JP2021527166A5 - - Google Patents
Info
- Publication number
- JP2021527166A5 JP2021527166A5 JP2020568240A JP2020568240A JP2021527166A5 JP 2021527166 A5 JP2021527166 A5 JP 2021527166A5 JP 2020568240 A JP2020568240 A JP 2020568240A JP 2020568240 A JP2020568240 A JP 2020568240A JP 2021527166 A5 JP2021527166 A5 JP 2021527166A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- substituted
- unsubstituted
- hydrogen
- plating bath
- Prior art date
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP18176836.7A EP3578683B1 (en) | 2018-06-08 | 2018-06-08 | Electroless copper or copper alloy plating bath and method for plating |
| EP18176836.7 | 2018-06-08 | ||
| PCT/EP2019/064616 WO2019234085A1 (en) | 2018-06-08 | 2019-06-05 | Electroless copper or copper alloy plating bath and method for plating |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2021527166A JP2021527166A (ja) | 2021-10-11 |
| JP2021527166A5 true JP2021527166A5 (https=) | 2022-05-31 |
| JPWO2019234085A5 JPWO2019234085A5 (https=) | 2022-05-31 |
| JP7335280B2 JP7335280B2 (ja) | 2023-08-29 |
Family
ID=62597382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020568240A Active JP7335280B2 (ja) | 2018-06-08 | 2019-06-05 | 無電解銅又は銅合金めっき浴及びめっきする方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11396706B2 (https=) |
| EP (1) | EP3578683B1 (https=) |
| JP (1) | JP7335280B2 (https=) |
| KR (1) | KR20210018457A (https=) |
| CN (1) | CN112400036B (https=) |
| TW (1) | TWI814822B (https=) |
| WO (1) | WO2019234085A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7601633B2 (ja) * | 2020-12-28 | 2024-12-17 | 上村工業株式会社 | フレキシブル基板の製造方法 |
| EP4063533A1 (en) * | 2021-03-25 | 2022-09-28 | Atotech Deutschland GmbH & Co. KG | A process for electrochemical deposition of copper with different current densities |
| CN114150299A (zh) * | 2021-04-27 | 2022-03-08 | 天津大学 | 用于超低轮廓铜箔及其覆铜板制备的化学沉积方法 |
| JP7735686B2 (ja) * | 2021-05-24 | 2025-09-09 | 三菱瓦斯化学株式会社 | 無電解銅めっき用組成物および無電解銅めっき方法 |
| KR20260003107A (ko) | 2023-04-26 | 2026-01-06 | 아토테크 도이칠란트 게엠베하 운트 콤파니 카게 | 기판의 표면을 전처리하기 위한 방법 |
| WO2025202100A1 (en) | 2024-03-28 | 2025-10-02 | Atotech Deutschland GmbH & Co. KG | A method for electroless copper depositing onto a surface of a non-conductive or carbonfibres containing substrate |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4629636A (en) | 1984-06-07 | 1986-12-16 | Enthone, Incorporated | Process for treating plastics with alkaline permanganate solutions |
| US4617205A (en) | 1984-12-21 | 1986-10-14 | Omi International Corporation | Formaldehyde-free autocatalytic electroless copper plating |
| DE59909392D1 (de) | 1998-11-13 | 2004-06-09 | Lpw Chemie Gmbh | Verfahren zur Metallisierung einer Kunststoffoberfläche |
| US6913651B2 (en) | 2002-03-22 | 2005-07-05 | Blue29, Llc | Apparatus and method for electroless deposition of materials on semiconductor substrates |
| DE10226328B3 (de) * | 2002-06-11 | 2004-02-19 | Atotech Deutschland Gmbh | Saure Lösung zur Silberabscheidung und Verfahren zum Abscheiden von Silberschichten auf Metalloberflächen |
| IL153498A0 (en) * | 2002-12-17 | 2003-07-06 | J G Systems Inc | Electroless copper metallization of electronic devices |
| JP4078977B2 (ja) * | 2002-12-27 | 2008-04-23 | 日立化成工業株式会社 | 無電解金めっき液及び無電解金めっき方法 |
| US7297190B1 (en) * | 2006-06-28 | 2007-11-20 | Lam Research Corporation | Plating solutions for electroless deposition of copper |
| US7220296B1 (en) | 2005-12-15 | 2007-05-22 | Intel Corporation | Electroless plating baths for high aspect features |
| JP5177426B2 (ja) | 2006-04-18 | 2013-04-03 | 奥野製薬工業株式会社 | 樹脂成形体に対するエッチング処理用組成物 |
| TW200813255A (en) | 2006-07-07 | 2008-03-16 | Rohm & Haas Elect Mat | Environmentally friendly electroless copper compositions |
| KR20080083790A (ko) | 2007-03-13 | 2008-09-19 | 삼성전자주식회사 | 무전해 구리 도금액, 그의 제조방법 및 무전해 구리도금방법 |
| CN104040026B (zh) | 2011-10-05 | 2019-01-01 | 埃托特克德国有限公司 | 不含甲醛的化学镀镀铜溶液 |
| CN104221481B (zh) | 2012-03-28 | 2017-08-22 | Dic株式会社 | 导电性图案、电路、电磁波屏蔽物、及导电性图案的制造方法 |
| EP2784181B1 (en) * | 2013-03-27 | 2015-12-09 | ATOTECH Deutschland GmbH | Electroless copper plating solution |
| US20160273112A1 (en) | 2013-03-27 | 2016-09-22 | Atotech Deutschland Gmbh | Electroless copper plating solution |
| CN103397316B (zh) * | 2013-07-18 | 2015-10-21 | 胜宏科技(惠州)股份有限公司 | 一种酸性化学镀铜复合添加剂及其制备方法和使用方法 |
| JP6176841B2 (ja) * | 2013-07-19 | 2017-08-09 | ローム・アンド・ハース電子材料株式会社 | 無電解銅めっき液 |
| US20160145745A1 (en) * | 2014-11-24 | 2016-05-26 | Rohm And Haas Electronic Materials Llc | Formaldehyde-free electroless metal plating compositions and methods |
| ES2639300T3 (es) | 2014-12-16 | 2017-10-26 | Atotech Deutschland Gmbh | Composiciones de baño de chapado para el chapado no electrolítico de metales y aleaciones metálicas |
| EP3344800B1 (en) | 2015-08-31 | 2019-03-13 | ATOTECH Deutschland GmbH | Aqueous copper plating baths and a method for deposition of copper or copper alloy onto a substrate |
-
2018
- 2018-06-08 EP EP18176836.7A patent/EP3578683B1/en not_active Not-in-force
-
2019
- 2019-05-08 TW TW108115812A patent/TWI814822B/zh not_active IP Right Cessation
- 2019-06-05 KR KR1020217000449A patent/KR20210018457A/ko not_active Withdrawn
- 2019-06-05 CN CN201980045418.5A patent/CN112400036B/zh active Active
- 2019-06-05 JP JP2020568240A patent/JP7335280B2/ja active Active
- 2019-06-05 US US16/973,068 patent/US11396706B2/en active Active
- 2019-06-05 WO PCT/EP2019/064616 patent/WO2019234085A1/en not_active Ceased
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