JP2024113396A5 - - Google Patents
Info
- Publication number
- JP2024113396A5 JP2024113396A5 JP2023018342A JP2023018342A JP2024113396A5 JP 2024113396 A5 JP2024113396 A5 JP 2024113396A5 JP 2023018342 A JP2023018342 A JP 2023018342A JP 2023018342 A JP2023018342 A JP 2023018342A JP 2024113396 A5 JP2024113396 A5 JP 2024113396A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- main surface
- outer peripheral
- carbide substrate
- arithmetic mean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023018342A JP2024113396A (ja) | 2023-02-09 | 2023-02-09 | 炭化珪素基板、炭化珪素エピタキシャル基板、炭化珪素基板の製造方法および炭化珪素半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023018342A JP2024113396A (ja) | 2023-02-09 | 2023-02-09 | 炭化珪素基板、炭化珪素エピタキシャル基板、炭化珪素基板の製造方法および炭化珪素半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024113396A JP2024113396A (ja) | 2024-08-22 |
| JP2024113396A5 true JP2024113396A5 (https=) | 2026-01-23 |
Family
ID=92425481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023018342A Pending JP2024113396A (ja) | 2023-02-09 | 2023-02-09 | 炭化珪素基板、炭化珪素エピタキシャル基板、炭化珪素基板の製造方法および炭化珪素半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2024113396A (https=) |
-
2023
- 2023-02-09 JP JP2023018342A patent/JP2024113396A/ja active Pending
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