JP2022541409A - ナノシートの直接印刷および自己整合ダブル・パターニング - Google Patents
ナノシートの直接印刷および自己整合ダブル・パターニング Download PDFInfo
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Abstract
Description
Claims (23)
- 半導体構造体を形成する方法であって
基板の上に犠牲材料およびチャネル材料の交互層を含むナノシート・スタックを形成することであり、前記チャネル材料の層が1つまたは複数のナノシート電界効果トランジスタのためのナノシート・チャネルを提供する、前記形成することと、
前記ナノシート・スタックの上にハード・マスク・スタックを形成することと、
前記ハード・マスク・スタックの上にパターニング層を形成することと、
前記パターニング層の上にリソグラフィ・マスクをパターニングすることであり、前記リソグラフィ・マスクが、(i)前記ナノシート・スタックおよび前記基板内に第1の幅の1つまたは複数のフィンを直接印刷するための1つまたは複数の第1の領域と、(ii)自己整合ダブル・パターニングを使用して前記ナノシート・スタックおよび前記基板内に第2の幅の2つ以上のフィン間の間隔を設定するための1つまたは複数の第2の領域と、を画定する、前記パターニングすることと、を含み、
前記第2の幅が前記第1の幅よりも小さい、
方法。 - 前記リソグラフィ・マスクが、前記リソグラフィ材料が前記1つまたは複数の第1の領域および前記1つまたは複数の第2の領域を覆うように、前記パターニング層の上にパターニングされる、請求項1に記載の方法。
- 前記リソグラフィ・マスクが、リソグラフィ材料が前記1つまたは複数の第1の領域および前記1つまたは複数の第2の領域を露出させるように、前記パターニング層の上にパターニングされる、請求項1に記載の方法。
- 前記ハード・マスク・スタックが、パディング酸化物層と、前記パディング酸化物層の上の窒化物-酸化物-窒化物ハード・マスク・スタックと、を含む、請求項1に記載の方法。
- 前記パターニング層が非晶質シリコン(a-Si)を含む、請求項1に記載の方法。
- 前記リソグラフィ・マスクによって露出された前記パターニング層の一部分をエッチングして、複数のパターニング・マンドレルを形成することと、
前記リソグラフィ・マスクを除去することと、
をさらに含む、請求項2に記載の方法。 - 前記複数のパターニング・マンドレルと、前記リソグラフィ・マスクによって露出された前記パターニング層の前記一部分のエッチングによって露出された前記ハード・マスク・スタックの上面の一部分と、の上にスペーサ材料を堆積させることと、
前記スペーサ材料をエッチ・バックして、前記複数のパターニング・マンドレルの上面から前記スペーサ材料を除去し、前記ハード・マスク層の前記上面の一部分から前記スペーサ材料を除去し、前記複数のパターニング・マンドレルを取り囲む側壁スペーサを残すことと、
をさらに含む、請求項6に記載の方法。 - 前記複数のパターニング・マンドレルの少なくとも第1のサブセット、および前記複数のパターニング・マンドレルの前記第1のサブセットを取り囲む前記側壁スペーサを覆う第1のブロック・マスクを形成することと、前記複数のパターニング・マンドレルの少なくとも第2のサブセット、および前記複数のパターニング・マンドレルの前記第2のサブセットを取り囲む前記側壁スペーサを露出させることと、をさらに含み、前記複数のパターニング・マンドレルの前記第1のサブセットが、前記第1の幅の前記1つまたは複数のフィンの直接印刷を提供し、前記複数のパターニング・マンドレルの前記第2のサブセットが、前記第2の幅の前記2つ以上のフィン間の前記間隔を設定するための自己整合ダブル・パターニングを提供する、請求項7に記載の方法。
- 前記複数のパターニング・マンドレルの前記第2のサブセットを除去して、前記複数のパターニング・マンドレルの前記第2のサブセットを取り囲む前記側壁スペーサを残すことと、
前記第1のブロック・マスクを除去することと、
をさらに含む、請求項8に記載の方法。 - 前記複数のパターニング・マンドレルの前記第2のサブセットを取り囲む前記側壁スペーサを覆う第2のブロック・マスクを形成することと、前記複数のパターニング・マンドレルの前記第1のサブセット、および前記複数のパターニング・マンドレルの前記第1のサブセットを取り囲む前記側壁スペーサを露出させることと、をさらに含む、請求項9に記載の方法。
- 前記第2のブロック・マスクによって露出された前記複数のパターニング・マンドレルの前記第1のサブセットを取り囲む前記側壁スペーサを除去することと、
前記第2のブロック・マスクを除去することと、
