JP2022519709A - ホウ化物を含む拡散バリア層を含むコーティングを施したコーティングされたツール - Google Patents
ホウ化物を含む拡散バリア層を含むコーティングを施したコーティングされたツール Download PDFInfo
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- JP2022519709A JP2022519709A JP2021546248A JP2021546248A JP2022519709A JP 2022519709 A JP2022519709 A JP 2022519709A JP 2021546248 A JP2021546248 A JP 2021546248A JP 2021546248 A JP2021546248 A JP 2021546248A JP 2022519709 A JP2022519709 A JP 2022519709A
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- boride
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 51
- 230000004888 barrier function Effects 0.000 title claims abstract description 17
- 238000000576 coating method Methods 0.000 claims abstract description 90
- 239000011248 coating agent Substances 0.000 claims abstract description 80
- 239000000758 substrate Substances 0.000 claims abstract description 61
- 229910017052 cobalt Inorganic materials 0.000 claims abstract description 21
- 239000010941 cobalt Substances 0.000 claims abstract description 21
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 21
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052796 boron Inorganic materials 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 15
- 230000000694 effects Effects 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 35
- 238000005240 physical vapour deposition Methods 0.000 claims description 19
- 238000004544 sputter deposition Methods 0.000 claims description 17
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- 238000000151 deposition Methods 0.000 claims description 9
- 241001520063 Candidatus Phytoplasma phoenicium Species 0.000 claims description 8
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- 230000008020 evaporation Effects 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 229910018185 Al—Co Inorganic materials 0.000 claims description 5
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- 230000015572 biosynthetic process Effects 0.000 claims description 5
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- 238000003786 synthesis reaction Methods 0.000 claims description 3
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- 239000010410 layer Substances 0.000 description 63
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
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- 150000001875 compounds Chemical class 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910008482 TiSiN Inorganic materials 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
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- 229910052786 argon Inorganic materials 0.000 description 2
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- 229910000601 superalloy Inorganic materials 0.000 description 2
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- 229910004349 Ti-Al Inorganic materials 0.000 description 1
- 229910004692 Ti—Al Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- 238000002474 experimental method Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000010587 phase diagram Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/0006—Cutting members therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/0006—Cutting members therefor
- B26D2001/002—Materials or surface treatments therefor, e.g. composite materials
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- Chemical & Material Sciences (AREA)
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- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
コーティングを使用しても、特定の用途、例えばTiを含む材料の切断では、基材、例えばカッティングツールのカッティングエッジが高温にさらされることは避けられないため、高温にさらされることに関わる操作で基材表面の損傷を回避するのに役立ち得るコーティングが必要とされている。
本発明の主な目的は、コーティングされた基材表面が高温にさらされた場合に、基板表面からコーティングへの元素の拡散を抑制するのに役立つコーティングを提供することである。この問題は、通常でも起こり得る。
1.コーティングされた基材表面にコーティングを形成する際、例えば、コーティングの堆積中にイオン照射によって基材の表面が高温になることが原因。
