JP2022023872A5 - - Google Patents
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- JP2022023872A5 JP2022023872A5 JP2021169470A JP2021169470A JP2022023872A5 JP 2022023872 A5 JP2022023872 A5 JP 2022023872A5 JP 2021169470 A JP2021169470 A JP 2021169470A JP 2021169470 A JP2021169470 A JP 2021169470A JP 2022023872 A5 JP2022023872 A5 JP 2022023872A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- carbon atoms
- cobalt
- alkyl groups
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862686899P | 2018-06-19 | 2018-06-19 | |
| US62/686,899 | 2018-06-19 | ||
| US16/429,343 | 2019-06-03 | ||
| US16/429,343 US11440929B2 (en) | 2018-06-19 | 2019-06-03 | Bis(diazadiene)cobalt compounds, method of making and method of use thereof |
| JP2019113554A JP7393136B2 (ja) | 2018-06-19 | 2019-06-19 | ビス（ジアザジエン）コバルト化合物、合成方法、コバルト含有膜の堆積方法、コバルトの選択的堆積方法、コバルト含有膜および容器 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019113554A Division JP7393136B2 (ja) | 2018-06-19 | 2019-06-19 | ビス（ジアザジエン）コバルト化合物、合成方法、コバルト含有膜の堆積方法、コバルトの選択的堆積方法、コバルト含有膜および容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022023872A JP2022023872A (ja) | 2022-02-08 |
| JP2022023872A5 true JP2022023872A5 (https=) | 2022-06-28 |
Family
ID=66998308
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019113554A Active JP7393136B2 (ja) | 2018-06-19 | 2019-06-19 | ビス（ジアザジエン）コバルト化合物、合成方法、コバルト含有膜の堆積方法、コバルトの選択的堆積方法、コバルト含有膜および容器 |
| JP2021169470A Pending JP2022023872A (ja) | 2018-06-19 | 2021-10-15 | ビス（ジアザジエン）コバルト化合物、その製造方法及び使用方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019113554A Active JP7393136B2 (ja) | 2018-06-19 | 2019-06-19 | ビス（ジアザジエン）コバルト化合物、合成方法、コバルト含有膜の堆積方法、コバルトの選択的堆積方法、コバルト含有膜および容器 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11440929B2 (https=) |
| EP (1) | EP3584250B1 (https=) |
| JP (2) | JP7393136B2 (https=) |
| KR (1) | KR102362602B1 (https=) |
| CN (1) | CN110615746B (https=) |
| SG (1) | SG10201905339YA (https=) |
| TW (1) | TWI722456B (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090269507A1 (en) * | 2008-04-29 | 2009-10-29 | Sang-Ho Yu | Selective cobalt deposition on copper surfaces |
| KR102487441B1 (ko) * | 2014-09-14 | 2023-01-12 | 엔테그리스, 아이엔씨. | 구리 및 유전체 상의 코발트 침착 선택성 |
| US11440929B2 (en) * | 2018-06-19 | 2022-09-13 | Versum Materials Us, Llc | Bis(diazadiene)cobalt compounds, method of making and method of use thereof |
| JP7378267B2 (ja) * | 2018-11-12 | 2023-11-13 | 東ソー株式会社 | コバルト錯体、その製造方法、及びコバルト含有薄膜の製造方法 |
| US12014925B2 (en) * | 2021-05-25 | 2024-06-18 | Applied Materials, Inc. | Metal-doped carbon hardmasks |
| KR20260042244A (ko) * | 2023-08-24 | 2026-03-30 | 다이킨 고교 가부시키가이샤 | 박막의 제조 방법 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7572731B2 (en) | 2005-06-28 | 2009-08-11 | Micron Technology, Inc. | Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same |
| JP5706755B2 (ja) | 2010-06-10 | 2015-04-22 | 東ソー株式会社 | ヒドロシラン誘導体、その製造方法、ケイ素含有薄膜の製造法 |
| US9255327B2 (en) | 2010-08-24 | 2016-02-09 | Wayne State University | Thermally stable volatile precursors |
| US9822446B2 (en) | 2010-08-24 | 2017-11-21 | Wayne State University | Thermally stable volatile precursors |
| US9353437B2 (en) | 2010-11-17 | 2016-05-31 | Up Chemical Co., Ltd. | Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same |
| KR101606252B1 (ko) | 2011-04-20 | 2016-03-24 | 다나카 기킨조쿠 고교 가부시키가이샤 | 화학 증착용 유기 백금 화합물 및 그 유기 백금 화합물을 사용한 화학 증착방법 |
| US9067958B2 (en) | 2013-10-14 | 2015-06-30 | Intel Corporation | Scalable and high yield synthesis of transition metal bis-diazabutadienes |
| KR102487441B1 (ko) * | 2014-09-14 | 2023-01-12 | 엔테그리스, 아이엔씨. | 구리 및 유전체 상의 코발트 침착 선택성 |
| JP6465699B2 (ja) * | 2015-03-06 | 2019-02-06 | 株式会社Adeka | ジアザジエニル化合物、薄膜形成用原料、薄膜の製造方法及びジアザジエン化合物 |
| US10563305B2 (en) | 2015-05-13 | 2020-02-18 | Versum Materials Us, Llc | Container for chemical precursors in a deposition process |
| JP6675159B2 (ja) * | 2015-06-17 | 2020-04-01 | 株式会社Adeka | 新規な化合物、薄膜形成用原料及び薄膜の製造方法 |
| US10480070B2 (en) | 2016-05-12 | 2019-11-19 | Versum Materials Us, Llc | Delivery container with flow distributor |
| TWI736631B (zh) | 2016-06-06 | 2021-08-21 | 韋恩州立大學 | 二氮雜二烯錯合物與胺類的反應 |
| JP6735163B2 (ja) | 2016-06-22 | 2020-08-05 | 株式会社Adeka | バナジウム化合物、薄膜形成用原料及び薄膜の製造方法 |
| US10752649B2 (en) * | 2017-04-07 | 2020-08-25 | Applied Materials, Inc. | Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use |
| US11440929B2 (en) * | 2018-06-19 | 2022-09-13 | Versum Materials Us, Llc | Bis(diazadiene)cobalt compounds, method of making and method of use thereof |
-
2019
- 2019-06-03 US US16/429,343 patent/US11440929B2/en active Active
- 2019-06-12 SG SG10201905339YA patent/SG10201905339YA/en unknown
- 2019-06-18 KR KR1020190072119A patent/KR102362602B1/ko active Active
- 2019-06-18 TW TW108120976A patent/TWI722456B/zh active
- 2019-06-18 CN CN201910528696.8A patent/CN110615746B/zh active Active
- 2019-06-19 EP EP19181180.1A patent/EP3584250B1/en active Active
- 2019-06-19 JP JP2019113554A patent/JP7393136B2/ja active Active
-
2021
- 2021-10-15 JP JP2021169470A patent/JP2022023872A/ja active Pending
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