JP7840963B2 - 光学変位センサ - Google Patents

光学変位センサ

Info

Publication number
JP7840963B2
JP7840963B2 JP2023535812A JP2023535812A JP7840963B2 JP 7840963 B2 JP7840963 B2 JP 7840963B2 JP 2023535812 A JP2023535812 A JP 2023535812A JP 2023535812 A JP2023535812 A JP 2023535812A JP 7840963 B2 JP7840963 B2 JP 7840963B2
Authority
JP
Japan
Prior art keywords
diffraction
diffraction grating
optical
light
grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023535812A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023552858A5 (enExample
JP2023552858A (ja
Inventor
ホーコン サグベルク，
マチュー ラコール，
Original Assignee
センシベル アクティーゼルスカブ
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Application filed by センシベル アクティーゼルスカブ filed Critical センシベル アクティーゼルスカブ
Publication of JP2023552858A publication Critical patent/JP2023552858A/ja
Publication of JP2023552858A5 publication Critical patent/JP2023552858A5/ja
Priority to JP2026050457A priority Critical patent/JP2026108765A/ja
Application granted granted Critical
Publication of JP7840963B2 publication Critical patent/JP7840963B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R29/00—Monitoring arrangements; Testing arrangements
    • H04R29/004—Monitoring arrangements; Testing arrangements for microphones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
JP2023535812A 2020-12-14 2021-12-14 光学変位センサ Active JP7840963B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2026050457A JP2026108765A (ja) 2020-12-14 2026-03-25 光学変位センサ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB2019714.1 2020-12-14
GBGB2019714.1A GB202019714D0 (en) 2020-12-14 2020-12-14 Optical displacement sensor
PCT/GB2021/053291 WO2022129893A2 (en) 2020-12-14 2021-12-14 Optical displacement sensor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2026050457A Division JP2026108765A (ja) 2020-12-14 2026-03-25 光学変位センサ

Publications (3)

Publication Number Publication Date
JP2023552858A JP2023552858A (ja) 2023-12-19
JP2023552858A5 JP2023552858A5 (enExample) 2024-12-13
JP7840963B2 true JP7840963B2 (ja) 2026-04-06

Family

ID=74188885

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023535812A Active JP7840963B2 (ja) 2020-12-14 2021-12-14 光学変位センサ
JP2026050457A Pending JP2026108765A (ja) 2020-12-14 2026-03-25 光学変位センサ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2026050457A Pending JP2026108765A (ja) 2020-12-14 2026-03-25 光学変位センサ

Country Status (7)

Country Link
US (1) US12385735B2 (enExample)
EP (2) EP4260004B1 (enExample)
JP (2) JP7840963B2 (enExample)
KR (1) KR20230119671A (enExample)
CN (1) CN116635691A (enExample)
GB (1) GB202019714D0 (enExample)
WO (1) WO2022129893A2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119714798B (zh) * 2023-09-28 2026-01-30 甬江实验室 光学器件、光栅衍射效率测试装置、系统、方法及控制器
GB202413751D0 (en) 2024-09-18 2024-10-30 Sensibel As Optical readout modules

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040130728A1 (en) 2002-03-29 2004-07-08 Degertekin Fahrettin Levent Highly-sensitive displacement-measuring optical device
US20160219374A1 (en) 2015-01-23 2016-07-28 Silicon Audio Directional, LLC. Multi-mode Microphones
WO2019220103A1 (en) 2018-05-15 2019-11-21 Sintef Tto As Optical microphone assembly

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6731391B1 (en) * 1998-05-13 2004-05-04 The Research Foundation Of State University Of New York Shadow moire surface measurement using Talbot effect
US6567572B2 (en) 2000-06-28 2003-05-20 The Board Of Trustees Of The Leland Stanford Junior University Optical displacement sensor
NO315397B1 (no) 2001-11-13 2003-08-25 Sinvent As Optisk forskyvnings-sensor
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
JP3963885B2 (ja) * 2003-10-27 2007-08-22 オリンパス株式会社 反射型光学式エンコーダーのセンサヘッド
US7485847B2 (en) 2004-12-08 2009-02-03 Georgia Tech Research Corporation Displacement sensor employing discrete light pulse detection
US7230722B2 (en) * 2005-10-19 2007-06-12 University Of Maryland Shadow moire using non-zero talbot distance
WO2008126836A1 (ja) * 2007-04-10 2008-10-23 Olympus Corporation 光学式エンコーダ
EP2060909B1 (en) * 2007-11-15 2011-09-07 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Interferometer device and method
CN102540304A (zh) * 2012-03-08 2012-07-04 电子科技大学 二维周期孔式Talbot介质相位光栅
NO20130884A1 (no) * 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
NO348955B1 (no) * 2014-02-28 2025-07-28 Pgs Geophysical As Optisk bevegelsessensor
CN104238284B (zh) * 2014-09-25 2016-08-17 中国科学院光电技术研究所 一种基于光栅泰伯效应的检焦方法
GB201506046D0 (en) * 2015-04-09 2015-05-27 Sinvent As Speech recognition
US10277989B2 (en) * 2016-11-18 2019-04-30 Gopro, Inc. Opto-acoustic transducer and cover glass
CN110446580B (zh) * 2017-01-18 2022-07-22 Ipg光子公司 用于相干成像的方法和系统以及用于材料改性的反馈控制
US11982521B2 (en) * 2017-02-23 2024-05-14 Nikon Corporation Measurement of a change in a geometrical characteristic and/or position of a workpiece
EP3628990B1 (en) * 2018-09-26 2021-08-25 ams International AG Integrated optical transducer and method for detecting dynamic pressure changes
CN110360935B (zh) 2019-07-31 2020-05-12 西北工业大学 一种基于简化光学纳米谐振腔的面内位移传感单元及方法
GB201916380D0 (en) * 2019-11-11 2019-12-25 Sensibel As Optical microphone substrate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040130728A1 (en) 2002-03-29 2004-07-08 Degertekin Fahrettin Levent Highly-sensitive displacement-measuring optical device
US20160219374A1 (en) 2015-01-23 2016-07-28 Silicon Audio Directional, LLC. Multi-mode Microphones
WO2019220103A1 (en) 2018-05-15 2019-11-21 Sintef Tto As Optical microphone assembly

Also Published As

Publication number Publication date
KR20230119671A (ko) 2023-08-16
EP4477989A2 (en) 2024-12-18
WO2022129893A2 (en) 2022-06-23
JP2026108765A (ja) 2026-06-30
GB202019714D0 (en) 2021-01-27
US20250012561A1 (en) 2025-01-09
US20240060768A1 (en) 2024-02-22
EP4477989A3 (en) 2025-07-16
US12385735B2 (en) 2025-08-12
WO2022129893A3 (en) 2022-08-04
JP2023552858A (ja) 2023-12-19
EP4260004A2 (en) 2023-10-18
EP4260004B1 (en) 2026-05-06
CN116635691A (zh) 2023-08-22

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