JP2021192418A - Transfer device and transfer method - Google Patents

Abstract

To provide a transfer device and a transfer method which can prevent complication of the device.SOLUTION: A transfer device EA comprises: sheet cutting means 10 which cuts a first adhesive sheet AS1 adhered to one surface WK1 of an adherend WK into such a size that it protrudes from an outer edge of a second adhesive sheet AS2, thereby dividing the first adhesive sheet AS1 into an inner sheet AS1A and an outer sheet AS1B; sheet adhering means 30 which adheres a third adhesive sheet AS3 to another surface WK2 of the adherend WK via the second adhesive sheet AS2; and sheet peeling means 50 which sandwiches an inner sheet protruding part AS1C between a third sheet protruding part AS3A protruding from the outer edge of the second adhesive sheet AS2 and peeling tape PT so that the inner sheet protruding part AS1C may not come into contact with the second adhesive sheet AS2, and then peels off the inner sheet AS1A by pressing and adhering the peeling tape PT to the inner sheet AS1A.SELECTED DRAWING: Figure 1

Description

The present invention relates to a transfer device and a transfer method.

A transfer device is known in which a second adhesive sheet is attached to the other surface of an adherend to which the first adhesive sheet is attached to one surface, and the first adhesive sheet is peeled off from the adherend (for example,). See Patent Document 1).

Japanese Unexamined Patent Publication No. 2017-162870

However, in the substrate transfer device 1 (transfer device) as described in Patent Document 1, the adhesion between the adhesive tape T1 (first adhesive sheet) and the adhesive tape T2 (second adhesive sheet) is avoided and the wafer W ( In order to achieve the purpose of peeling the first adhesive sheet from the adherend), the first adhesive sheet may be precisely cut or covered so that the length of the protruding portion is equal to or less than the thickness of the adherend. The first adhesive sheet must be precisely cut along the outer edge of the adherend so as not to damage the outer edge of the adherend, which requires precise operation control and complicates the device. appear.

An object of the present invention is to provide a transfer device and a transfer method capable of preventing the device from becoming complicated.

The present invention has adopted the configuration described in the claims.

According to the present invention, the inner sheet protruding portion is sandwiched between the third sheet protruding portion and the peeling tape so that the protruding portion of the inner sheet does not come into contact with the second adhesive sheet, and the peeling tape is pressed against the inner sheet. Since it is attached, precise operation control becomes unnecessary, and it is possible to prevent the device from becoming complicated.

Explanatory drawing of the transfer apparatus which concerns on one Embodiment of this invention. An operation explanatory diagram of the transfer device.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Further, in the present embodiment, "up" is "down" in the direction of the arrow on the Z axis when the direction is shown without specifying the figure, based on the case of viewing from the front direction of FIG. 1 parallel to the Y axis. Is the opposite direction, "left" is the direction of the arrow on the X axis, "right" is the opposite direction, "front" is the front direction orthogonal to the paper surface, and "rear" is the opposite direction in the direction of the arrow on the Y axis. do.

The transfer device EA of the present invention cuts the first adhesive sheet AS1 attached to one surface WK1 of the adherend WK to a size protruding from the outer edge of the adherend WK, and covers the first adhesive sheet AS1. The sheet cutting means 10 for dividing the inner sheet AS1A attached to the body WK and the outer sheet AS1B located outside the inner sheet AS1A, and the second ring frame RF2 as the second frame member are attached to the body WK. The third adhesive sheet AS3 having a size protruding from the outer edge of the second adhesive sheet AS2 is covered with the transfer means 20 arranged in the vicinity of the second adhesive sheet AS2 via the transfer means 20 having a size protruding from the outer edge of the adherend WK. The sheet attaching means 30 to be attached to the other surface WK2 of the body WK, the reversing means 40 for flipping the adherend WK to which the third adhesive sheet AS3 is attached, and the peeling tape PT to be attached to the inner sheet AS1A. A sheet peeling means 50 for applying tension to the peeling tape PT to peel the inner sheet AS1A from the adherend WK is provided, and is arranged in the vicinity of the adherend transporting means 60 for transporting the adherend WK. There is.
In the present embodiment, the adherend WK supplied to the transfer device EA is supported by the first ring frame RF1 as the first frame member via the first adhesive sheet AS1 to form the first integrated object UP1. There is.

The sheet cutting means 10 is composed of a plurality of arms, and is a so-called articulated robot as a drive device that can displace what is supported by the tip arm 11A, which is a working portion, at any position and at any angle within the working range. The robot 11 is provided with a cutting blade 12 as a cutting member supported by the tip arm 11A of the articulated robot 11 via the bracket 12A, and the first adhesive sheet AS1 is provided in a size protruding from the outer edge of the second adhesive sheet AS2. It is designed to disconnect.

