JP2022541735A - 誘電体材料を硬化させる方法及び装置 - Google Patents
誘電体材料を硬化させる方法及び装置 Download PDFInfo
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- JP2022541735A JP2022541735A JP2022500016A JP2022500016A JP2022541735A JP 2022541735 A JP2022541735 A JP 2022541735A JP 2022500016 A JP2022500016 A JP 2022500016A JP 2022500016 A JP2022500016 A JP 2022500016A JP 2022541735 A JP2022541735 A JP 2022541735A
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Classifications
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02345—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light
- H01L21/02351—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light treatment by exposure to corpuscular radiation, e.g. exposure to electrons, alpha-particles, protons or ions
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
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Abstract
Description
Claims (20)
- 集積回路構造を形成する方法であって、
プロセスチャンバのプロセス領域にプロセスガスを供給することと、
前記プロセス領域に配置された高二次電子放出係数材料から形成された電極にRF電力を印加することと、
前記プロセス領域にイオンを含むプラズマを生成することと、
前記電極に電子を放出させて電子ビームを形成するために、前記電極にイオンを衝突させることと、
流動性化学気相堆積の生成物である誘電体材料を硬化させるために、前記誘電体材料を前記電子ビームと接触させることと
を含む方法。 - 前記誘電体材料は酸窒化物層である、請求項1に記載の方法。
- 前記酸窒化物層は酸窒化ケイ素であり、酸窒化ケイ素はSiOxNyとして特徴づけられ、xは1以上及び2以下の数であり、yは1以上及び2以下の数である、請求項2に記載の方法。
- 前記誘電体材料を硬化させることにより、xを減少させ、yを増加させる、請求項3に記載の方法。
- 硬化時に、yとxの比が1よりも大きい、請求項4に記載の方法。
- 前記誘電体材料の温度は0から500℃である、請求項1から4のいずれか一項に記載の方法。
- 前記プロセスチャンバの圧力は3から100mTorrである、請求項1から4のいずれか一項に記載の方法。
- 前記プロセスガスは、ヘリウム(He)、アルゴン(Ar)、水素(H2)、アンモニア(NH3)、ジシラン(Si2H6)、メタン(CH4)、アセチレン(C2H2)、三フッ化窒素(NF3)、テトラフルオロメタン(CF4)、六フッ化硫黄(SF6)、一酸化炭素(CO)、トリフルオロメタン(CHF3)、塩素(Cl2)、臭化水素(HBr)、窒素(N2)又は酸素(O2)の1又は複数を含む、請求項1から4のいずれか一項に記載の方法。
- 前記誘電体材料に30Wから5000Wの量のバイアス電力を供給することを更に含む、請求項1から4のいずれか一項に記載の方法。
- 流動性化学気相堆積を介して基板上に前記誘電体材料を堆積させることを更に含む、請求項1から4のいずれか一項に記載の方法。
- 統合システムであって、
真空基板移送チャンバと、
流動性化学気相堆積用に構成され、前記真空基板移送チャンバに結合された堆積チャンバと、
前記真空基板移送チャンバに結合された硬化チャンバであって、電子ビーム放射源を用いて誘電体材料を硬化させるように構成された硬化チャンバと
を備える、統合システム。 - 前記硬化チャンバは、前記誘電体材料を0℃から500℃の温度に維持するように構成される、請求項11に記載の統合システム。
- 前記硬化チャンバは、前記誘電体材料を3mTorrから100mTorrの圧力に維持するように構成される、請求項11に記載の統合システム。
- 前記硬化チャンバは、前記誘電体材料に30Wから5000Wの量のバイアス電力を印加するように構成される、請求項11に記載の統合システム。
- 前記硬化チャンバは、100Wから約5000Wのプラズマ電力を供給するように構成される、請求項11に記載の統合システム。
- 前記硬化チャンバは、ヘリウム(He)、アルゴン(Ar)、水素(H2)、アンモニア(NH3)、ジシラン(Si2H6)、メタン(CH4)、アセチレン(C2H2)、三フッ化窒素(NF3)、テトラフルオロメタン(CF4)、六フッ化硫黄(SF6)、一酸化炭素(CO)、トリフルオロメタン(CHF3)、塩素(Cl2)、臭化水素(HBr)、窒素(N2)、酸素(O2)の1又は複数、及びそれらの組み合わせを含むプロセスガスを含む反応から電子ビームを形成するよう構成される、請求項11から15のいずれか一項に記載の統合システム。
- 前記堆積チャンバは、0℃から100℃の温度で誘電体材料を形成するように構成される、請求項11から15のいずれか一項に記載の統合システム。
- 前記堆積チャンバは、100mTorrから5Torrの圧力で誘電体材料を形成するように構成される、請求項11から15のいずれか一項に記載の統合システム。
- 前記堆積チャンバは、誘電体材料に30Wから5000Wの量のバイアス電力を印加しながら前記誘電体材料を形成するように構成される、請求項11から15のいずれか一項に記載の統合システム。
- コンピュータ可読媒体であって、実行されると、プロセスチャンバに、請求項1から10のいずれか一項に記載の集積回路構造を形成する方法を実行させるように記憶された命令を有する、コンピュータ可読媒体。
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JP2019024080A (ja) * | 2017-06-06 | 2019-02-14 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 連続した堆積−エッチング−処理方法を使用した酸化ケイ素及び窒化ケイ素のボトムアップ成長 |
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JP7331236B2 (ja) | 2023-08-22 |
TW202117802A (zh) | 2021-05-01 |
US20220351969A1 (en) | 2022-11-03 |
KR20220025057A (ko) | 2022-03-03 |
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