JP2023552858A5 - - Google Patents

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Publication number
JP2023552858A5
JP2023552858A5 JP2023535812A JP2023535812A JP2023552858A5 JP 2023552858 A5 JP2023552858 A5 JP 2023552858A5 JP 2023535812 A JP2023535812 A JP 2023535812A JP 2023535812 A JP2023535812 A JP 2023535812A JP 2023552858 A5 JP2023552858 A5 JP 2023552858A5
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JP
Japan
Prior art keywords
diffraction grating
displacement sensor
diffraction
optical
light
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023535812A
Other languages
English (en)
Japanese (ja)
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JP2023552858A (ja
JP7840963B2 (ja
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Publication date
Priority claimed from GBGB2019714.1A external-priority patent/GB202019714D0/en
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Publication of JP2023552858A publication Critical patent/JP2023552858A/ja
Publication of JP2023552858A5 publication Critical patent/JP2023552858A5/ja
Application granted granted Critical
Publication of JP7840963B2 publication Critical patent/JP7840963B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023535812A 2020-12-14 2021-12-14 光学変位センサ Active JP7840963B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB2019714.1 2020-12-14
GBGB2019714.1A GB202019714D0 (en) 2020-12-14 2020-12-14 Optical displacement sensor
PCT/GB2021/053291 WO2022129893A2 (en) 2020-12-14 2021-12-14 Optical displacement sensor

Publications (3)

Publication Number Publication Date
JP2023552858A JP2023552858A (ja) 2023-12-19
JP2023552858A5 true JP2023552858A5 (https=) 2024-12-13
JP7840963B2 JP7840963B2 (ja) 2026-04-06

Family

ID=74188885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023535812A Active JP7840963B2 (ja) 2020-12-14 2021-12-14 光学変位センサ

Country Status (7)

Country Link
US (2) US12385735B2 (https=)
EP (2) EP4260004B1 (https=)
JP (1) JP7840963B2 (https=)
KR (1) KR20230119671A (https=)
CN (1) CN116635691A (https=)
GB (1) GB202019714D0 (https=)
WO (1) WO2022129893A2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB202019714D0 (en) * 2020-12-14 2021-01-27 Sensibel As Optical displacement sensor
CN119714798B (zh) * 2023-09-28 2026-01-30 甬江实验室 光学器件、光栅衍射效率测试装置、系统、方法及控制器
GB202413751D0 (en) 2024-09-18 2024-10-30 Sensibel As Optical readout modules

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6731391B1 (en) * 1998-05-13 2004-05-04 The Research Foundation Of State University Of New York Shadow moire surface measurement using Talbot effect
US6567572B2 (en) 2000-06-28 2003-05-20 The Board Of Trustees Of The Leland Stanford Junior University Optical displacement sensor
NO315397B1 (no) 2001-11-13 2003-08-25 Sinvent As Optisk forskyvnings-sensor
US7116430B2 (en) * 2002-03-29 2006-10-03 Georgia Technology Research Corporation Highly-sensitive displacement-measuring optical device
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
JP3963885B2 (ja) * 2003-10-27 2007-08-22 オリンパス株式会社 反射型光学式エンコーダーのセンサヘッド
US7485847B2 (en) 2004-12-08 2009-02-03 Georgia Tech Research Corporation Displacement sensor employing discrete light pulse detection
US7230722B2 (en) * 2005-10-19 2007-06-12 University Of Maryland Shadow moire using non-zero talbot distance
JP5198434B2 (ja) * 2007-04-10 2013-05-15 オリンパス株式会社 光学式エンコーダ
US7924973B2 (en) * 2007-11-15 2011-04-12 Csem Centre Suisse D'electronique Et De Microtechnique Sa Interferometer device and method
CN102540304A (zh) * 2012-03-08 2012-07-04 电子科技大学 二维周期孔式Talbot介质相位光栅
NO20130884A1 (no) 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
NO348955B1 (no) * 2014-02-28 2025-07-28 Pgs Geophysical As Optisk bevegelsessensor
CN104238284B (zh) * 2014-09-25 2016-08-17 中国科学院光电技术研究所 一种基于光栅泰伯效应的检焦方法
US9503820B2 (en) * 2015-01-23 2016-11-22 Silicon Audio Directional, Llc Multi-mode microphones
GB201506046D0 (en) * 2015-04-09 2015-05-27 Sinvent As Speech recognition
US10277989B2 (en) * 2016-11-18 2019-04-30 Gopro, Inc. Opto-acoustic transducer and cover glass
KR102476246B1 (ko) * 2017-01-18 2022-12-08 아이피지 포토닉스 코포레이션 재료의 수정을 위한 가간섭적 촬영 및 피드백 제어를 위한 방법 및 시스템
WO2018156702A1 (en) * 2017-02-23 2018-08-30 Nikon Corporation Measurement of a change in a geometrical characteristic and/or position of a workpiece
GB201807889D0 (en) * 2018-05-15 2018-06-27 Sintef Tto As Microphone housing
EP3628990B1 (en) * 2018-09-26 2021-08-25 ams International AG Integrated optical transducer and method for detecting dynamic pressure changes
CN110360935B (zh) 2019-07-31 2020-05-12 西北工业大学 一种基于简化光学纳米谐振腔的面内位移传感单元及方法
GB201916380D0 (en) * 2019-11-11 2019-12-25 Sensibel As Optical microphone substrate
GB202019714D0 (en) * 2020-12-14 2021-01-27 Sensibel As Optical displacement sensor

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