CN116635691A - 光学位移传感器 - Google Patents

光学位移传感器 Download PDF

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Publication number
CN116635691A
CN116635691A CN202180083878.4A CN202180083878A CN116635691A CN 116635691 A CN116635691 A CN 116635691A CN 202180083878 A CN202180083878 A CN 202180083878A CN 116635691 A CN116635691 A CN 116635691A
Authority
CN
China
Prior art keywords
light
diffraction grating
optical
diffraction
grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180083878.4A
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English (en)
Chinese (zh)
Inventor
哈康·萨格柏格
马修·拉科尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Norwegian Shangsheng Xibel Co
Original Assignee
Norwegian Shangsheng Xibel Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Norwegian Shangsheng Xibel Co filed Critical Norwegian Shangsheng Xibel Co
Publication of CN116635691A publication Critical patent/CN116635691A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R29/00—Monitoring arrangements; Testing arrangements
    • H04R29/004—Monitoring arrangements; Testing arrangements for microphones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
CN202180083878.4A 2020-12-14 2021-12-14 光学位移传感器 Pending CN116635691A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB2019714.1A GB202019714D0 (en) 2020-12-14 2020-12-14 Optical displacement sensor
GB2019714.1 2020-12-14
PCT/GB2021/053291 WO2022129893A2 (en) 2020-12-14 2021-12-14 Optical displacement sensor

Publications (1)

Publication Number Publication Date
CN116635691A true CN116635691A (zh) 2023-08-22

Family

ID=74188885

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180083878.4A Pending CN116635691A (zh) 2020-12-14 2021-12-14 光学位移传感器

Country Status (7)

Country Link
US (2) US12385735B2 (https=)
EP (2) EP4260004A2 (https=)
JP (1) JP7840963B2 (https=)
KR (1) KR20230119671A (https=)
CN (1) CN116635691A (https=)
GB (1) GB202019714D0 (https=)
WO (1) WO2022129893A2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119714798A (zh) * 2023-09-28 2025-03-28 甬江实验室 光学器件、光栅衍射效率测试装置、系统、方法及控制器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB202019714D0 (en) * 2020-12-14 2021-01-27 Sensibel As Optical displacement sensor
GB202413751D0 (en) 2024-09-18 2024-10-30 Sensibel As Optical readout modules

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040130728A1 (en) * 2002-03-29 2004-07-08 Degertekin Fahrettin Levent Highly-sensitive displacement-measuring optical device
CN102540304A (zh) * 2012-03-08 2012-07-04 电子科技大学 二维周期孔式Talbot介质相位光栅
CN105308411A (zh) * 2013-06-21 2016-02-03 辛特福特图有限公司 光学位移传感器元件
CN110446580A (zh) * 2017-01-18 2019-11-12 Ipg光子公司 用于相干成像的方法和系统以及用于材料改性的反馈控制
WO2019220103A1 (en) * 2018-05-15 2019-11-21 Sintef Tto As Optical microphone assembly

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US6731391B1 (en) * 1998-05-13 2004-05-04 The Research Foundation Of State University Of New York Shadow moire surface measurement using Talbot effect
US6567572B2 (en) 2000-06-28 2003-05-20 The Board Of Trustees Of The Leland Stanford Junior University Optical displacement sensor
NO315397B1 (no) 2001-11-13 2003-08-25 Sinvent As Optisk forskyvnings-sensor
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
JP3963885B2 (ja) * 2003-10-27 2007-08-22 オリンパス株式会社 反射型光学式エンコーダーのセンサヘッド
US7485847B2 (en) 2004-12-08 2009-02-03 Georgia Tech Research Corporation Displacement sensor employing discrete light pulse detection
US7230722B2 (en) * 2005-10-19 2007-06-12 University Of Maryland Shadow moire using non-zero talbot distance
US8035079B2 (en) * 2007-04-10 2011-10-11 Olympus Corporation Optical encoder
US7924973B2 (en) * 2007-11-15 2011-04-12 Csem Centre Suisse D'electronique Et De Microtechnique Sa Interferometer device and method
NO348955B1 (no) * 2014-02-28 2025-07-28 Pgs Geophysical As Optisk bevegelsessensor
CN104238284B (zh) * 2014-09-25 2016-08-17 中国科学院光电技术研究所 一种基于光栅泰伯效应的检焦方法
US9503820B2 (en) * 2015-01-23 2016-11-22 Silicon Audio Directional, Llc Multi-mode microphones
GB201506046D0 (en) * 2015-04-09 2015-05-27 Sinvent As Speech recognition
US10277989B2 (en) * 2016-11-18 2019-04-30 Gopro, Inc. Opto-acoustic transducer and cover glass
US11982521B2 (en) * 2017-02-23 2024-05-14 Nikon Corporation Measurement of a change in a geometrical characteristic and/or position of a workpiece
EP3628990B1 (en) 2018-09-26 2021-08-25 ams International AG Integrated optical transducer and method for detecting dynamic pressure changes
CN110360935B (zh) 2019-07-31 2020-05-12 西北工业大学 一种基于简化光学纳米谐振腔的面内位移传感单元及方法
GB201916380D0 (en) * 2019-11-11 2019-12-25 Sensibel As Optical microphone substrate
GB202019714D0 (en) * 2020-12-14 2021-01-27 Sensibel As Optical displacement sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040130728A1 (en) * 2002-03-29 2004-07-08 Degertekin Fahrettin Levent Highly-sensitive displacement-measuring optical device
CN102540304A (zh) * 2012-03-08 2012-07-04 电子科技大学 二维周期孔式Talbot介质相位光栅
CN105308411A (zh) * 2013-06-21 2016-02-03 辛特福特图有限公司 光学位移传感器元件
CN110446580A (zh) * 2017-01-18 2019-11-12 Ipg光子公司 用于相干成像的方法和系统以及用于材料改性的反馈控制
WO2019220103A1 (en) * 2018-05-15 2019-11-21 Sintef Tto As Optical microphone assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119714798A (zh) * 2023-09-28 2025-03-28 甬江实验室 光学器件、光栅衍射效率测试装置、系统、方法及控制器

Also Published As

Publication number Publication date
US12385735B2 (en) 2025-08-12
JP7840963B2 (ja) 2026-04-06
EP4260004A2 (en) 2023-10-18
EP4477989A2 (en) 2024-12-18
JP2023552858A (ja) 2023-12-19
EP4477989A3 (en) 2025-07-16
WO2022129893A2 (en) 2022-06-23
WO2022129893A3 (en) 2022-08-04
US20240060768A1 (en) 2024-02-22
KR20230119671A (ko) 2023-08-16
US20250012561A1 (en) 2025-01-09
GB202019714D0 (en) 2021-01-27

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