JP2023509856A - 金属層をセラミック層に接合するためのはんだ材料、そのようなはんだ材料の製造方法、およびそのようなはんだ材料の使用 - Google Patents
金属層をセラミック層に接合するためのはんだ材料、そのようなはんだ材料の製造方法、およびそのようなはんだ材料の使用 Download PDFInfo
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- JP2023509856A JP2023509856A JP2022536854A JP2022536854A JP2023509856A JP 2023509856 A JP2023509856 A JP 2023509856A JP 2022536854 A JP2022536854 A JP 2022536854A JP 2022536854 A JP2022536854 A JP 2022536854A JP 2023509856 A JP2023509856 A JP 2023509856A
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- layer
- metal
- solder material
- ceramic
- thickness
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- 229910000679 solder Inorganic materials 0.000 title claims abstract description 114
- 239000000463 material Substances 0.000 title claims abstract description 113
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 99
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- 239000000919 ceramic Substances 0.000 title claims abstract description 94
- 238000005304 joining Methods 0.000 title claims abstract description 18
- 238000000034 method Methods 0.000 title claims description 36
- 239000000758 substrate Substances 0.000 claims abstract description 67
- 239000011888 foil Substances 0.000 claims abstract description 52
- 239000010410 layer Substances 0.000 claims description 298
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 239000011241 protective layer Substances 0.000 claims description 10
- 238000000926 separation method Methods 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000003475 lamination Methods 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims 1
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- 239000011149 active material Substances 0.000 description 21
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- 239000010949 copper Substances 0.000 description 20
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 17
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- 239000004332 silver Substances 0.000 description 17
- 238000002788 crimping Methods 0.000 description 13
- 239000010936 titanium Substances 0.000 description 11
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- 238000005096 rolling process Methods 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000007747 plating Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
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- 239000000956 alloy Substances 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
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- 239000010931 gold Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000005019 vapor deposition process Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- AHGIVYNZKJCSBA-UHFFFAOYSA-N [Ti].[Ag].[Cu] Chemical compound [Ti].[Ag].[Cu] AHGIVYNZKJCSBA-UHFFFAOYSA-N 0.000 description 2
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- 238000012545 processing Methods 0.000 description 2
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- 102100033565 Biogenesis of lysosome-related organelles complex 1 subunit 6 Human genes 0.000 description 1
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- 201000005400 Hermansky-Pudlak syndrome 9 Diseases 0.000 description 1
- 101000872147 Homo sapiens Biogenesis of lysosome-related organelles complex 1 subunit 6 Proteins 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- -1 Si 3 N 4 Inorganic materials 0.000 description 1
