming a perpendicular spin torque oscillator (PSTO) including forming a magneto resistive sensor (MR) over a spin torque oscillator (STO)
JP4551484B2 (ja) トンネル磁気抵抗薄膜及び磁性多層膜作製装置
US8760818B1 (en) Systems and methods for providing magnetic storage elements with high magneto-resistance using heusler alloys
US9182460B2 (en) Method of fabricating a magnetoresistive element
JP5003109B2 (ja) 強磁性トンネル接合素子、その製造方法、及びそれを用いた磁気ヘッド、磁気メモリ
US6977801B2 (en) Magnetoresistive device with exchange-coupled structure having half-metallic ferromagnetic Heusler alloy in the pinned layer
US7443639B2 (en) Magnetic tunnel junctions including crystalline and amorphous tunnel barrier materials
US7300711B2 (en) Magnetic tunnel junctions with high tunneling magnetoresistance using non-bcc magnetic materials
US9472752B2 (en) High thermal stability reference structure with out-of-plane anisotropy for magnetic device applications
JP2024526786A5 (https=)
JP5429480B2 (ja) 磁気抵抗素子、mram、及び磁気センサー
CN102176510A (zh) 磁电阻效应元件和使用它的磁电阻随机存取存储器
JP2001237472A5 (https=)
JPWO2008155995A1 (ja) トンネル磁気抵抗薄膜及び磁性多層膜作製装置
CN105469809A (zh) 隧道磁阻器件和隧道磁阻读磁头
JP2005116703A (ja) 磁気検出素子
JP7655716B2 (ja) ガラス成形剤を含む酸化物中間膜を有する磁気接合とそれを提供する方法及び磁気装置
US7760474B1 (en) Magnetic element utilizing free layer engineering
US20130001717A1 (en) Perpendicular mram with mtj including laminated magnetic layers
JP7731495B2 (ja) 改良されたシード層を有するトンネル磁気抵抗(tmr)デバイス
KR101635139B1 (ko) 자기 메모리 소자
US8124253B2 (en) Tunneling magnetic sensing element including MGO film as insulating barrier layer
JP7435057B2 (ja) 磁気抵抗効果素子
JP2007221086A (ja) トンネル型磁気検出素子及びその製造方法
WO2021027404A1 (zh) 磁隧道结及降低磁隧道结自由层工艺波动的方法