JP2023521998A - 電力回収を伴う入力インピーダンスネットワーク - Google Patents

電力回収を伴う入力インピーダンスネットワーク Download PDF

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Publication number
JP2023521998A
JP2023521998A JP2022562311A JP2022562311A JP2023521998A JP 2023521998 A JP2023521998 A JP 2023521998A JP 2022562311 A JP2022562311 A JP 2022562311A JP 2022562311 A JP2022562311 A JP 2022562311A JP 2023521998 A JP2023521998 A JP 2023521998A
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Prior art keywords
power
voltage
power system
circuit
clamp
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Pending
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JP2022562311A
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English (en)
Japanese (ja)
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JP2023521998A5 (cg-RX-API-DMAC10.html
Inventor
ジル， ギデオン バン
Original Assignee
エーイーエス グローバル ホールディングス， プライベート リミテッド
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Application filed by エーイーエス グローバル ホールディングス， プライベート リミテッド filed Critical エーイーエス グローバル ホールディングス， プライベート リミテッド
Publication of JP2023521998A publication Critical patent/JP2023521998A/ja
Publication of JP2023521998A5 publication Critical patent/JP2023521998A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0003—Details of control, feedback or regulation circuits
    • H02M1/0009—Devices or circuits for detecting current in a converter
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/52—One-way transmission networks, i.e. unilines

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Amplifiers (AREA)
  • Inverter Devices (AREA)
  • Plasma Technology (AREA)
  • Dc Digital Transmission (AREA)
JP2022562311A 2020-04-13 2021-04-13 電力回収を伴う入力インピーダンスネットワーク Pending JP2023521998A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063009049P 2020-04-13 2020-04-13
US63/009,049 2020-04-13
PCT/US2021/027081 WO2021211582A1 (en) 2020-04-13 2021-04-13 Input impedance networks with power recovery

Publications (2)

Publication Number Publication Date
JP2023521998A true JP2023521998A (ja) 2023-05-26
JP2023521998A5 JP2023521998A5 (cg-RX-API-DMAC10.html) 2024-04-23

Family

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Family Applications (1)

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JP2022562311A Pending JP2023521998A (ja) 2020-04-13 2021-04-13 電力回収を伴う入力インピーダンスネットワーク

Country Status (7)

Country Link
US (2) US11876460B2 (cg-RX-API-DMAC10.html)
EP (1) EP4136812A4 (cg-RX-API-DMAC10.html)
JP (1) JP2023521998A (cg-RX-API-DMAC10.html)
KR (1) KR102899304B1 (cg-RX-API-DMAC10.html)
CN (1) CN117678204A (cg-RX-API-DMAC10.html)
TW (1) TWI902781B (cg-RX-API-DMAC10.html)
WO (1) WO2021211582A1 (cg-RX-API-DMAC10.html)

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US11114279B2 (en) * 2019-06-28 2021-09-07 COMET Technologies USA, Inc. Arc suppression device for plasma processing equipment
CN117678204A (zh) 2020-04-13 2024-03-08 先进工程解决方案全球控股私人有限公司 具有功率恢复的输入阻抗网络
US11705822B2 (en) 2021-04-13 2023-07-18 Advanced Energy Industries, Inc. Voltage clamp and current clamp systems with power recovery
US11711022B2 (en) 2021-04-13 2023-07-25 Advanced Energy Industries, Inc. Series stack switch circuit with voltage clamping and power recovery
JP2025501754A (ja) * 2021-12-23 2025-01-23 エーイーエス グローバル ホールディングス， プライベート リミテッド 電圧グランピングおよび電力回収を伴う直列スタックスイッチ回路
JP7227662B1 (ja) 2022-05-27 2023-02-22 本多通信工業株式会社 電磁気妨害低減装置及び電気回路の設計方法

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US20100283395A1 (en) * 2009-05-05 2010-11-11 Van Zyl Gideon Multi-feed rf distribution systems and methods
US9019669B1 (en) * 2012-12-19 2015-04-28 Pmc-Sierra Us, Inc. Distributed electrostatic discharge protection circuit
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CN117678204A (zh) 2020-04-13 2024-03-08 先进工程解决方案全球控股私人有限公司 具有功率恢复的输入阻抗网络
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US11711022B2 (en) 2021-04-13 2023-07-25 Advanced Energy Industries, Inc. Series stack switch circuit with voltage clamping and power recovery
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020180552A1 (en) * 2001-05-29 2002-12-05 Bennett Jeffrey H. Input power limiter for a microwave receiver
US20100283395A1 (en) * 2009-05-05 2010-11-11 Van Zyl Gideon Multi-feed rf distribution systems and methods
US9019669B1 (en) * 2012-12-19 2015-04-28 Pmc-Sierra Us, Inc. Distributed electrostatic discharge protection circuit
JP2020525928A (ja) * 2017-06-28 2020-08-27 レンロック ホールディングズ エルエルシーＬｅｎｌｏｋ Ｈｏｌｄｉｎｇｓ， ＬＬＣ エネルギーハーベスティングｒｆｉｄ回路、エネルギーハーベスティングｒｆｉｄタグ、および関連する方法

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US12237778B2 (en) 2025-02-25
KR20230003521A (ko) 2023-01-06
US11876460B2 (en) 2024-01-16
US20240154541A1 (en) 2024-05-09
CN117678204A (zh) 2024-03-08
US20210320594A1 (en) 2021-10-14
TW202211290A (zh) 2022-03-16
KR102899304B1 (ko) 2025-12-12
EP4136812A4 (en) 2024-04-17
EP4136812A1 (en) 2023-02-22
WO2021211582A1 (en) 2021-10-21
TWI902781B (zh) 2025-11-01

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