JP2021514110A - Ald温度均一性のためのpbnヒータ - Google Patents
Ald温度均一性のためのpbnヒータ Download PDFInfo
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- JP2021514110A JP2021514110A JP2020566537A JP2020566537A JP2021514110A JP 2021514110 A JP2021514110 A JP 2021514110A JP 2020566537 A JP2020566537 A JP 2020566537A JP 2020566537 A JP2020566537 A JP 2020566537A JP 2021514110 A JP2021514110 A JP 2021514110A
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- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052582 BN Inorganic materials 0.000 claims abstract description 6
- 239000012777 electrically insulating material Substances 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000000197 pyrolysis Methods 0.000 claims description 3
- 238000005979 thermal decomposition reaction Methods 0.000 claims 1
- 238000000429 assembly Methods 0.000 abstract description 15
- 230000000712 assembly Effects 0.000 abstract description 15
- 239000007789 gas Substances 0.000 description 136
- 239000000758 substrate Substances 0.000 description 62
- 238000009826 distribution Methods 0.000 description 41
- 238000010438 heat treatment Methods 0.000 description 38
- 235000012431 wafers Nutrition 0.000 description 34
- 238000000034 method Methods 0.000 description 20
- 238000000231 atomic layer deposition Methods 0.000 description 16
- 238000010926 purge Methods 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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Abstract
Description
Claims (20)
- 頂部および底部を有する本体であって、熱分解窒化ホウ素(PBN)を含む、本体と、
前記本体の前記底部に接続された第1のヒータ電極と、
前記本体の前記底部に接続された第2のヒータ電極と、
を備える、ヒータ。 - 前記ヒータの前記本体がPBNから構成されている、請求項1に記載のヒータ。
- 前記本体の前記底部が、第1の凹部および第2の凹部を有し、前記第1のヒータ電極が前記第1の凹部内にあり、前記第2のヒータ電極が前記第2の凹部内にある、請求項1に記載のヒータ。
- 前記第1の凹部内に配置された第1のスタンドオフ、および前記第2の凹部内に配置された第2のスタンドオフをさらに備え、前記第1のスタンドオフおよび前記第2のスタンドオフが電気絶縁材料を含む、請求項3に記載のヒータ。
- 前記第1のスタンドオフおよび前記第2のスタンドオフが石英を含む、請求項4に記載のヒータ。
- 前記第1のスタンドオフおよび前記第2のスタンドオフが、電気絶縁材料を含む底部を有する、請求項4に記載のヒータ。
- 前記第1のスタンドオフが、前記底部を貫通して延在する第1のバスバーコネクタを有し、前記第2のスタンドオフが、前記底部を貫通して延在する第2のバスバーコネクタを有する、請求項6に記載のヒータ。
- 前記第1のバスバーコネクタを前記第1のヒータ電極に接続する第1のワイヤと、前記第2のバスバーコネクタを前記第2のヒータ電極に接続する第2のワイヤと、をさらに備え、前記第1のワイヤが前記第1のスタンドオフ内にあり、前記第2のワイヤが前記第2のスタンドオフ内にある、請求項7に記載のヒータ。
