JP2021518577A - 強度が可変的なダイオードを備えた空間光変調器 - Google Patents
強度が可変的なダイオードを備えた空間光変調器 Download PDFInfo
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
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- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
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Abstract
Description
Claims (15)
- 基板上に画像を生成する方法であって、
複数のエミッタアレイを備える画像投影システムに命令を送信することであって、前記命令は、前記複数のエミッタアレイ内の各エミッタについての状態情報を含む、命令を送信することと、
前記基板の第1の部分を露光するために、オン状態の前記エミッタにパルスを送ることと、
前記基板の第2の部分を露光するために、前記基板をステップサイズ分平行移動させて、前記オン状態の前記エミッタにパルスを送ることと、
前記基板が処理されるまで、前記基板の後続の部分を露光するために前記オン状態の前記エミッタにパルスを送ることを繰り返すこと
を含む、基板上に画像を生成する方法。 - 前記基板を前記ステップサイズ分平行移動させることは、5mm以下を移動するために走査モードで稼働することである、請求項1に記載の方法。
- 複数のエミッタアレイを含む画像投影システムに命令を送信することであって、前記命令は前記複数のエミッタアレイ内の各エミッタについての状態情報を含む、命令を送信することは、
露光のためのピクセル数を決定することと、
露光のための前記ピクセル数に対応するエミッタの1つ以上のアレイ内で、各エミッタを設定すること
を含む、請求項1に記載の方法。 - 露光のための前記ピクセル数に対応するエミッタの1つ以上のアレイ内で、各エミッタを設定することは、エミッタの少なくとも1つのアレイ内の各エミッタに対する少なくとも1つのトランジスタへの入力を選択的に提供して、各エミッタ内で可変的な強度を生成することを含む、請求項3に記載の方法。
- 各エミッタ内の前記可変的な強度が、ベース電流xの倍数から選択される、請求項4に記載の方法。
- 複数のエミッタアレイを含む画像投影システムに命令を送信することであって、前記命令は前記複数のエミッタアレイ内の各エミッタについての状態情報を含む、命令を送信することは、
エミッタを選択的にオン状態にすることにより、エミッタアレイのパターンを生成することを含む、請求項1に記載の方法。 - 第1の量の信号が第1のエミッタアレイに伝達され、第2の量の電流が第2のエミッタアレイに伝達される、請求項6に記載の方法。
- 前記基板の第1の部分を露光するために、前記オン状態の前記エミッタにパルスを送ることは、約1ナノ秒〜約50マイクロ秒の範囲の期間の間、各エミッタにパルスを送ることを含む、請求項1に記載の方法。
- 基板上で画像を生成するシステムであって、
前記システムと通信するコントローラを備え、
前記コントローラは、
プロセッサと、
前記プロセッサによって実行されると、基板上に画像を生成する操作を実行する命令が格納されたメモリと
を有し、
前記操作は、
複数のエミッタアレイを備える前記システムに命令を送信することであって、前記命令は、前記複数のエミッタアレイ内の各エミッタについての状態情報を含む、命令を送信することと、
前記基板の第1の部分を露光するために、オン状態の前記エミッタにパルスを送ることと、
前記基板の第2の部分を露光するために、前記基板をステップサイズ分平行移動させ、前記オン状態の前記エミッタにパルスを送ることと、
前記基板が処理されるまで、前記基板の後続の部分を露光するために前記オン状態の前記エミッタにパルスを送ることを繰り返すこと
を含む、基板上で画像を生成するシステム。 - 複数のエミッタアレイを含む画像投影システムに命令を送信することであって、前記命令は、前記複数のエミッタアレイ内の各エミッタについての状態情報を含む、命令を送信することは、
露光のためのピクセル数を決定することと、
露光のための前記ピクセル数に対応するエミッタの1つ以上のアレイ内で、各エミッタを設定すること
を含む、請求項9に記載のシステム。 - 複数のエミッタアレイを含む画像投影システムに命令を送信することであって、前記命令は、前記複数のエミッタアレイ内の各エミッタについての状態情報を含む、命令を送信することは、
エミッタを選択的にオン状態にすることにより、エミッタアレイのパターンを生成することを含む、請求項9に記載のシステム。 - 前記基板の第1の部分を露光するために、前記オン状態の前記エミッタにパルスを送ることは、約10ナノ秒〜約50マイクロ秒の範囲の期間の間、各エミッタにパルスを送ることを含む、請求項9に記載のシステム。
- 前記基板の第2の部分を露光するために、前記オン状態の前記エミッタにパルスを送ることは、約1ナノ秒〜約50マイクロ秒の範囲の期間の間、各エミッタにパルスを送ることを含み、第1の量の信号が第1のエミッタアレイに伝達され、第2の量の信号が第2のエミッタアレイに伝達される、請求項9に記載のシステム。
- 前記命令は、前記複数のエミッタアレイ内の各エミッタについての状態情報を含み、前記状態情報は、各エミッタアレイについての線量情報を含み、前記線量情報は、各エミッタアレイに伝達される信号量を含む、請求項9に記載のシステム。
- 非一過性のコンピュータ可読媒体であって、
プロセッサによって実行されると、前記プロセッサに基板上に画像を生成する方法を実行させる命令が格納されており、
前記基板上に画像を生成する方法は、
複数のエミッタアレイを備える画像投影システムに命令を送信することであって、前記命令は、前記複数のエミッタアレイ内の各エミッタについての状態情報を含む、命令を送信することと、
前記基板の第1の部分を露光するために、オン状態の前記エミッタにパルスを送ることと、
前記基板の第2の部分を露光するために、前記基板をステップサイズ分平行移動させ、前記オン状態の前記エミッタにパルスを送ることと、
前記基板が処理されるまで、前記基板の後続の部分を露光するために前記オン状態の前記エミッタにパルスを送ることを繰り返すこと
を含む、非一過性のコンピュータ可読媒体。
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