をさらに含む、請求項10に記載の方法。 - 前記ハード・マスク・スタック、前記ナノシート・スタック、および前記基板の少なくとも一部をエッチングして、前記複数のパターニング・マンドレルの前記第1のサブセットの下に前記第1の幅の前記1つまたは複数のフィンを形成し、残っている側壁スペーサの下に前記第2の幅の前記1つまたは複数のフィンを形成することをさらに含む、請求項11に記載の方法。
- 前記リソグラフィ・マスクによって露出された前記パターニング層の一部分をエッチングして、複数のパターニング・マンドレルを形成することと、
前記リソグラフィ・マスクを除去することと、
をさらに含む、請求項3に記載の方法。 - 前記リソグラフィ・マスクによって露出された前記パターニング層の前記一部分のエッチングによって露出された前記ハード・マスク・スタックの上面の一部分の上に酸化物材料を堆積させることと、
前記酸化物材料をエッチ・バックして、前記複数のパターニング・マンドレル間の前記ハード・マスク・スタックの前記上面の上に複数の酸化物マンドレルを形成することと、
をさらに含む、請求項13に記載の方法。 - 前記複数の酸化物マンドレルの少なくとも第1のサブセットを覆うブロック・マスクを形成することと、前記複数の酸化物マンドレルの少なくとも第2のサブセットを露出させることと、をさらに含み、前記複数の酸化物マンドレルの前記第1のサブセットが、前記第1の幅の前記1つまたは複数のフィンの直接印刷を提供し、前記複数の酸化物マンドレルの前記第2のサブセットが、前記第2の幅の前記2つ以上のフィン間の前記間隔を設定するための自己整合ダブル・パターニングを提供する、請求項14に記載の方法。
- 前記複数の酸化物マンドレルの前記第2のサブセットを除去することと、
前記ブロック・マスクを除去することと、
をさらに含む、請求項15に記載の方法。 - 前記複数の酸化物マンドレルの前記第2のサブセットの前記除去によって露出された前記ハード・マスク・スタックの前記上面の一部分の上、ならびに前記複数の酸化物マンドレルの前記第1のサブセットおよび前記複数のパターニング・マンドレルの上面の上にスペーサ材料を形成することと、
前記スペーサ材料をエッチ・バックして、前記複数の酸化物マンドレルの前記第2のサブセットの除去によって露出された前記複数のパターニング・マンドレルの側壁に隣接して側壁スペーサを形成することと、
をさらに含む、請求項16に記載の方法。 - 前記複数のパターニング・マンドレルを除去することをさらに含む、請求項17に記載の方法。
- 前記ハード・マスク・スタック、前記ナノシート・スタック、および前記基板の少なくとも一部をエッチングして、前記複数の酸化物マンドレルの前記第1のサブセットの下に前記第1の幅の前記1つまたは複数のフィンを形成し、前記側壁スペーサの下に前記第2の幅の前記1つまたは複数のフィンを形成することをさらに含む、請求項18に記載の方法。
- 半導体構造体であって
基板と、
犠牲材料およびチャネル材料の交互層を含む、前記基板の上に配置されたナノシート・スタックであり、前記チャネル材料の層が1つまたは複数のナノシート電界効果トランジスタのためのナノシート・チャネルを提供する、前記ナノシート・スタックと、
前記ナノシート・スタックの上に配置されたハード・マスク・スタックと、
前記ハード・マスク・スタックの上に配置されたパターニング層と、
前記パターニング層の上に配置されたリソグラフィ・マスクであり、(i)前記ナノシート・スタックおよび前記基板内に第1の幅の1つまたは複数のフィンを直接印刷するための1つまたは複数の第1の領域と、(ii)自己整合ダブル・パターニングを使用して前記ナノシート・スタックおよび前記基板内に第2の幅の2つ以上のフィン間の間隔を設定するための1つまたは複数の第2の領域と、を画定する、前記リソグラフィ・マスクと、を備え、
前記第2の幅が前記第1の幅よりも小さい、
半導体構造体。 - 前記リソグラフィ・マスクが、前記1つまたは複数の第1の領域および前記1つまたは複数の第2の領域を覆う、請求項22に記載の半導体構造体。
- 前記リソグラフィ・マスクが、前記1つまたは複数の第1の領域および前記1つまたは複数の第2の領域を露出させる、請求項22に記載の半導体構造体。
- 前記第1の幅の前記1つまたは複数のフィンの上の前記ナノシート・スタックがn型ナノシート電界効果トランジスタのためのチャネルを提供し、前記第2の幅の前記1つまたは複数のフィンの上に配置された前記ナノシート・スタックがp型ナノシート電界効果トランジスタのためのチャネルを提供する、請求項22に記載の半導体構造体。
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