KR20230119671A - 광학 변위 센서 - Google Patents

광학 변위 센서 Download PDF

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Publication number
KR20230119671A
KR20230119671A KR1020237022978A KR20237022978A KR20230119671A KR 20230119671 A KR20230119671 A KR 20230119671A KR 1020237022978 A KR1020237022978 A KR 1020237022978A KR 20237022978 A KR20237022978 A KR 20237022978A KR 20230119671 A KR20230119671 A KR 20230119671A
Authority
KR
South Korea
Prior art keywords
light
optical
diffraction grating
diffraction
grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237022978A
Other languages
English (en)
Korean (ko)
Inventor
하콘 사그베르그
마티외 라콜레
Original Assignee
센시벨 에이에스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 센시벨 에이에스 filed Critical 센시벨 에이에스
Publication of KR20230119671A publication Critical patent/KR20230119671A/ko
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R29/00—Monitoring arrangements; Testing arrangements
    • H04R29/004—Monitoring arrangements; Testing arrangements for microphones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
KR1020237022978A 2020-12-14 2021-12-14 광학 변위 센서 Pending KR20230119671A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB2019714.1 2020-12-14
GBGB2019714.1A GB202019714D0 (en) 2020-12-14 2020-12-14 Optical displacement sensor
PCT/GB2021/053291 WO2022129893A2 (en) 2020-12-14 2021-12-14 Optical displacement sensor

Publications (1)

Publication Number Publication Date
KR20230119671A true KR20230119671A (ko) 2023-08-16

Family

ID=74188885

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237022978A Pending KR20230119671A (ko) 2020-12-14 2021-12-14 광학 변위 센서

Country Status (7)

Country Link
US (2) US12385735B2 (https=)
EP (2) EP4260004B1 (https=)
JP (1) JP7840963B2 (https=)
KR (1) KR20230119671A (https=)
CN (1) CN116635691A (https=)
GB (1) GB202019714D0 (https=)
WO (1) WO2022129893A2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB202019714D0 (en) * 2020-12-14 2021-01-27 Sensibel As Optical displacement sensor
CN119714798B (zh) * 2023-09-28 2026-01-30 甬江实验室 光学器件、光栅衍射效率测试装置、系统、方法及控制器
GB202413751D0 (en) 2024-09-18 2024-10-30 Sensibel As Optical readout modules

Family Cites Families (24)

* Cited by examiner, † Cited by third party
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US6731391B1 (en) * 1998-05-13 2004-05-04 The Research Foundation Of State University Of New York Shadow moire surface measurement using Talbot effect
US6567572B2 (en) 2000-06-28 2003-05-20 The Board Of Trustees Of The Leland Stanford Junior University Optical displacement sensor
NO315397B1 (no) 2001-11-13 2003-08-25 Sinvent As Optisk forskyvnings-sensor
US7116430B2 (en) * 2002-03-29 2006-10-03 Georgia Technology Research Corporation Highly-sensitive displacement-measuring optical device
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
JP3963885B2 (ja) * 2003-10-27 2007-08-22 オリンパス株式会社 反射型光学式エンコーダーのセンサヘッド
US7485847B2 (en) 2004-12-08 2009-02-03 Georgia Tech Research Corporation Displacement sensor employing discrete light pulse detection
US7230722B2 (en) * 2005-10-19 2007-06-12 University Of Maryland Shadow moire using non-zero talbot distance
JP5198434B2 (ja) * 2007-04-10 2013-05-15 オリンパス株式会社 光学式エンコーダ
US7924973B2 (en) * 2007-11-15 2011-04-12 Csem Centre Suisse D'electronique Et De Microtechnique Sa Interferometer device and method
CN102540304A (zh) * 2012-03-08 2012-07-04 电子科技大学 二维周期孔式Talbot介质相位光栅
NO20130884A1 (no) 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
NO348955B1 (no) * 2014-02-28 2025-07-28 Pgs Geophysical As Optisk bevegelsessensor
CN104238284B (zh) * 2014-09-25 2016-08-17 中国科学院光电技术研究所 一种基于光栅泰伯效应的检焦方法
US9503820B2 (en) * 2015-01-23 2016-11-22 Silicon Audio Directional, Llc Multi-mode microphones
GB201506046D0 (en) * 2015-04-09 2015-05-27 Sinvent As Speech recognition
US10277989B2 (en) * 2016-11-18 2019-04-30 Gopro, Inc. Opto-acoustic transducer and cover glass
KR102476246B1 (ko) * 2017-01-18 2022-12-08 아이피지 포토닉스 코포레이션 재료의 수정을 위한 가간섭적 촬영 및 피드백 제어를 위한 방법 및 시스템
WO2018156702A1 (en) * 2017-02-23 2018-08-30 Nikon Corporation Measurement of a change in a geometrical characteristic and/or position of a workpiece
GB201807889D0 (en) * 2018-05-15 2018-06-27 Sintef Tto As Microphone housing
EP3628990B1 (en) * 2018-09-26 2021-08-25 ams International AG Integrated optical transducer and method for detecting dynamic pressure changes
CN110360935B (zh) 2019-07-31 2020-05-12 西北工业大学 一种基于简化光学纳米谐振腔的面内位移传感单元及方法
GB201916380D0 (en) * 2019-11-11 2019-12-25 Sensibel As Optical microphone substrate
GB202019714D0 (en) * 2020-12-14 2021-01-27 Sensibel As Optical displacement sensor

Also Published As

Publication number Publication date
JP2023552858A (ja) 2023-12-19
EP4477989A3 (en) 2025-07-16
EP4260004B1 (en) 2026-05-06
US20250012561A1 (en) 2025-01-09
JP7840963B2 (ja) 2026-04-06
CN116635691A (zh) 2023-08-22
EP4477989A2 (en) 2024-12-18
US20240060768A1 (en) 2024-02-22
WO2022129893A2 (en) 2022-06-23
EP4260004A2 (en) 2023-10-18
US12385735B2 (en) 2025-08-12
WO2022129893A3 (en) 2022-08-04
GB202019714D0 (en) 2021-01-27

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20230706

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20241212

Comment text: Request for Examination of Application