JP2024157368A - 露光装置、露光方法、および物品製造方法 - Google Patents

露光装置、露光方法、および物品製造方法 Download PDF

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Publication number
JP2024157368A
JP2024157368A JP2023071693A JP2023071693A JP2024157368A JP 2024157368 A JP2024157368 A JP 2024157368A JP 2023071693 A JP2023071693 A JP 2023071693A JP 2023071693 A JP2023071693 A JP 2023071693A JP 2024157368 A JP2024157368 A JP 2024157368A
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JP
Japan
Prior art keywords
measurement
substrate
exposure
area
measurement points
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023071693A
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English (en)
Japanese (ja)
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JP2024157368A5 (enExample
Inventor
順一 本島
Junichi Motojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2023071693A priority Critical patent/JP2024157368A/ja
Priority to KR1020240047758A priority patent/KR20240157548A/ko
Priority to EP24169851.3A priority patent/EP4455793A3/en
Priority to US18/637,683 priority patent/US12663731B2/en
Priority to TW113114899A priority patent/TW202443307A/zh
Priority to CN202410498719.6A priority patent/CN118838124A/zh
Publication of JP2024157368A publication Critical patent/JP2024157368A/ja
Publication of JP2024157368A5 publication Critical patent/JP2024157368A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7046—Strategy, e.g. mark, sensor or wavelength selection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7034—Leveling

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2023071693A 2023-04-25 2023-04-25 露光装置、露光方法、および物品製造方法 Pending JP2024157368A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2023071693A JP2024157368A (ja) 2023-04-25 2023-04-25 露光装置、露光方法、および物品製造方法
KR1020240047758A KR20240157548A (ko) 2023-04-25 2024-04-09 노광장치, 노광방법, 및 물품 제조방법
EP24169851.3A EP4455793A3 (en) 2023-04-25 2024-04-12 Exposure apparatus, exposure method, and article manufacturing method
US18/637,683 US12663731B2 (en) 2023-04-25 2024-04-17 Exposure apparatus, exposure method, and article manufacturing method
TW113114899A TW202443307A (zh) 2023-04-25 2024-04-22 曝光設備、曝光方法、和物品製造方法
CN202410498719.6A CN118838124A (zh) 2023-04-25 2024-04-24 曝光装置、曝光方法和物品制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023071693A JP2024157368A (ja) 2023-04-25 2023-04-25 露光装置、露光方法、および物品製造方法

Publications (2)

Publication Number Publication Date
JP2024157368A true JP2024157368A (ja) 2024-11-07
JP2024157368A5 JP2024157368A5 (enExample) 2026-05-07

Family

ID=90730236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023071693A Pending JP2024157368A (ja) 2023-04-25 2023-04-25 露光装置、露光方法、および物品製造方法

Country Status (6)

Country Link
US (1) US12663731B2 (enExample)
EP (1) EP4455793A3 (enExample)
JP (1) JP2024157368A (enExample)
KR (1) KR20240157548A (enExample)
CN (1) CN118838124A (enExample)
TW (1) TW202443307A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2026091091A (ja) * 2024-11-22 2026-06-03 キヤノン株式会社 計測装置、計測方法、露光方法、露光装置及び物品の製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002334826A (ja) * 2001-05-09 2002-11-22 Canon Inc 露光方法、面位置合わせ方法、露光装置及びデバイス製造方法
JPWO2005088686A1 (ja) * 2004-03-16 2008-01-31 株式会社ニコン 段差計測方法及び装置、並びに露光方法及び装置
KR100776496B1 (ko) 2006-12-04 2007-11-16 동부일렉트로닉스 주식회사 웨이퍼 레벨링 방법
JP5498243B2 (ja) * 2010-05-07 2014-05-21 キヤノン株式会社 露光装置、露光方法及びデバイス製造方法
JP2015032800A (ja) * 2013-08-07 2015-02-16 キヤノン株式会社 リソグラフィ装置、および物品製造方法
JP6491833B2 (ja) 2014-07-31 2019-03-27 株式会社日立ハイテクノロジーズ 高さ測定装置
KR102691584B1 (ko) * 2015-02-23 2024-08-05 가부시키가이샤 니콘 계측 장치, 리소그래피 시스템 및 노광 장치, 그리고 관리 방법, 중첩 계측 방법 및 디바이스 제조 방법
KR20160123236A (ko) * 2015-04-15 2016-10-25 캐논 가부시끼가이샤 노광 장치, 노광 방법, 및 물품의 제조 방법
JP6364059B2 (ja) * 2016-11-18 2018-07-25 キヤノン株式会社 露光装置、露光方法、および物品の製造方法
JP7745407B2 (ja) * 2021-10-01 2025-09-29 キヤノン株式会社 基板上の複数のショット領域の配列を求める方法、露光方法、露光装置、物品の製造方法、プログラム及び情報処理装置
JP7538790B2 (ja) * 2021-12-15 2024-08-22 キヤノン株式会社 露光装置、露光方法及び物品の製造方法

Also Published As

Publication number Publication date
EP4455793A2 (en) 2024-10-30
TW202443307A (zh) 2024-11-01
CN118838124A (zh) 2024-10-25
US20240361707A1 (en) 2024-10-31
US12663731B2 (en) 2026-06-23
KR20240157548A (ko) 2024-11-01
EP4455793A3 (en) 2025-05-14

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