The transfer means 20 is supported by the articulated robot 11 shared with the sheet cutting means 10 and the tip arm 11A of the articulated robot 11 via the frame 21, and the suction force is generated by a decompression means (not shown) such as a decompression pump or a vacuum ejector. It is provided with a suction pad 22 (holding means) to be provided.

The sheet attaching means 30 comprises a support roller 31 for supporting the original fabric RS in which the laminated sheet LS in which the second adhesive sheet AS2 is laminated on the third adhesive sheet AS3 is temporarily attached to the strip-shaped release sheet RL, and the original fabric RS. The peeling sheet RL is folded back by the guide roller 32 to be guided and the peeling edge 33A, and the peeling plate 33 as a peeling means for peeling the laminated sheet LS from the peeling sheet RL and the laminated sheet LS are pressed and attached to the adherend WK. A pressing roller 34 as a pressing means, a driving roller 35 supported by an output shaft (not shown) of a rotary motor 35A as a driving device, and a peeling sheet RL sandwiched between the pinch roller 35B, and an output shaft of a driving device (not shown). While the transfer device EA is supported and the automatic operation of the transfer device EA is being performed, a predetermined tension is always applied to the release sheet RL existing between the pinch roller 35B and the release sheet RL, and the collection roller is used as a collection means for collecting the release sheet RL. It is equipped with 36.

The reversing means 40 includes a linear motor 41 as a drive device, a frame 42 supported by the output shaft 41A, forward extending arms 43 supported by the left and right ends of the frame 42, and the front of each arm 43. It is provided with a rotary motor 44 as a drive device supported by the machine and a chuck motor 45 (holding means) as a drive device supported by the output shaft 44A and having a pair of chuck arms 45A.

The sheet peeling means 50 includes a tape supporting means 51 that rotatably supports the wound heat-sensitive adhesive peeling tape PT, and the tape supporting means 51 that supports the peeling tape PT supported by the tape supporting means 51. The feeding means 52 that sandwiches and imparts a feeding output to the peeling tape PT, the lead holding means 53 that holds the lead end of the peeling tape PT, and the lead holding means 53 assist the holding the peeling tape PT. Holding assisting means 54, peeling tape attaching means 55 for pressing and attaching the peeling tape PT to the inner sheet AS1A, cutting means 56 for cutting the peeling tape PT, and applying tension to the peeling tape PT. A third adhesive sheet AS2 that is provided with a tension applying means 57 and that protrudes from the outer edge of the second adhesive sheet AS2 so that the inner sheet protruding portion AS1C of the inner sheet AS1A that protrudes from the outer edge of the adherend WK does not come into contact with the second adhesive sheet AS2. The inner sheet protruding portion AS1C is sandwiched between the third sheet protruding portion AS3A of the adhesive sheet AS3 and the peeling tape PT, and the peeling tape PT is pressed against the inner sheet AS1A to be attached.

The tape supporting means 51 feeds out a rotating arm 51B that can rotate around the shaft 51A, a support roller 51C that is supported on the free end side thereof and supports the wound stripping tape PT, and a support roller 51C. It is provided with a spring 51D as an urging means for urging in the direction of the means 52.
The feeding means 52 includes a rotating motor 52A as a drive device, and a feeding roller 52B which is supported by an output shaft (not shown) and which applies a rotational force to the peeling tape PT supported by the support roller 51C.
The lead holding means 53 is sucked and held via the accommodating means 53C supported by the output shaft 53B of the linear motion motor 53A as a drive device and the suction hole 53E formed on the suction surface 53D which is the bottom surface of the accommodating means 53C. It is equipped with a suction means 53F (holding means) as a support means such as a possible decompression pump and a vacuum ejector.
The holding assisting means 54 includes a linear motion motor 54A as a driving device, and an auxiliary roller 54C supported by the output shaft 54B thereof to bring the peeling tape PT into contact with the suction surface 53D.
The peeling tape attaching means 55 includes a linear motor 55A as a drive device housed in the housing means 53C, a pressing member 55C supported by the slider 55B, and pressing the peeling tape PT against the inner sheet AS1A, and a pressing member. It is provided with a coil heater provided inside the 55C and a heating means 55D such as a heating side of a heat pipe.
The cutting means 56 includes a linear motor 56A as a driving device housed in the housing means 53C, and a cutting blade 56C supported by the slider 56B and capable of cutting the peeling tape PT.
The tension applying means 57 includes a linear motor 57A as a driving device and a peeling roller 57C supported by the slider 57B thereof.