- 第1のバスバーおよび第2のバスバーをさらに備え、前記第1のバスバーが、前記第1のバスバーコネクタと電気的に通じ、前記第2のバスバーが、前記第2のバスバーコネクタと電気的に通じている、請求項8に記載のヒータ。
- 前記第1のバスバーおよび前記第2のバスバーが、電気絶縁バスバーハウジング内にあり、前記第1のバスバーが、前記バスバーハウジングの第1のチャネル内にあり、前記第2のバスバーが、前記バスバーハウジングの第2のチャネル内にある、請求項9に記載のヒータ。
- 前記本体が、弧状の内側端部と弧状の外側端部とによって接続された第1の端部および第2の端部を有する、請求項1に記載のヒータ。
- 丸い本体であって、前記本体の中心に開口部を備えた底部および前記底部の周りに前記本体の外周を形成する側壁を有し、前記側壁および前記底部が、前記本体内にキャビティを画定する、丸い本体と、
前記本体の前記キャビティ内のヒータゾーンであって、熱分解窒化ホウ素(PBN)を含むヒータ本体、前記ヒータ本体の底部に接続された第1のヒータ電極、および前記ヒータ本体の前記底部に接続された第2のヒータ電極を有する1つまたは複数のヒータを備える、ヒータゾーンと、
前記第1のヒータ電極に電気的に接続された第1のバスバーと、
前記第2のヒータ電極に電気的に接続され、前記第1のバスバーから電気的に絶縁されている第2のバスバーと、
を備える、ヒータアセンブリ。 - 前記ヒータ本体がPBNから構成されている、請求項12に記載のヒータアセンブリ。
- 前記ヒータ本体の前記底部が、第1の凹部および第2の凹部を有し、前記第1のヒータ電極が前記第1の凹部内に配置され、前記第2のヒータ電極が前記第2の凹部内に配置されている、請求項12に記載のヒータアセンブリ。
- 前記第1の凹部内に配置された第1のスタンドオフ、および前記第2の凹部内に配置された第2のスタンドオフをさらに備え、前記第1のスタンドオフおよび前記第2のスタンドオフが電気絶縁材料を含む、請求項14に記載のヒータアセンブリ。
- 前記第1のスタンドオフおよび前記第2のスタンドオフが石英を含む、請求項15に記載のヒータアセンブリ。
- 前記第1のスタンドオフおよび前記第2のスタンドオフが、電気絶縁材料を含む底部を有し、前記第1のバスバーコネクタが前記底部を貫通して延在し、前記第2のスタンドオフが前記底部を貫通して延在する第2のバスバーコネクタを有し、前記第1のバスバーコネクタが前記第1のバスバーと電気的にコンタクトし、前記第2のバスバーコネクタが前記第2のバスバーと電気的にコンタクトし、第1のワイヤが前記第1のバスバーコネクタを前記第1のヒータ電極に接続し、第2のワイヤが前記第2のバスバーコネクタを前記第2のヒータ電極に接続し、前記第1のワイヤが前記第1のスタンドオフ内にあり、前記第2のワイヤが前記第2のスタンドオフ内にある、請求項15に記載のヒータアセンブリ。
- 前記第1のバスバーおよび前記第2のバスバーが電気絶縁バスバーハウジング内にあり、前記第1のバスバーが、前記バスバーハウジングの第1のチャネル内にあり、前記第2のバスバーが、前記バスバーハウジングの第2のチャネル内にある、請求項17に記載のヒータアセンブリ。
- 前記ヒータ本体が、弧状の内側端部と弧状の外側端部とによって接続された第1の端部および第2の端部を有する、請求項12に記載のヒータ。
- 丸い本体であって、前記本体の中心に開口部を備えた底部および前記底部の周りに前記本体の外周を形成する側壁を有し、前記側壁および前記底部が、前記本体内にキャビティを画定する、丸い本体と、
前記本体の前記キャビティ内の内側ヒータゾーンであって、前記本体の前記中心の前記開口部の周りに配置され、
第1のチャネルおよび第2のチャネルを備えたバスバーハウジングであって、前記本体の前記中心の前記開口部の周りに円形または弓状の経路を形成する、バスバーハウジングと、
前記第1のチャネル内の第1のバスバーと、
前記第2のチャネル内の第2のバスバーであって、前記第1のバスバーから電気的に絶縁されている、第2のバスバーと、
前記バスバーに隣接して配置された複数のヒータであって、前記複数のヒータのそれぞれが、前記複数のヒータが円形の内側ヒータを形成するように、円形セグメントとして成形され、前記ヒータのそれぞれが、熱分解窒化ホウ素(PBN)を含むヒータ本体、前記ヒータ本体の底部に接続された第1のヒータ電極、および前記ヒータ本体の前記底部に接続された第2のヒータ電極を有し、前記第1のヒータ電極が、第1のスタンドオフ内にあり、前記第1のバスバーおよび前記第2のバスバーの一方と電気的にコンタクトし、前記第2のヒータ電極が、第2のスタンドオフ内にあり、前記第1のバスバーまたは前記第2のバスバーのもう一方と電気的にコンタクトしている、複数のヒータと、
を備える、内側ヒータゾーンと、
を備える、ヒータアセンブリ。
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