TWI902781B - 具有電力回收之輸入阻抗網路 - Google Patents

具有電力回收之輸入阻抗網路

Info

Publication number
TWI902781B
TWI902781B TW110113252A TW110113252A TWI902781B TW I902781 B TWI902781 B TW I902781B TW 110113252 A TW110113252 A TW 110113252A TW 110113252 A TW110113252 A TW 110113252A TW I902781 B TWI902781 B TW I902781B
Authority
TW
Taiwan
Prior art keywords
power
voltage
circuit
current
coupled
Prior art date
Application number
TW110113252A
Other languages
English (en)
Chinese (zh)
Other versions
TW202211290A (zh
Inventor
吉狄翁 封扎爾
Original Assignee
新加坡商Ａｅｓ全球公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 新加坡商Ａｅｓ全球公司 filed Critical 新加坡商Ａｅｓ全球公司
Publication of TW202211290A publication Critical patent/TW202211290A/zh
Application granted granted Critical
Publication of TWI902781B publication Critical patent/TWI902781B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0003—Details of control, feedback or regulation circuits
    • H02M1/0009—Devices or circuits for detecting current in a converter
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/52—One-way transmission networks, i.e. unilines

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Amplifiers (AREA)
  • Inverter Devices (AREA)
  • Plasma Technology (AREA)
  • Dc Digital Transmission (AREA)
TW110113252A 2020-04-13 2021-04-13 具有電力回收之輸入阻抗網路 TWI902781B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202063009049P 2020-04-13 2020-04-13
US63/009,049 2020-04-13

Publications (2)

Publication Number Publication Date
TW202211290A TW202211290A (zh) 2022-03-16
TWI902781B true TWI902781B (zh) 2025-11-01

Family

ID=78006524

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110113252A TWI902781B (zh) 2020-04-13 2021-04-13 具有電力回收之輸入阻抗網路

Country Status (7)

Country Link
US (2) US11876460B2 (cg-RX-API-DMAC10.html)
EP (1) EP4136812A4 (cg-RX-API-DMAC10.html)
JP (1) JP2023521998A (cg-RX-API-DMAC10.html)
KR (1) KR102899304B1 (cg-RX-API-DMAC10.html)
CN (1) CN117678204A (cg-RX-API-DMAC10.html)
TW (1) TWI902781B (cg-RX-API-DMAC10.html)
WO (1) WO2021211582A1 (cg-RX-API-DMAC10.html)

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US11114279B2 (en) * 2019-06-28 2021-09-07 COMET Technologies USA, Inc. Arc suppression device for plasma processing equipment
CN117678204A (zh) 2020-04-13 2024-03-08 先进工程解决方案全球控股私人有限公司 具有功率恢复的输入阻抗网络
US11705822B2 (en) 2021-04-13 2023-07-18 Advanced Energy Industries, Inc. Voltage clamp and current clamp systems with power recovery
US11711022B2 (en) 2021-04-13 2023-07-25 Advanced Energy Industries, Inc. Series stack switch circuit with voltage clamping and power recovery
JP2025501754A (ja) * 2021-12-23 2025-01-23 エーイーエス グローバル ホールディングス， プライベート リミテッド 電圧グランピングおよび電力回収を伴う直列スタックスイッチ回路
JP7227662B1 (ja) 2022-05-27 2023-02-22 本多通信工業株式会社 電磁気妨害低減装置及び電気回路の設計方法

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US10404242B1 (en) * 2017-03-02 2019-09-03 Rockwell Collins, Inc. High power RF limiter

Also Published As

Publication number Publication date
US12237778B2 (en) 2025-02-25
KR20230003521A (ko) 2023-01-06
US11876460B2 (en) 2024-01-16
US20240154541A1 (en) 2024-05-09
CN117678204A (zh) 2024-03-08
JP2023521998A (ja) 2023-05-26
US20210320594A1 (en) 2021-10-14
TW202211290A (zh) 2022-03-16
KR102899304B1 (ko) 2025-12-12
EP4136812A4 (en) 2024-04-17
EP4136812A1 (en) 2023-02-22
WO2021211582A1 (en) 2021-10-21

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