JP2022035046A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2022035046A5 JP2022035046A5 JP2020139105A JP2020139105A JP2022035046A5 JP 2022035046 A5 JP2022035046 A5 JP 2022035046A5 JP 2020139105 A JP2020139105 A JP 2020139105A JP 2020139105 A JP2020139105 A JP 2020139105A JP 2022035046 A5 JP2022035046 A5 JP 2022035046A5
- Authority
- JP
- Japan
- Prior art keywords
- buffer layer
- less
- layer
- semiconductor device
- drift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012535 impurity Substances 0.000 claims 13
- 239000004065 semiconductor Substances 0.000 claims 13
- 230000015556 catabolic process Effects 0.000 claims 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- 229910052698 phosphorus Inorganic materials 0.000 claims 1
- 239000011574 phosphorus Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020139105A JP7374054B2 (ja) | 2020-08-20 | 2020-08-20 | 半導体装置 |
| US17/336,012 US11545564B2 (en) | 2020-08-20 | 2021-06-01 | Semiconductor device |
| DE102021119689.2A DE102021119689B4 (de) | 2020-08-20 | 2021-07-29 | Halbleitervorrichtung |
| CN202110928731.2A CN114078962B (zh) | 2020-08-20 | 2021-08-13 | 半导体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020139105A JP7374054B2 (ja) | 2020-08-20 | 2020-08-20 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022035046A JP2022035046A (ja) | 2022-03-04 |
| JP2022035046A5 true JP2022035046A5 (https=) | 2022-10-13 |
| JP7374054B2 JP7374054B2 (ja) | 2023-11-06 |
Family
ID=80112916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020139105A Active JP7374054B2 (ja) | 2020-08-20 | 2020-08-20 | 半導体装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11545564B2 (https=) |
| JP (1) | JP7374054B2 (https=) |
| CN (1) | CN114078962B (https=) |
| DE (1) | DE102021119689B4 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023135916A (ja) * | 2022-03-16 | 2023-09-29 | 富士電機株式会社 | 半導体装置 |
| JP2023154929A (ja) * | 2022-04-08 | 2023-10-20 | 富士電機株式会社 | 窒化物半導体装置及び窒化物半導体装置の製造方法 |
| JP7672366B2 (ja) * | 2022-06-27 | 2025-05-07 | 三菱電機株式会社 | 半導体装置 |
| WO2026058799A1 (ja) * | 2024-09-11 | 2026-03-19 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006173297A (ja) * | 2004-12-15 | 2006-06-29 | Denso Corp | Igbt |
| US8766413B2 (en) * | 2009-11-02 | 2014-07-01 | Fuji Electric Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
| EP2913854B1 (en) | 2012-10-23 | 2020-05-27 | Fuji Electric Co., Ltd. | Semiconductor device and method for manufacturing same |
| US10290711B2 (en) * | 2015-01-27 | 2019-05-14 | Mitsubishi Electric Corporation | Semiconductor device |
| CN112490281B (zh) | 2015-06-17 | 2025-02-25 | 富士电机株式会社 | 半导体装置 |
| WO2017115434A1 (ja) * | 2015-12-28 | 2017-07-06 | 三菱電機株式会社 | 半導体装置、半導体装置の製造方法 |
| JP6508099B2 (ja) * | 2016-03-18 | 2019-05-08 | 三菱電機株式会社 | 半導体素子 |
| EP3240040A1 (en) * | 2016-04-26 | 2017-11-01 | ABB Schweiz AG | Insulated gate bipolar transistor and method for manufacturing such an insulated gate bipolar transistor |
| JP6832094B2 (ja) * | 2016-08-05 | 2021-02-24 | ローム株式会社 | パワーモジュール及びモータ駆動回路 |
| JP6784148B2 (ja) * | 2016-11-10 | 2020-11-11 | 三菱電機株式会社 | 半導体装置、絶縁ゲート型バイポーラトランジスタ、絶縁ゲート型バイポーラトランジスタの製造方法 |
| JP6964566B2 (ja) | 2018-08-17 | 2021-11-10 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| DE102018123439B4 (de) * | 2018-09-24 | 2020-04-23 | Infineon Technologies Ag | Leistungshalbleitertransistor, Verfahren zum Verarbeiten eines Leistungshalbleitertransistors und Verfahren zum Produzieren eines Leistungshalbleitertransistors |
-
2020
- 2020-08-20 JP JP2020139105A patent/JP7374054B2/ja active Active
-
2021
- 2021-06-01 US US17/336,012 patent/US11545564B2/en active Active
- 2021-07-29 DE DE102021119689.2A patent/DE102021119689B4/de active Active
- 2021-08-13 CN CN202110928731.2A patent/CN114078962B/zh active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2022035046A5 (https=) | ||
| JP2017208413A5 (https=) | ||
| JP2013517617A5 (https=) | ||
| CN105810746B (zh) | N型薄膜晶体管 | |
| JP2016529720A5 (https=) | ||
| JP2018046255A5 (https=) | ||
| US20090032965A1 (en) | Seminconductor device having P-N column portion | |
| JP2015057850A5 (https=) | ||
| JP2018137324A5 (https=) | ||
| JP2019054070A5 (https=) | ||
| JP2015144220A5 (ja) | 半導体装置 | |
| EP1973165A4 (en) | SILICON-BIPOLARHALBLEITERBAUELEMENT | |
| JP2019071394A5 (https=) | ||
| KR940010917B1 (ko) | 반도체 가변용량소자 | |
| US9607984B2 (en) | Common drain semiconductor device structure and method | |
| CN105932058B (zh) | 电子器件 | |
| JP2010258246A (ja) | グラフェンと金属電極との電気的接合デバイス、それを用いた電子デバイス,電子集積回路及び光/電子集積回路 | |
| US9437720B2 (en) | Semiconductor device | |
| CN114628494B (zh) | 一种新型超级浮动结碳化硅功率器件及其制备方法 | |
| US20150325709A1 (en) | Semiconductor device | |
| CN115621298B (zh) | 浮动结掺杂浓度呈阶梯渐变的碳化硅功率器件 | |
| CN104752522B (zh) | 肖特基势垒二极管及其制造方法 | |
| WO2015145641A1 (ja) | 半導体装置 | |
| JP2018186233A5 (https=) | ||
| CN108770377A (zh) | 具有超晶格结构的半导体晶体管 |