JP2022074077A - プラズマ支援原子層堆積技術を用いて半導体デバイスを製造する方法 - Google Patents
プラズマ支援原子層堆積技術を用いて半導体デバイスを製造する方法 Download PDFInfo
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- 238000000231 atomic layer deposition Methods 0.000 title claims abstract description 44
- 239000004065 semiconductor Substances 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 238000000151 deposition Methods 0.000 claims abstract description 36
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 14
- 239000010703 silicon Substances 0.000 claims abstract description 14
- 238000005530 etching Methods 0.000 claims abstract description 7
- 239000004020 conductor Substances 0.000 claims description 18
- 230000008021 deposition Effects 0.000 claims description 18
- 150000001875 compounds Chemical class 0.000 claims description 17
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 14
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 229920005591 polysilicon Polymers 0.000 claims description 4
- 238000005137 deposition process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
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Abstract
Description
100 製造方法
11 基板
111 シリコン基板
113 第1酸化層
13a、13b、13c スタッキング層
131 導体層
133 誘電体層
15 第2酸化層
17 高抵抗層
171 第1多結晶シリコン層
173 第1導電性化合物層
19 低抵抗層
191 第2多結晶シリコン層
193 第2導電性化合物層
20 プラズマ支援原子層堆積装置
21 チャンバ
23 上部電極
231 上加熱器
24 第1無線周波数電力装置
25 下部電極
251 下加熱器
26 第2無線周波数電力装置
27 三次元回転装置
A 角度
D 堆積工程
D1 第1方向
E エッチング工程
N 法線方向
P プラズマ
PR フォトレジスト層
S101~S111 ステップ
t トレンチ
t1 トレンチ
w 幅
Claims (8)
- 基板を提供するステップであって、前記基板はシリコン基板と第1酸化層とを含み、前記第1酸化層は前記シリコン基板に位置するステップと、
複数のスタッキング層を前記基板に堆積するステップであって、各前記スタッキング層は誘電体層と導体層とを含み、且つ前記スタッキング層の層数は20より大きく、各前記スタッキング層において、前記誘電体層が前記導体層の上方に位置し、又は前記導体層が前記誘電体層の上方に位置するステップと、
パターン化されたフォトレジスト層によって前記複数のスタッキング層をエッチングして、前記複数のスタッキング層に少なくとも1つのトレンチを形成させるステップであって、前記トレンチの底部に前記第1酸化層が露出するステップと、
プラズマ支援原子層堆積装置を用いて第2酸化層を前記複数のスタッキング層及び前記少なくとも1つのトレンチに堆積するステップであって、前記プラズマ支援原子層堆積装置はチャンバと、上部電極と、下部電極と、三次元回転装置とを含み、前記上部電極は前記チャンバの上方に位置し且つ前記上部電極に第1無線周波数電力装置が接続され、前記上部電極はプラズマを生成するように構成され、前記三次元回転装置は前記チャンバの下方に設けられ、前記下部電極は前記三次元回転装置に設けられ且つ前記下部電極に第2無線周波数電力装置が接続され、前記基板が前記下部電極に設けられて堆積工程が行われ、前記堆積工程において、前記三次元回転装置は前記基板を連れて回転させて、前記第2酸化層を均一に堆積するステップと、
前記プラズマ支援原子層堆積装置を用いて高抵抗層を前記第2酸化層に堆積するステップと、
前記プラズマ支援原子層堆積装置を用いて低抵抗層を前記高抵抗層に堆積するステップとを含むことを特徴とするプラズマ支援原子層堆積技術を用いて半導体デバイスを製造する方法。 - 基板を提供するステップであって、前記基板はシリコン基板と第1酸化層とを含み、前記第1酸化層は前記シリコン基板に位置するステップと、
