JP2023536564A5 - - Google Patents

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Publication number
JP2023536564A5
JP2023536564A5 JP2022578865A JP2022578865A JP2023536564A5 JP 2023536564 A5 JP2023536564 A5 JP 2023536564A5 JP 2022578865 A JP2022578865 A JP 2022578865A JP 2022578865 A JP2022578865 A JP 2022578865A JP 2023536564 A5 JP2023536564 A5 JP 2023536564A5
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Japan
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dimensional structures
sample
learning model
deep learning
computer systems
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JP2022578865A
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Japanese (ja)
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JP7598393B2 (ja
JP2023536564A (ja
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JP2022578865A 2020-08-07 2021-08-06 深層学習を用いた三次元構造の検査または計測 Active JP7598393B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US202063062446P 2020-08-07 2020-08-07
US63/062,446 2020-08-07
US17/393,979 2021-08-04
US17/393,979 US11644756B2 (en) 2020-08-07 2021-08-04 3D structure inspection or metrology using deep learning
PCT/US2021/044859 WO2022032046A1 (en) 2020-08-07 2021-08-06 3d structure inspection or metrology using deep learning

Publications (3)

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JP2023536564A JP2023536564A (ja) 2023-08-28
JP2023536564A5 true JP2023536564A5 (https=) 2024-06-25
JP7598393B2 JP7598393B2 (ja) 2024-12-11

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JP2022578865A Active JP7598393B2 (ja) 2020-08-07 2021-08-06 深層学習を用いた三次元構造の検査または計測

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US (1) US11644756B2 (https=)
EP (1) EP4153939A4 (https=)
JP (1) JP7598393B2 (https=)
KR (1) KR102685758B1 (https=)
CN (1) CN115917246A (https=)
IL (1) IL299069B2 (https=)
TW (1) TWI865814B (https=)
WO (1) WO2022032046A1 (https=)

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