JP7663365B2 - 露光装置、物品製造方法、およびステージ装置 - Google Patents

露光装置、物品製造方法、およびステージ装置 Download PDF

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JP7663365B2
JP7663365B2 JP2021016038A JP2021016038A JP7663365B2 JP 7663365 B2 JP7663365 B2 JP 7663365B2 JP 2021016038 A JP2021016038 A JP 2021016038A JP 2021016038 A JP2021016038 A JP 2021016038A JP 7663365 B2 JP7663365 B2 JP 7663365B2
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profile
exposure
substrate
acceleration
drive
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JP2022119065A (ja
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守 金石
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Canon Inc
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Canon Inc
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JP2021016038A 2021-02-03 2021-02-03 露光装置、物品製造方法、およびステージ装置 Active JP7663365B2 (ja)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010272673A (ja) 2009-05-21 2010-12-02 Canon Inc 露光装置及びデバイス製造方法
JP2011109014A (ja) 2009-11-20 2011-06-02 Canon Inc 走査型露光装置
JP2012142463A (ja) 2011-01-01 2012-07-26 Canon Inc 露光装置及びデバイス製造方法
US20130169946A1 (en) 2011-12-31 2013-07-04 Semiconductor Manufacturing International Corp. Lithography machine and scanning and exposing method thereof
JP2015201526A (ja) 2014-04-07 2015-11-12 キヤノン株式会社 プロファイル生成方法、露光装置およびデバイス製造方法
JP2018189748A (ja) 2017-04-28 2018-11-29 キヤノン株式会社 ステージ装置、リソグラフィ装置、及び物品の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6320345B1 (en) * 1998-03-05 2001-11-20 Nikon Corporation Command trajectory for driving a stage with minimal vibration

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010272673A (ja) 2009-05-21 2010-12-02 Canon Inc 露光装置及びデバイス製造方法
JP2011109014A (ja) 2009-11-20 2011-06-02 Canon Inc 走査型露光装置
JP2012142463A (ja) 2011-01-01 2012-07-26 Canon Inc 露光装置及びデバイス製造方法
US20130169946A1 (en) 2011-12-31 2013-07-04 Semiconductor Manufacturing International Corp. Lithography machine and scanning and exposing method thereof
JP2015201526A (ja) 2014-04-07 2015-11-12 キヤノン株式会社 プロファイル生成方法、露光装置およびデバイス製造方法
JP2018189748A (ja) 2017-04-28 2018-11-29 キヤノン株式会社 ステージ装置、リソグラフィ装置、及び物品の製造方法

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