複数のスタッキング層を前記基板に堆積するステップであって、各前記スタッキング層は誘電体層と導体層とを含み、前記導体層はP型半導体層又はN型半導体層であり、前記誘電体層は酸化物層であるステップと、
パターン化されたフォトレジスト層によって前記複数のスタッキング層をエッチングして、前記複数のスタッキング層に少なくとも1つのトレンチを形成させるステップであって、前記トレンチの底部に前記第1酸化層が露出するステップと、
プラズマ支援原子層堆積装置を用いて第2酸化層を前記複数のスタッキング層及び前記少なくとも1つのトレンチに堆積するステップであって、前記プラズマ支援原子層堆積装置はチャンバと、上部電極と、下部電極と、三次元回転装置とを含み、前記上部電極は前記チャンバの上方に位置し且つ前記上部電極に第1無線周波数電力装置が接続され、前記上部電極はプラズマを生成するように構成され、前記三次元回転装置は前記チャンバの下方に設けられ、前記下部電極は前記三次元回転装置に設けられ且つ前記下部電極に第2無線周波数電力装置が接続され、前記基板が前記下部電極に設けられて堆積工程が行われ、前記堆積工程において、前記三次元回転装置は前記基板を連れて回転させて、前記第2酸化層を均一に堆積するステップと、
前記プラズマ支援原子層堆積装置を用いて高抵抗層を前記第2酸化層に堆積するステップと、
前記プラズマ支援原子層堆積装置を用いて低抵抗層を前記高抵抗層に堆積するステップとを含むことを特徴とするプラズマ支援原子層堆積技術を用いて半導体デバイスを製造する方法。 - 前記高抵抗層は第1多結晶シリコン層と第1導電性化合物層とを含み、前記低抵抗層は第2多結晶シリコン層と第2導電性化合物層とを含み、前記第2多結晶シリコン層は前記第1多結晶シリコン層より厚さが大きく、前記第2導電性化合物層は前記第1導電性化合物層より厚さが大きいことを特徴とする請求項1又は2に記載の方法。
- 前記下部電極から前記上部電極への方向は第1方向であり、前記三次元回転装置が回転しない時は、前記基板の法線方向は前記第1方向に平行であり、前記三次元回転装置が前記基板を連れて回転させる時は、前記基板の前記法線方向は前記第1方向に対して角度を有し、前記角度は0°~15°であることを特徴とする請求項1又は2に記載の方法。
- 前記上部電極に上加熱器が接続され、前記堆積工程において、前記上加熱器が前記上部電極を加熱して、堆積が均一になることを特徴とする請求項1又は2に記載の方法。
- 前記下部電極に下加熱器が接続され、前記堆積工程において、前記下加熱器が前記下部電極を加熱して、堆積が均一になることを特徴とする請求項1又は2に記載の方法。
- 前記トレンチの幅は45nm~65nmであることを特徴とする請求項1又は2に記載の方法。
- 前記シリコン基板の厚さは520nm~580nmであり、前記第1酸化層の厚さは90nm~110nmであり、前記誘電体層の厚さは18nm~22nmであり、前記導体層の厚さは27nm~33nmであることを特徴とする請求項1又は2に記載の方法。
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08157295A (ja) * | 1994-12-01 | 1996-06-18 | Crystal Device:Kk | 薄膜形成方法 |
JP2005039123A (ja) * | 2003-07-17 | 2005-02-10 | Renesas Technology Corp | 化学気相成長装置 |
JP2015079802A (ja) * | 2013-10-15 | 2015-04-23 | 株式会社東芝 | 不揮発性半導体記憶装置 |
US20170331034A1 (en) * | 2014-12-26 | 2017-11-16 | Institute of Microelectronics, Chinese Academy of Sciences | Self-gated rram cell and method for manufacturing the same |
WO2019212059A1 (ja) * | 2018-05-02 | 2019-11-07 | 東京エレクトロン株式会社 | 上部電極およびプラズマ処理装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08157295A (ja) * | 1994-12-01 | 1996-06-18 | Crystal Device:Kk | 薄膜形成方法 |
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US20170331034A1 (en) * | 2014-12-26 | 2017-11-16 | Institute of Microelectronics, Chinese Academy of Sciences | Self-gated rram cell and method for manufacturing the same |
WO2019212059A1 (ja) * | 2018-05-02 | 2019-11-07 | 東京エレクトロン株式会社 | 上部電極およびプラズマ処理装置 |
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