JP2022119065A5 - - Google Patents

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JP2022119065A5
JP2022119065A5 JP2021016038A JP2021016038A JP2022119065A5 JP 2022119065 A5 JP2022119065 A5 JP 2022119065A5 JP 2021016038 A JP2021016038 A JP 2021016038A JP 2021016038 A JP2021016038 A JP 2021016038A JP 2022119065 A5 JP2022119065 A5 JP 2022119065A5
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Japan
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substrate
exposure
substrate stage
exposure apparatus
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JP2021016038A
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JP2022119065A (ja
JP7663365B2 (ja
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JP2021016038A 2021-02-03 2021-02-03 露光装置、物品製造方法、およびステージ装置 Active JP7663365B2 (ja)

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JP2021016038A JP7663365B2 (ja) 2021-02-03 2021-02-03 露光装置、物品製造方法、およびステージ装置

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JP2021016038A JP7663365B2 (ja) 2021-02-03 2021-02-03 露光装置、物品製造方法、およびステージ装置

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JP2022119065A JP2022119065A (ja) 2022-08-16
JP2022119065A5 true JP2022119065A5 (enExample) 2024-02-08
JP7663365B2 JP7663365B2 (ja) 2025-04-16

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Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6320345B1 (en) * 1998-03-05 2001-11-20 Nikon Corporation Command trajectory for driving a stage with minimal vibration
JP5489534B2 (ja) * 2009-05-21 2014-05-14 キヤノン株式会社 露光装置及びデバイス製造方法
JP2011109014A (ja) * 2009-11-20 2011-06-02 Canon Inc 走査型露光装置
JP5406861B2 (ja) * 2011-01-01 2014-02-05 キヤノン株式会社 露光装置及びデバイス製造方法
CN103186055B (zh) * 2011-12-31 2016-04-20 中芯国际集成电路制造(上海)有限公司 光刻机及其扫描曝光方法
JP2015201526A (ja) * 2014-04-07 2015-11-12 キヤノン株式会社 プロファイル生成方法、露光装置およびデバイス製造方法
JP2018189748A (ja) * 2017-04-28 2018-11-29 キヤノン株式会社 ステージ装置、リソグラフィ装置、及び物品の製造方法

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