JP2023029981A - 基板に粒子を注入するための方法 - Google Patents
基板に粒子を注入するための方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 58
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 82
- 150000002500 ions Chemical class 0.000 claims abstract description 31
- 239000002019 doping agent Substances 0.000 claims abstract description 10
- 238000002513 implantation Methods 0.000 claims abstract description 6
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- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 2
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
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- WYOHGPUPVHHUGO-UHFFFAOYSA-K potassium;oxygen(2-);titanium(4+);phosphate Chemical compound [O-2].[K+].[Ti+4].[O-]P([O-])([O-])=O WYOHGPUPVHHUGO-UHFFFAOYSA-K 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
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- 239000010937 tungsten Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
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- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
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- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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- -1 niobates Chemical compound 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
- 229910001456 vanadium ion Inorganic materials 0.000 description 1
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
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- H01J37/02—Details
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- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/263—Bombardment with radiation with high-energy radiation
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- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
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- H01J2237/317—Processing objects on a microscale
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- H01J2237/31706—Ion implantation characterised by the area treated
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Abstract
Description
-粒子源と粒子加速器を使用して、正に帯電したイオンのイオンビームを生成する。
-基板ホルダーに保持されている基板に、少なくとも1つの受動ブレーキ要素とエネルギーフィルタを挿入した状態でイオンビームを照射する。
-粒子源と粒子加速器を使用して、正に帯電したイオンのイオンビームを生成する。
-エネルギーフィルタを挿入した状態で、基板ホルダーに保持されている基板にイオンビームを照射する。
消費電力(要素内で熱に変換されるエネルギー)=
ビームパワーから送信パワーを引いたもの(エレメントを通過した後の残留パワー)。
Claims (5)
- 粒子源(2)と、粒子加速器(4)と、
基板ホルダー(30)と、
前記粒子加速器(4)と前記基板ホルダー(30)との間に配置されたエネルギーフィルタ(20)であって、注入によって基板(12)内に生成されたドーパント深さプロファイルおよび/または欠陥深度プロファイルを設定するための事前定義された構造プロファイルを有する微細構造膜である、前記エネルギーフィルタ(20)と、を備えた、基板(12)に粒子を注入する装置を提供する工程と、
前記粒子源(2)と、前記粒子加速器(4)とを用いて、正に帯電したイオンのイオンビーム(10)を生成する工程と、
前記エネルギーフィルタ(20)の介在下で、前記基板ホルダー(30)によって保持された前記基板(12)に前記イオンビーム(10)を照射する工程と、
を備えた、前記基板(12)に粒子を注入する方法であって、
前記粒子加速器(4)は、0.3から3.0MeV/核子のエネルギーのパルスイオンビーム(10)または連続イオンビーム(10)を生成する高周波線形加速器またはサイクロトロンであることを特徴とする方法。 - 前記粒子加速器(4)は、各イオン種について核子ごとに1つの固定エネルギーのみを送達することができる構成となっていること、
または、
前記粒子加速器(4)は、1から50MeVのエネルギー範囲のイオンしか供給できず、前記粒子加速器(4)は、設定可能なエネルギーが10未満である構成となっていること、を特徴とする請求項1に記載の方法。 - 前記パルスイオンビーム(10)のパルスデューティファクタは、1:20から1:5の範囲にある請求項1に記載の方法。
- 前記基板(12)に衝突する前記イオンビーム(10)のエネルギーは、前記イオンビーム(10)が前記粒子加速器(4)を離れた後に通過する少なくとも1つのブレーキ要素(22)の数の適切な選択および前記少なくとも1つのブレーキ要素(22)の材料および/または厚さの適切な選択によって変化することを特徴とする請求項1に記載の方法。
- 前記イオンビーム(10)は、前記少なくとも1つのブレーキ要素(22)に衝突する前に拡散することを特徴とする請求項4に記載の方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102019112773.4 | 2019-05-15 | ||
DE102019112773.4A DE102019112773B4 (de) | 2019-05-15 | 2019-05-15 | Vorrichtung und Verfahren zur Implantation von Teilchen in ein Substrat |
JP2021563676A JP7210071B2 (ja) | 2019-05-15 | 2020-05-14 | 基板に粒子を注入するための装置および方法 |
PCT/EP2020/063555 WO2020229638A2 (de) | 2019-05-15 | 2020-05-14 | Vorrichtung und verfahren zur implantation von teilchen in ein substrat |
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JP2021563676A Division JP7210071B2 (ja) | 2019-05-15 | 2020-05-14 | 基板に粒子を注入するための装置および方法 |
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JP2023029981A true JP2023029981A (ja) | 2023-03-07 |
JP7450975B2 JP7450975B2 (ja) | 2024-03-18 |
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US (1) | US20220199362A1 (ja) |
EP (1) | EP3970180A2 (ja) |
JP (2) | JP7210071B2 (ja) |
CN (1) | CN113811975A (ja) |
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JP2007523440A (ja) * | 2004-02-18 | 2007-08-16 | 学校法人早稲田大学 | イオン注入方法及び装置 |
DE102011075350A1 (de) * | 2011-05-05 | 2012-11-08 | Fachhochschule Jena | Energiefilteranordnung für Ionenimplantationsanlagen |
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DE102005061663B4 (de) | 2005-12-22 | 2008-07-17 | RUHR-UNIVERSITäT BOCHUM | Ionenimplantationsvorrichtung |
CN101536616A (zh) * | 2006-11-08 | 2009-09-16 | 硅源公司 | 采用射频四极线性加速器引入用于半导体材料的粒子的设备和方法 |
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JP6057534B2 (ja) * | 2012-04-18 | 2017-01-11 | 住重試験検査株式会社 | 半導体装置の製造方法 |
DE102015202121B4 (de) * | 2015-02-06 | 2017-09-14 | Infineon Technologies Ag | SiC-basierte Supersperrschicht-Halbleitervorrichtungen und Verfahren zur Herstellung dieser |
DE102016106119B4 (de) * | 2016-04-04 | 2019-03-07 | mi2-factory GmbH | Energiefilterelement für Ionenimplantationsanlagen für den Einsatz in der Produktion von Wafern |
DE102016110429A1 (de) * | 2016-06-06 | 2017-12-07 | Infineon Technologies Ag | Energiefilter zum Verarbeiten einer Leistungshalbleitervorrichtung |
DE102016122791B3 (de) | 2016-11-25 | 2018-05-30 | mi2-factory GmbH | Ionenimplantationsanlage, Filterkammer und Implantationsverfahren unter Einsatz eines Energiefilterelements |
JP6785188B2 (ja) * | 2017-05-31 | 2020-11-18 | 住友重機械イオンテクノロジー株式会社 | イオン注入装置およびイオン注入方法 |
JP6925729B2 (ja) * | 2017-08-22 | 2021-08-25 | 住重アテックス株式会社 | 半導体装置の製造方法 |
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JP2007523440A (ja) * | 2004-02-18 | 2007-08-16 | 学校法人早稲田大学 | イオン注入方法及び装置 |
DE102011075350A1 (de) * | 2011-05-05 | 2012-11-08 | Fachhochschule Jena | Energiefilteranordnung für Ionenimplantationsanlagen |
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