JP2022532127A5 - - Google Patents
Info
- Publication number
- JP2022532127A5 JP2022532127A5 JP2021566249A JP2021566249A JP2022532127A5 JP 2022532127 A5 JP2022532127 A5 JP 2022532127A5 JP 2021566249 A JP2021566249 A JP 2021566249A JP 2021566249 A JP2021566249 A JP 2021566249A JP 2022532127 A5 JP2022532127 A5 JP 2022532127A5
- Authority
- JP
- Japan
- Prior art keywords
- units
- support
- boundary
- holding
- retaining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102019112224.4A DE102019112224A1 (de) | 2019-05-10 | 2019-05-10 | Abstützung eines optischen Elements |
| DE102019112224.4 | 2019-05-10 | ||
| PCT/EP2020/062866 WO2020229345A1 (en) | 2019-05-10 | 2020-05-08 | Supporting an optical element |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022532127A JP2022532127A (ja) | 2022-07-13 |
| JP2022532127A5 true JP2022532127A5 (https=) | 2024-10-30 |
| JP7691935B2 JP7691935B2 (ja) | 2025-06-12 |
Family
ID=70680507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021566249A Active JP7691935B2 (ja) | 2019-05-10 | 2020-05-08 | 光学素子の支持 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US11422469B2 (https=) |
| EP (1) | EP3966635A1 (https=) |
| JP (1) | JP7691935B2 (https=) |
| KR (1) | KR20220007052A (https=) |
| CN (1) | CN113811820B (https=) |
| DE (1) | DE102019112224A1 (https=) |
| TW (1) | TWI874393B (https=) |
| WO (1) | WO2020229345A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025162830A1 (en) | 2024-01-29 | 2025-08-07 | Carl Zeiss Smt Gmbh | Collector mirror and collector mirror assembly for lithography |
| DE102024202174A1 (de) * | 2024-03-08 | 2024-12-24 | Carl Zeiss Smt Gmbh | Optische Vorrichtung |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10186196A (ja) * | 1996-12-20 | 1998-07-14 | Canon Inc | 光学素子支持装置およびこれを備えた光学機器、露光装置 |
| DE19825716A1 (de) * | 1998-06-09 | 1999-12-16 | Zeiss Carl Fa | Baugruppe aus optischem Element und Fassung |
| DE19859634A1 (de) | 1998-12-23 | 2000-06-29 | Zeiss Carl Fa | Optisches System, insbesondere Projektionsbelichtungsanlage der Mikrolithographie |
| DE19904152A1 (de) * | 1999-02-03 | 2000-08-10 | Zeiss Carl Fa | Baugruppe aus einem optischen Element und einer Fassung |
| JP2001284226A (ja) | 2000-03-31 | 2001-10-12 | Nikon Corp | 光学部材保持装置及び露光装置並びにマイクロデバイスの製造方法。 |
| JP4945845B2 (ja) * | 2000-03-31 | 2012-06-06 | 株式会社ニコン | 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法。 |
| JP3944095B2 (ja) | 2003-02-26 | 2007-07-11 | キヤノン株式会社 | 保持装置 |
| AU2003219097A1 (en) * | 2003-03-26 | 2004-10-18 | Carl Zeiss Smt Ag | Device for the low-deformation replaceable mounting of an optical element |
| US7265814B2 (en) * | 2003-05-14 | 2007-09-04 | Canon Kabushiki Kaisha | Mirror holding method and optical apparatus |
| JP2004347814A (ja) | 2003-05-21 | 2004-12-09 | Canon Inc | 保持装置、露光装置及びデバイス製造方法 |
| DE10324477A1 (de) * | 2003-05-30 | 2004-12-30 | Carl Zeiss Smt Ag | Mikrolithographische Projektionsbelichtungsanlage |
| US7760327B2 (en) | 2003-10-02 | 2010-07-20 | Carl Zeiss Smt Ag | Reflecting optical element with eccentric optical passageway |
| DE102004018659A1 (de) * | 2004-04-13 | 2005-11-03 | Carl Zeiss Smt Ag | Abschlussmodul für eine optische Anordnung |
| US8400613B2 (en) * | 2005-05-02 | 2013-03-19 | Nikon Corporation | Optical element driving apparatus, projection optical system, exposure apparatus and device manufacturing method |
| TWI372271B (en) * | 2005-09-13 | 2012-09-11 | Zeiss Carl Smt Gmbh | Optical element unit, optical element holder, method of manufacturing an optical element holder, optical element module, optical exposure apparatus, and method of manufacturing a semiconductor device |
| US8441747B2 (en) * | 2006-09-14 | 2013-05-14 | Carl Zeiss Smt Gmbh | Optical module with minimized overrun of the optical element |
| DE102007044054A1 (de) * | 2006-09-14 | 2008-04-17 | Carl Zeiss Smt Ag | Optisches Modul mit minimiertem Überlauf des optischen Elements |
| EP1901101A1 (en) * | 2006-09-14 | 2008-03-19 | Carl Zeiss SMT AG | Optical element unit and method of supporting an optical element |
| US7696492B2 (en) * | 2006-12-13 | 2010-04-13 | Asml Netherlands B.V. | Radiation system and lithographic apparatus |
| DE102008041436A1 (de) * | 2007-10-02 | 2009-04-09 | Carl Zeiss Smt Ag | Optisches Membranelement |
| KR101508727B1 (ko) * | 2008-12-30 | 2015-04-06 | 삼성전자 주식회사 | 가변초점 광학렌즈 |
| DE102010018224A1 (de) | 2010-04-23 | 2012-02-16 | Carl Zeiss Smt Gmbh | Optisches Modul mit einem verstellbaren optischen Element |
| JP6253641B2 (ja) * | 2012-05-21 | 2017-12-27 | エーエスエムエル ネザーランズ ビー．ブイ． | リフレクタ、ペリクル、リソグラフィマスク、膜、スペクトル純度フィルタ、および、装置 |
| DE102015101387B3 (de) * | 2015-01-30 | 2015-12-17 | Jenoptik Optical Systems Gmbh | Optische Fassung mit wenigstens einer Klemmeinheit mit einer Membranfeder |
| CN112166361B (zh) * | 2018-05-24 | 2022-11-25 | 珀莱特股份有限公司 | 具有应力分布支撑结构的光学元件 |
-
2019
- 2019-05-10 DE DE102019112224.4A patent/DE102019112224A1/de active Pending
-
2020
- 2020-05-08 EP EP20725156.2A patent/EP3966635A1/en active Pending
- 2020-05-08 KR KR1020217036276A patent/KR20220007052A/ko active Pending
- 2020-05-08 CN CN202080034662.4A patent/CN113811820B/zh active Active
- 2020-05-08 JP JP2021566249A patent/JP7691935B2/ja active Active
- 2020-05-08 WO PCT/EP2020/062866 patent/WO2020229345A1/en not_active Ceased
- 2020-05-08 US US16/869,941 patent/US11422469B2/en active Active
- 2020-05-11 TW TW109115519A patent/TWI874393B/zh active
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