JP2023552858A5 - - Google Patents

Info

Publication number
JP2023552858A5
JP2023552858A5 JP2023535812A JP2023535812A JP2023552858A5 JP 2023552858 A5 JP2023552858 A5 JP 2023552858A5 JP 2023535812 A JP2023535812 A JP 2023535812A JP 2023535812 A JP2023535812 A JP 2023535812A JP 2023552858 A5 JP2023552858 A5 JP 2023552858A5
Authority
JP
Japan
Prior art keywords
diffraction grating
displacement sensor
diffraction
optical
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023535812A
Other languages
English (en)
Japanese (ja)
Other versions
JP7840963B2 (ja
JP2023552858A (ja
Filing date
Publication date
Priority claimed from GBGB2019714.1A external-priority patent/GB202019714D0/en
Application filed filed Critical
Publication of JP2023552858A publication Critical patent/JP2023552858A/ja
Publication of JP2023552858A5 publication Critical patent/JP2023552858A5/ja
Priority to JP2026050457A priority Critical patent/JP2026108765A/ja
Application granted granted Critical
Publication of JP7840963B2 publication Critical patent/JP7840963B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2023535812A 2020-12-14 2021-12-14 光学変位センサ Active JP7840963B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2026050457A JP2026108765A (ja) 2020-12-14 2026-03-25 光学変位センサ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB2019714.1 2020-12-14
GBGB2019714.1A GB202019714D0 (en) 2020-12-14 2020-12-14 Optical displacement sensor
PCT/GB2021/053291 WO2022129893A2 (en) 2020-12-14 2021-12-14 Optical displacement sensor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2026050457A Division JP2026108765A (ja) 2020-12-14 2026-03-25 光学変位センサ

Publications (3)

Publication Number Publication Date
JP2023552858A JP2023552858A (ja) 2023-12-19
JP2023552858A5 true JP2023552858A5 (enExample) 2024-12-13
JP7840963B2 JP7840963B2 (ja) 2026-04-06

Family

ID=74188885

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023535812A Active JP7840963B2 (ja) 2020-12-14 2021-12-14 光学変位センサ
JP2026050457A Pending JP2026108765A (ja) 2020-12-14 2026-03-25 光学変位センサ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2026050457A Pending JP2026108765A (ja) 2020-12-14 2026-03-25 光学変位センサ

Country Status (7)

Country Link
US (1) US12385735B2 (enExample)
EP (2) EP4260004B1 (enExample)
JP (2) JP7840963B2 (enExample)
KR (1) KR20230119671A (enExample)
CN (1) CN116635691A (enExample)
GB (1) GB202019714D0 (enExample)
WO (1) WO2022129893A2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119714798B (zh) * 2023-09-28 2026-01-30 甬江实验室 光学器件、光栅衍射效率测试装置、系统、方法及控制器
GB202413751D0 (en) 2024-09-18 2024-10-30 Sensibel As Optical readout modules

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6731391B1 (en) * 1998-05-13 2004-05-04 The Research Foundation Of State University Of New York Shadow moire surface measurement using Talbot effect
US6567572B2 (en) 2000-06-28 2003-05-20 The Board Of Trustees Of The Leland Stanford Junior University Optical displacement sensor
NO315397B1 (no) 2001-11-13 2003-08-25 Sinvent As Optisk forskyvnings-sensor
US7116430B2 (en) * 2002-03-29 2006-10-03 Georgia Technology Research Corporation Highly-sensitive displacement-measuring optical device
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
JP3963885B2 (ja) * 2003-10-27 2007-08-22 オリンパス株式会社 反射型光学式エンコーダーのセンサヘッド
US7485847B2 (en) 2004-12-08 2009-02-03 Georgia Tech Research Corporation Displacement sensor employing discrete light pulse detection
US7230722B2 (en) * 2005-10-19 2007-06-12 University Of Maryland Shadow moire using non-zero talbot distance
WO2008126836A1 (ja) * 2007-04-10 2008-10-23 Olympus Corporation 光学式エンコーダ
EP2060909B1 (en) * 2007-11-15 2011-09-07 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Interferometer device and method
CN102540304A (zh) * 2012-03-08 2012-07-04 电子科技大学 二维周期孔式Talbot介质相位光栅
NO20130884A1 (no) * 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
NO348955B1 (no) * 2014-02-28 2025-07-28 Pgs Geophysical As Optisk bevegelsessensor
CN104238284B (zh) * 2014-09-25 2016-08-17 中国科学院光电技术研究所 一种基于光栅泰伯效应的检焦方法
US9503820B2 (en) 2015-01-23 2016-11-22 Silicon Audio Directional, Llc Multi-mode microphones
GB201506046D0 (en) * 2015-04-09 2015-05-27 Sinvent As Speech recognition
US10277989B2 (en) * 2016-11-18 2019-04-30 Gopro, Inc. Opto-acoustic transducer and cover glass
CN110446580B (zh) * 2017-01-18 2022-07-22 Ipg光子公司 用于相干成像的方法和系统以及用于材料改性的反馈控制
US11982521B2 (en) * 2017-02-23 2024-05-14 Nikon Corporation Measurement of a change in a geometrical characteristic and/or position of a workpiece
GB201807889D0 (en) 2018-05-15 2018-06-27 Sintef Tto As Microphone housing
EP3628990B1 (en) * 2018-09-26 2021-08-25 ams International AG Integrated optical transducer and method for detecting dynamic pressure changes
CN110360935B (zh) 2019-07-31 2020-05-12 西北工业大学 一种基于简化光学纳米谐振腔的面内位移传感单元及方法
GB201916380D0 (en) * 2019-11-11 2019-12-25 Sensibel As Optical microphone substrate

Similar Documents

Publication Publication Date Title
JP5100266B2 (ja) エンコーダ
US7907286B2 (en) Optical position-measuring device
JP5710105B2 (ja) 光学式位置測定装置
JP6437802B2 (ja) 光学式エンコーダ
KR101184167B1 (ko) 광 위치 인코더
JPH0843136A (ja) 光学式エンコーダ
JP5599175B2 (ja) 分散素子、分光装置、及び波長選択スイッチ
US9733069B2 (en) Optical position-measuring device
EP3124924B2 (en) Displacement detecting device
JP6593868B2 (ja) 変位検出装置
JP6386337B2 (ja) 光学式エンコーダ
JP7840963B2 (ja) 光学変位センサ
JP5128364B2 (ja) 位置測定装置
JP2021193354A5 (enExample)
JP4506271B2 (ja) 光電式エンコーダ
JP6957088B2 (ja) 光学式エンコーダ
JP5154072B2 (ja) 光電式エンコーダ
JP2018096807A (ja) 光電式エンコーダ
JP7523866B2 (ja) 光学式エンコーダ
JP2006012220A5 (enExample)
JP2006284421A (ja) エンコーダ
JP2019086296A (ja) 光学式エンコーダおよびこれを備えた測定器
JP2018132408A (ja) 光電式エンコーダ
JP2004239854A (ja) 反射型光電式エンコーダ