JP2022547879A5 - - Google Patents

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Publication number
JP2022547879A5
JP2022547879A5 JP2022514620A JP2022514620A JP2022547879A5 JP 2022547879 A5 JP2022547879 A5 JP 2022547879A5 JP 2022514620 A JP2022514620 A JP 2022514620A JP 2022514620 A JP2022514620 A JP 2022514620A JP 2022547879 A5 JP2022547879 A5 JP 2022547879A5
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JP
Japan
Prior art keywords
coating
coating layer
substrate
interface region
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022514620A
Other languages
English (en)
Japanese (ja)
Other versions
JP7621342B2 (ja
JP2022547879A (ja
Filing date
Publication date
Priority claimed from DE102019124616.4A external-priority patent/DE102019124616A1/de
Application filed filed Critical
Publication of JP2022547879A publication Critical patent/JP2022547879A/ja
Publication of JP2022547879A5 publication Critical patent/JP2022547879A5/ja
Application granted granted Critical
Publication of JP7621342B2 publication Critical patent/JP7621342B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022514620A 2019-09-12 2020-09-08 多層コーティング Active JP7621342B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102019124616.4 2019-09-12
DE102019124616.4A DE102019124616A1 (de) 2019-09-12 2019-09-12 Mehrlagige Beschichtung
PCT/EP2020/075095 WO2021048136A2 (de) 2019-09-12 2020-09-08 Mehrlagige beschichtung

Publications (3)

Publication Number Publication Date
JP2022547879A JP2022547879A (ja) 2022-11-16
JP2022547879A5 true JP2022547879A5 (enExample) 2023-05-09
JP7621342B2 JP7621342B2 (ja) 2025-01-24

Family

ID=72659158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022514620A Active JP7621342B2 (ja) 2019-09-12 2020-09-08 多層コーティング

Country Status (6)

Country Link
US (1) US12221687B2 (enExample)
EP (1) EP4028569A2 (enExample)
JP (1) JP7621342B2 (enExample)
CN (1) CN114423882B (enExample)
DE (1) DE102019124616A1 (enExample)
WO (1) WO2021048136A2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3163079A1 (fr) * 2024-06-11 2025-12-12 Airbus Operations Sas Procédé et système de traitement de surface d’un élément de fixation, utilisant un dispositif de pulvérisation magnétron impulsionnelle à haute puissance.
DE102024123805A1 (de) 2024-08-20 2026-02-26 Cemecon Ag. Beschichtung eines nichtleitenden oder gering leitfähigen Substrats

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5330853A (en) * 1991-03-16 1994-07-19 Leybold Ag Multilayer Ti-Al-N coating for tools
JPH09118973A (ja) * 1995-10-26 1997-05-06 Ishikawajima Harima Heavy Ind Co Ltd 薄膜の作成法および作成装置
EP2010691B1 (de) 2006-04-21 2017-12-06 CemeCon AG Beschichteter körper
DE102006019000A1 (de) * 2006-04-25 2007-12-13 Vtd Vakuumtechnik Dresden Gmbh Einrichtung und Verfahren zur plasmagestützten Abscheidung von Hartstoffschichten
EP2042261A3 (en) 2007-09-26 2015-02-18 Sandvik Intellectual Property AB Method of making a coated cutting tool
EP2272080B1 (de) * 2008-04-28 2012-08-01 CemeCon AG Vorrichtung und verfahren zum vorbehandeln und beschichten von körpern
JP2010102805A (ja) * 2008-10-27 2010-05-06 Hitachi Global Storage Technologies Netherlands Bv トンネル接合型磁気抵抗効果ヘッド
WO2013045454A2 (en) 2011-09-30 2013-04-04 Cemecon Ag Coating of substrates using hipims
FR3025929B1 (fr) * 2014-09-17 2016-10-21 Commissariat Energie Atomique Gaines de combustible nucleaire, procedes de fabrication et utilisation contre l'oxydation.
JP6439869B2 (ja) * 2015-06-02 2018-12-19 富士電機株式会社 磁気記録媒体の製造方法
DE102016122834A1 (de) * 2015-11-27 2017-06-01 Cemecon Ag Beschichtung eines Körpers mit Diamantschicht und Hartstoffschicht
DE102017111784A1 (de) * 2017-05-30 2018-12-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtetes Substrat mit titanhaltiger Beschichtung und modifizierter Titanoxidbeschichtung
US20190088457A1 (en) 2017-09-19 2019-03-21 Applied Materials, Inc. Sync controller for high impulse magnetron sputtering
DE102020116157A1 (de) * 2020-06-18 2021-12-23 Cemecon Ag. Verfahren und Vorrichtung zum Aufbringen einer Beschichtung sowie beschichteter Körper

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