JP2024022936A5 - - Google Patents

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Publication number
JP2024022936A5
JP2024022936A5 JP2022126391A JP2022126391A JP2024022936A5 JP 2024022936 A5 JP2024022936 A5 JP 2024022936A5 JP 2022126391 A JP2022126391 A JP 2022126391A JP 2022126391 A JP2022126391 A JP 2022126391A JP 2024022936 A5 JP2024022936 A5 JP 2024022936A5
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JP
Japan
Prior art keywords
pattern
mold
pattern formation
area
alignment
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022126391A
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English (en)
Japanese (ja)
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JP2024022936A (ja
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Application filed filed Critical
Priority to JP2022126391A priority Critical patent/JP2024022936A/ja
Priority claimed from JP2022126391A external-priority patent/JP2024022936A/ja
Priority to US18/354,078 priority patent/US20240045347A1/en
Priority to KR1020230099459A priority patent/KR20240020673A/ko
Publication of JP2024022936A publication Critical patent/JP2024022936A/ja
Publication of JP2024022936A5 publication Critical patent/JP2024022936A5/ja
Pending legal-status Critical Current

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JP2022126391A 2022-08-08 2022-08-08 インプリント方法、インプリント装置、及び物品の製造方法 Pending JP2024022936A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022126391A JP2024022936A (ja) 2022-08-08 2022-08-08 インプリント方法、インプリント装置、及び物品の製造方法
US18/354,078 US20240045347A1 (en) 2022-08-08 2023-07-18 Imprinting method, imprint apparatus and article manufacturing method
KR1020230099459A KR20240020673A (ko) 2022-08-08 2023-07-31 임프린트 방법, 임프린트 장치 및 물품 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022126391A JP2024022936A (ja) 2022-08-08 2022-08-08 インプリント方法、インプリント装置、及び物品の製造方法

Publications (2)

Publication Number Publication Date
JP2024022936A JP2024022936A (ja) 2024-02-21
JP2024022936A5 true JP2024022936A5 (enExample) 2025-06-30

Family

ID=89769901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022126391A Pending JP2024022936A (ja) 2022-08-08 2022-08-08 インプリント方法、インプリント装置、及び物品の製造方法

Country Status (3)

Country Link
US (1) US20240045347A1 (enExample)
JP (1) JP2024022936A (enExample)
KR (1) KR20240020673A (enExample)

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