JP2023126803A5 - - Google Patents
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- Publication number
- JP2023126803A5 JP2023126803A5 JP2023099736A JP2023099736A JP2023126803A5 JP 2023126803 A5 JP2023126803 A5 JP 2023126803A5 JP 2023099736 A JP2023099736 A JP 2023099736A JP 2023099736 A JP2023099736 A JP 2023099736A JP 2023126803 A5 JP2023126803 A5 JP 2023126803A5
- Authority
- JP
- Japan
- Prior art keywords
- underlayer film
- resist underlayer
- resist
- group
- composition according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000203 mixture Substances 0.000 claims 11
- 125000004432 carbon atom Chemical group C* 0.000 claims 6
- 229920000642 polymer Polymers 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 5
- 125000001931 aliphatic group Chemical group 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 239000000178 monomer Substances 0.000 claims 3
- 125000000217 alkyl group Chemical group 0.000 claims 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 2
- 230000001939 inductive effect Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 125000000962 organic group Chemical group 0.000 claims 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 2
- 125000003342 alkenyl group Chemical group 0.000 claims 1
- 125000003545 alkoxy group Chemical group 0.000 claims 1
- 125000004414 alkyl thio group Chemical group 0.000 claims 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims 1
- 150000001721 carbon Chemical group 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims 1
- 239000003054 catalyst Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000003431 cross linking reagent Substances 0.000 claims 1
- 125000004093 cyano group Chemical group *C#N 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims 1
- 125000005843 halogen group Chemical group 0.000 claims 1
- 125000005842 heteroatom Chemical group 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 125000001424 substituent group Chemical group 0.000 claims 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019088345 | 2019-05-08 | ||
| JP2019088345 | 2019-05-08 | ||
| JP2021518387A JP7306451B2 (ja) | 2019-05-08 | 2020-05-01 | 脂環式化合物末端の重合体を含むレジスト下層膜形成組成物 |
| PCT/JP2020/018436 WO2020226141A1 (ja) | 2019-05-08 | 2020-05-01 | 脂環式化合物末端の重合体を含むレジスト下層膜形成組成物 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021518387A Division JP7306451B2 (ja) | 2019-05-08 | 2020-05-01 | 脂環式化合物末端の重合体を含むレジスト下層膜形成組成物 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023126803A JP2023126803A (ja) | 2023-09-12 |
| JP2023126803A5 true JP2023126803A5 (US20080242721A1-20081002-C00053.png) | 2023-11-30 |
Family
ID=73050771
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021518387A Active JP7306451B2 (ja) | 2019-05-08 | 2020-05-01 | 脂環式化合物末端の重合体を含むレジスト下層膜形成組成物 |
| JP2023099736A Pending JP2023126803A (ja) | 2019-05-08 | 2023-06-19 | 脂環式化合物末端の重合体を含むレジスト下層膜形成組成物 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021518387A Active JP7306451B2 (ja) | 2019-05-08 | 2020-05-01 | 脂環式化合物末端の重合体を含むレジスト下層膜形成組成物 |
Country Status (5)
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7268684B2 (ja) * | 2018-10-05 | 2023-05-08 | 日産化学株式会社 | レジスト下層膜形成組成物及びそれを用いたレジストパターンの形成方法 |
| JPWO2022244682A1 (US20080242721A1-20081002-C00053.png) * | 2021-05-19 | 2022-11-24 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5337983B2 (ja) * | 2007-09-19 | 2013-11-06 | 日産化学工業株式会社 | 多環式脂肪族環を有するポリマーを含むリソグラフィー用レジスト下層膜形成組成物 |
| WO2009104685A1 (ja) * | 2008-02-21 | 2009-08-27 | 日産化学工業株式会社 | レジスト下層膜形成組成物及びそれを用いたレジストパターンの形成方法 |
| JP6132105B2 (ja) * | 2012-05-07 | 2017-05-24 | 日産化学工業株式会社 | レジスト下層膜形成組成物 |
| KR101489922B1 (ko) | 2012-06-15 | 2015-02-06 | 주식회사 성원정보기술 | 자동차부품용 고무제품을 위한 약품 배합 평량 측정 자동화 장치 |
| JP6413888B2 (ja) * | 2015-03-30 | 2018-10-31 | Jsr株式会社 | パターン形成用組成物、パターン形成方法及びブロック共重合体 |
| US10795261B2 (en) * | 2015-11-17 | 2020-10-06 | Nissan Chemical Industries, Ltd. | Additive for resist underlayer film-forming composition and resist underlayer film-forming composition containing the same |
| JP6699168B2 (ja) * | 2015-12-25 | 2020-05-27 | 日産化学株式会社 | レジスト下層膜形成用組成物及びレジストパターンの形成方法 |
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2020
- 2020-05-01 JP JP2021518387A patent/JP7306451B2/ja active Active
- 2020-05-01 US US17/605,044 patent/US20220187707A1/en active Pending
- 2020-05-01 WO PCT/JP2020/018436 patent/WO2020226141A1/ja active Application Filing
- 2020-05-01 CN CN202080033637.4A patent/CN113795532A/zh active Pending
- 2020-05-01 KR KR1020217032612A patent/KR20220007588A/ko active Search and Examination
-
2023
- 2023-06-19 JP JP2023099736A patent/JP2023126803A/ja active Pending