- 229910008433 SnCU Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HZEWFHLRYVTOIW-UHFFFAOYSA-N [Ti].[Ni] Chemical compound [Ti].[Ni] HZEWFHLRYVTOIW-UHFFFAOYSA-N 0.000 description 1
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0233—Sheets, foils
- B23K35/0238—Sheets, foils layered
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/368—Silicon nitride
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/402—Aluminium
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/404—Manganese or rhenium
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/59—Aspects relating to the structure of the interlayer
- C04B2237/592—Aspects relating to the structure of the interlayer whereby the interlayer is not continuous, e.g. not the whole surface of the smallest substrate is covered by the interlayer
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/72—Forming laminates or joined articles comprising at least two interlayers directly next to each other
Abstract
Description
特許文献5は、ローリングによる銅箔または銅/ニッケル箔間のチタン箔の配置によってはんだ箔を形成する方法を記載する。箔厚は、100μmを上回る。
基材と、
活性金属と、
を含み、
前記はんだ材料が、基材を第1の層に、活性金属を第2の層に有する箔であり、
箔の総厚が、50μm未満、好ましくは25μm未満、より好ましくは15μm未満である、はんだ材料が提供される。
20 金属層
30 はんだ材料
31 第1の層
32 第2の層
33 第3の層
35 ローラ
40 コーティング装置
41 第1の蒸着装置
42 第2の蒸着装置
45 第1のローラ
46 第2のローラ
47 偏光ローラ
48 電極
49 ガルバニック媒体
F 搬送方向
S 積層方向
HSE 主延長平面
D1 第1の厚さ
D2 第2の厚さ
D3 第3の厚さ
GD 総厚
基材と、
活性金属と、
を含み、
前記はんだ材料が、基材を第1の層に、活性金属を第2の層に有する箔であり、
箔の総厚が、25μm未満、より好ましくは15μm未満である、はんだ材料が提供される。
Claims (10)
- 金属層(20)のセラミック層(10)への接合、特に、電気部品の担体としての金属-セラミック基板の形成のためのはんだ材料(30)であって、
基材と、
活性金属と、
を含み、
前記はんだ材料(30)が、前記基材を第1の層(31)に、前記活性金属を第2の層(32)に有する箔であり、
前記箔の総厚(GD)が、50μm未満、好ましくは25μm未満、より好ましくは15μm未満である、はんだ材料(30)。 - 前記箔が、前記基材または別の基材を含む第3の層(33)を備え、前記第2の層(32)が、積層方向(S)で前記第1の層(31)と前記第3の層(33)との間に配置された、請求項1に記載のはんだ材料(30)。
- 前記第1の層(31)が、第1の厚さ(D1)を有し、前記第2の層(32)が、第2の厚さ(D2)を有し、前記第3の層(33)が、第3の厚さ(D3)を有し、前記第2の厚さ(D2)が、前記第1の厚さ(D1)および前記第3の厚さ(D3)の少なくとも一方よりも小さく、特に、前記第2の厚さ(D2)の前記第1の厚さ(D1)に対する比が、0.01~0.3、好ましくは0.01~0.2、特に好ましくは0.01~0.1の値である、請求項1または2に記載のはんだ材料(30)。
- 前記第2の層(32)が、パターン化されているとともに分離部を有する、または、パターン化されている、もしくは、分離部を有する、請求項1~3のいずれか一項に記載のはんだ材料(30)。
- 前記箔が、保護層、特に、前記積層方向(S)に見て前記はんだ材料(30)を遮断する保護層を有する、請求項1~4のいずれか一項に記載のはんだ材料(30)。
- 前記第1の厚さ(D1)が、前記第3の厚さ(D3)と異なる、請求項2~5のいずれか一項に記載のはんだ材料(30)。
- 請求項1~6のいずれか一項に記載のはんだ材料(30)を製造する方法であって、前記第1の層(31)、前記第2の層(32)、および好ましくは前記第3の層(33)が、組み立て、好ましくは結合により箔となる、方法。
- 前記第1の層(31)、前記第2の層(32)、および好ましくは前記第3の層(33)の組み立て前に、パターンが前記第2の層(32)に埋め込まれる、請求項7に記載の方法。
- 前記箔の形成後に、前記箔が、前記金属層(20)および前記セラミック層(10)上、または前記金属層(20)上、もしくは前記セラミック層(10)上に載置され、これらの層が前記箔によって互いに接合される、請求項7または8に記載の方法。
- 金属層(20)のセラミック層(10)への接合、特に、金属-セラミック基板の形成のための請求項1~6のいずれか一項に記載のはんだ材料(30)の使用。
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DE102019135171.5A DE102019135171A1 (de) | 2019-12-19 | 2019-12-19 | Lotmaterial, Verfahren zur Herstellung eines solchen Lotmaterials und Verwendung eines solchen Lotmaterials zur Anbindung einer Metallschicht an eine Keramikschicht |
DE102019135171.5 | 2019-12-19 | ||
PCT/EP2020/084473 WO2021122036A1 (de) | 2019-12-19 | 2020-12-03 | Lotmaterial, verfahren zur herstellung eines solchen lotmaterials und verwendung eines solchen lotmaterials zur anbindung einer metallschicht an eine keramikschicht |
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EP4037867A1 (de) | 2022-08-10 |
DE102019135171A1 (de) | 2021-06-24 |
KR20220090552A (ko) | 2022-06-29 |
CN114845834A (zh) | 2022-08-02 |
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US20230031736A1 (en) | 2023-02-02 |
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