JP2024517612A5 - - Google Patents

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Publication number
JP2024517612A5
JP2024517612A5 JP2023562960A JP2023562960A JP2024517612A5 JP 2024517612 A5 JP2024517612 A5 JP 2024517612A5 JP 2023562960 A JP2023562960 A JP 2023562960A JP 2023562960 A JP2023562960 A JP 2023562960A JP 2024517612 A5 JP2024517612 A5 JP 2024517612A5
Authority
JP
Japan
Prior art keywords
stress
warpage
stress film
adjustment
warpage adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023562960A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024517612A (ja
JP7862913B2 (ja
Filing date
Publication date
Priority claimed from US17/703,072 external-priority patent/US20220336226A1/en
Application filed filed Critical
Publication of JP2024517612A publication Critical patent/JP2024517612A/ja
Publication of JP2024517612A5 publication Critical patent/JP2024517612A5/ja
Application granted granted Critical
Publication of JP7862913B2 publication Critical patent/JP7862913B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2023562960A 2021-04-15 2022-03-30 直接描画応力膜を用いたウェーハの反り修正方法 Active JP7862913B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US202163175123P 2021-04-15 2021-04-15
US63/175,123 2021-04-15
US17/703,072 US20220336226A1 (en) 2021-04-15 2022-03-24 Method of correcting wafer bow using a direct write stress film
US17/703,072 2022-03-24
PCT/US2022/022529 WO2022221060A1 (en) 2021-04-15 2022-03-30 Method of correcting wafer bow using a direct write stress film

Publications (3)

Publication Number Publication Date
JP2024517612A JP2024517612A (ja) 2024-04-23
JP2024517612A5 true JP2024517612A5 (enExample) 2025-04-04
JP7862913B2 JP7862913B2 (ja) 2026-05-20

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