2.コーティングされた基材の使用中、例えば、コーティングされた基材の表面が高温に直接さらされることが原因(例えば、コーティングされた基材が、高温が発生するタービンの部品に使用される部品である場合)または、コーティングされた基材が高温に間接的にさらされることが原因(例えば、機械操作中にコーティングされたツールとワークピースが摩擦により接触することで高温になる場合)。
本発明の目的は、コバルト(Co)を含む基材1と、基材の表面に堆積されたコーティング2とを含むコーティングされた基材を提供することによって達成され、該コーティングは、アルミニウムをさらに含み、ホウ素がホウ化物として存在する少なくとも1つのホウ素を含む層20を含み、少なくとも1つのホウ素を含む層20は、Coを含む基材1の表面に直接堆積される(図3a参照)。
1. コーティング堆積中に基材表面が高温になるような方法(例えば、イオン照射により引き起こされる)でコーティングプロセスを行った場合、および
2.使用中にコーティングされた基材が高温にさらされた場合。
以下、いくつかの実施例と図を用いて、本発明をより詳しく説明する。
-AlB2の層もしくはAlB2を含む層、または
-AlWB2の層もしくはAlWB2を含む層、または
-AlB2およびAlWB2の層もしくはAlB2およびAlWB2を含む層、または
-AlNおよびAlB2の層もしくはAlNおよびAlB2を含む層、または
-AlNおよびAlWB2の層もしくはAlNおよびAlWB2を含む層、または
-遷移金属ホウ化物(TMホウ化物)の層もしくはTMホウ化物を含む層、ここで、TMは以下から選択される1以上の遷移金属である。3d、4dおよび5d元素、この層はさらにAlを含む。
-コーティングされた表面を有するコーティングされたツールであって、該コーティングされた表面は、コーティングされたツールの一部である基材表面と、前記基材表面上に堆積されたコーティングとを含み、基材表面は、コバルトおよび/またはニッケルを含む材料から作られ、コーティングは、少なくとも1つのホウ化物を含む層を有し、前記少なくとも1つのホウ化物を含む層は、ホウ化物から作られるまたはホウ化物を含む材料から作られ、前記少なくとも1つのホウ化物を含む層は、コーティングされたツールまたはコーティングされた表面が約600~1200℃の範囲の温度にさらされたときに、コバルトおよび/またはニッケルの基材表面からコーティングへの拡散を止める拡散バリア層である、ツール。
-AlB2または
-AlWB2または
-AlB2およびAlWB2または
-TMホウ化物、ここで、TMは、次の群3d、4dおよび5d元素から選択される1つ以上の遷移金属であり、この層はさらにAlを含む。
Claims (17)
- コーティングされた表面を含むコーティングされたツールであって、前記コーティングされた表面は、コーティング(2)が堆積された表面を有する基材(1)を含み、前記基材は、コバルトを含む材料から作られ、前記コーティングは、少なくとも1つのホウ素を含む層(20)を含み、前記少なくとも1つのホウ素を含む層(20)がAlを含み、この層に含まれる前記ホウ素がホウ化物として存在し、それによって前記ホウ素を含む層(20)が、拡散バリア層効果を提供するための、特に、前記コーティングされたツールまたは前記コーティングされた表面が約600℃~1200℃の範囲の温度にさらされたときに、基材表面から前記コーティングへのコバルトの拡散を阻止するためのさらなる層を形成することができることを特徴とする、ツール。
- 前記ホウ素を含む層(20)が、以下を含むものから作られる、請求項1に記載のコーティングされたツール。
-AlB2または
-AlWB2または
-AlB2およびAlWB2または
-TMホウ化物、ここで、TMは、次の群3d、4dおよび5d元素から選択される1つ以上の遷移金属である。 - 前記コーティング(2)が、前記基材(1)と前記少なくとも1つのホウ素を含む層(20)との間に形成された第1のさらなる層(21)を含み、前記第1のさらなる層(21)が、Al-Coの金属間相とB-Coの金属間相とを含むことを特徴とする、請求項1または2に記載のコーティングされたツール。
- 前記コーティング(2)が、前記少なくとも1つのホウ素を含む層(20)の上に形成された第2のさらなる層(22)を含み、前記第2のさらなる層(22)がAl-Oを含むこと特徴とする、請求項3に記載のコーティングされたツール。
- 前記基材表面が、超硬合金から作られるまたは超硬合金を含むことを特徴とする、請求項1または2に記載のコーティングされたツール。
- 前記コーティングが、前記拡散バリア層に加えて、AlおよびWを含む層を含むが、それが好ましくはホウ化物層ではないことを特徴とする、請求項2~5のいずれか1項に記載のコーティングされたツール。
- AlおよびWを含む前記層であるが、それが好ましくはホウ化物層ではない層が、前記基材と前記拡散バリア層との間の中間層として堆積された金属層Al-W層であることを特徴とする、請求項6に記載のコーティングされたツール。
- 前記中間層が、グラディエント層であることを特徴とする、請求項7に記載のコーティングされたツール。
- 前記コーティングされたツールまたは前記コーティングされた表面が、600~1200℃の範囲の温度にさらされることを特徴とする、請求項1~8のいずれか1項に記載のコーティングされたツールの使用。
- 前記コーティングまたは前記コーティングの少なくとも一部が、PVDスパッタリング技術、特に非反応性PVDスパッタリング技術を使用して製造されることを特徴とする、請求項1~7のいずれか1項に記載のコーティングされたツールをコーティングする方法。
- プロセスガスとしてArを使用することを特徴とする、請求項10に記載の方法。
- 少なくとも1つの二元系ホウ化物ターゲットが、特に二元系ホウ化物の合成のために、好ましくは2つの二元系ホウ化物ターゲット、例えばWB2およびAlB2を同時にスパッタリングするために、スパッタリングされることを特徴とする、請求項11に記載の方法。
- スパッタリング中に0.3~0.9Paの圧力範囲が使用されることを特徴とする、請求項10~12のいずれか1項に記載の方法。
- スパッタリング中の基材温度が400℃~600℃の範囲であることを特徴とする、請求項10~13のいずれか1項に記載の方法。
- スパッタリング中に50V未満のバイアス値が使用されることを特徴とする、請求項10~14のいずれか1項に記載の方法。
- 前記中間層Al-Wの堆積に、20at%超のWを含むターゲットを使用することを特徴とする、請求項10~15ならびに6および/または7のいずれか1項に記載の方法。
- 前記コーティングまたは前記コーティングの少なくとも一部が、PVDカソードアーク蒸発技術、好ましくは非反応性PVDカソードアーク蒸発技術を使用して製造されていることを特徴とする、請求項1~7のいずれか1項に記載のコーティングされたツールをコーティングする方法。
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PCT/EP2020/053345 WO2020161358A1 (en) | 2019-02-08 | 2020-02-10 | Coated tool with coating comprising boride-containing diffusion barrier layer |
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US5660886A (en) * | 1995-04-24 | 1997-08-26 | Mc Donnell Douglas Corp | Method for forming in situ diffusion barrier while diffusing aluminum through nickel-boron |
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US6585864B1 (en) * | 2000-06-08 | 2003-07-01 | Surface Engineered Products Corporation | Coating system for high temperature stainless steel |
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US8561707B2 (en) * | 2009-08-18 | 2013-10-22 | Exxonmobil Research And Engineering Company | Ultra-low friction coatings for drill stem assemblies |
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