JP2022175500A5 - - Google Patents

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Publication number
JP2022175500A5
JP2022175500A5 JP2021081909A JP2021081909A JP2022175500A5 JP 2022175500 A5 JP2022175500 A5 JP 2022175500A5 JP 2021081909 A JP2021081909 A JP 2021081909A JP 2021081909 A JP2021081909 A JP 2021081909A JP 2022175500 A5 JP2022175500 A5 JP 2022175500A5
Authority
JP
Japan
Prior art keywords
ceramic
bonding layer
electrode
metal
composite material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021081909A
Other languages
English (en)
Japanese (ja)
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JP2022175500A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2021081909A priority Critical patent/JP2022175500A/ja
Priority claimed from JP2021081909A external-priority patent/JP2022175500A/ja
Priority to CN202210498726.7A priority patent/CN115346906A/zh
Priority to KR1020220057615A priority patent/KR20220154632A/ko
Priority to US17/743,003 priority patent/US11869797B2/en
Priority to TW111117763A priority patent/TW202308857A/zh
Publication of JP2022175500A publication Critical patent/JP2022175500A/ja
Publication of JP2022175500A5 publication Critical patent/JP2022175500A5/ja
Pending legal-status Critical Current

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JP2021081909A 2021-05-13 2021-05-13 静電チャック及び静電チャックの製造方法 Pending JP2022175500A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2021081909A JP2022175500A (ja) 2021-05-13 2021-05-13 静電チャック及び静電チャックの製造方法
CN202210498726.7A CN115346906A (zh) 2021-05-13 2022-05-09 静电吸盘及静电吸盘的制造方法
KR1020220057615A KR20220154632A (ko) 2021-05-13 2022-05-11 정전 척 및 정전 척의 제조 방법
US17/743,003 US11869797B2 (en) 2021-05-13 2022-05-12 Electrostatic chuck and method of manufacturing electrostatic chuck
TW111117763A TW202308857A (zh) 2021-05-13 2022-05-12 靜電夾盤及靜電夾盤之製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021081909A JP2022175500A (ja) 2021-05-13 2021-05-13 静電チャック及び静電チャックの製造方法

Publications (2)

Publication Number Publication Date
JP2022175500A JP2022175500A (ja) 2022-11-25
JP2022175500A5 true JP2022175500A5 (enExample) 2023-12-13

Family

ID=83948103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021081909A Pending JP2022175500A (ja) 2021-05-13 2021-05-13 静電チャック及び静電チャックの製造方法

Country Status (5)

Country Link
US (1) US11869797B2 (enExample)
JP (1) JP2022175500A (enExample)
KR (1) KR20220154632A (enExample)
CN (1) CN115346906A (enExample)
TW (1) TW202308857A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240307963A1 (en) * 2023-03-13 2024-09-19 Applied Materials, Inc. Methods for upper platen manufacturing

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7709099B2 (en) * 2005-07-04 2010-05-04 Kyocera Corporation Bonded body, wafer support member using the same, and wafer treatment method
JP5823915B2 (ja) 2012-05-29 2015-11-25 新光電気工業株式会社 静電チャックの製造方法
JP6182082B2 (ja) * 2013-03-15 2017-08-16 日本碍子株式会社 緻密質複合材料、その製法及び半導体製造装置用部材
JP7068921B2 (ja) * 2018-05-15 2022-05-17 東京エレクトロン株式会社 部品の形成方法及びプラズマ処理装置
CN113544837A (zh) * 2019-03-08 2021-10-22 朗姆研究公司 用于等离子体处理室的卡盘

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