The adherend transport means 60 includes a linear motor 61 as a drive device, a first support table 62 supported by a first slider 61A of the linear motor 61, and a second support table 62 supported by a second slider 61B of the linear motor 61. It is equipped with a support table 63.
The first support table 62 has an inner support surface 62A (holding means) that can be adsorbed and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector, and an inner support surface 62A formed on the outside of the inner support surface 62A and viewed from above. A concave groove 62B which is annular in a plan view, and an outer support surface 62C (holding means) which is formed on the outside of the concave groove 62B and can be sucked and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector. Is provided.
The second support table 63 is provided with a holding portion 63A (holding means) on the upper surface thereof, which can be adsorbed and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector, and an annular shape in a plan view inside the holding portion 63A. A strong holding portion 63B (holding means) is provided to hold the inner sheet protruding portion AS1C protruding from the adherend WK in the inner sheet AS1A with a suction holding force stronger than the suction holding force of the holding portion 63A. ..

Next, the operation of the transfer device EA will be described.
First, with respect to the transfer device EA in which each member is arranged at the initial position shown by the solid line in FIG. 1, the user of the transfer device EA (hereinafter, simply referred to as “user”) determines the original fabric RS and After setting the peeling tape PT, a signal for starting automatic operation is input via an operation means (not shown) such as an operation panel or a personal computer. Then, the sheet peeling means 50 drives the suction means 53F to start sucking and holding the peeling tape PT on the suction surface 53D, and the sheet sticking means 30 drives the rotary motor 35A to feed the original fabric RS. When the tip portion of the leading laminated sheet LS in the feeding direction is peeled off by the peeling edge 33A of the peeling plate 33 by a predetermined length, the drive of the rotary motor 35A is stopped. Next, when a user or a transporting means (not shown) such as an articulated robot or a belt conveyor places the first integrated object UP1 on the first support table 62 as shown by the solid line in FIG. 1, the adherend transporting means 60 Drives a decompression means (not shown) to start adsorption and holding of the first integrated object UP1 on the inner and outer support surfaces 62A and 62C.

After that, the sheet cutting means 10 drives the articulated robot 11, and as shown by the alternate long and short dash line in FIG. 1, the cutting blade 12 is pierced into the first adhesive sheet AS1 at a position separated from the outer edge of the adherend WK by a predetermined distance. After making the cutting blade 12 make one round along the concave groove 62B, the cutting blade 12 is returned to the initial position. As a result, the first adhesive sheet AS1 is divided into an inner sheet AS1A and an outer sheet AS1B. Next, the transfer means 20 drives the articulated robot 11, cuts off the cutting blade 12 held by the tip arm 11A, holds the suction pad 22 by the tip arm 11A, and then attaches the suction pad 22 to the first ring. It comes into contact with the upper surface of the frame RF1 and drives a decompression means (not shown) to start suction holding of the first ring frame RF1 by the suction pad 22. Then, when the adherend transport means 60 stops driving the decompression means (not shown) and releases the suction holding of the first integrated object UP1 on the outer support surface 62C, the transfer means 20 drives the articulated robot 11 and the outside. After transporting the first ring frame RF1 to which the sheet AS1B is attached to a predetermined collection position (not shown), the drive of the decompression means (not shown) is stopped, and the suction holding of the first ring frame RF1 by the suction pad 22 is released. Next, the transfer means 20 drives the articulated robot 11 to bring the suction pad 22 into contact with the upper surface of the uppermost second ring frame RF2 integrated in the frame stocker portion ST, and then drives the decompression means (not shown). Then, the suction holding of the second ring frame RF2 on the suction pad 22 is started. After that, when the transfer means 20 drives the articulated robot 11 and the second ring frame RF2 is placed on the outer support surface 62C, the adherend transport means 60 drives a decompression means (not shown) on the outer support surface 62C. The adsorption retention of the second ring frame RF2 of the above is started. Next, the transfer means 20 stops driving the decompression means (not shown), releases the suction holding of the second ring frame RF2 by the suction pad 22, and then drives the articulated robot 11 to move the suction pad 22 to the initial position. After returning, the suction pad 22 held by the tip arm 11A is separated, and the cutting blade 12 is held by the tip arm 11A.

Then, the adherend transport means 60 drives the linear motor 61 to move the first support table 62 to the right, and when the first support table 62 reaches a predetermined position with respect to the sheet sticking means 30, the sheet sticking means 30 Drives the rotary motor 35A and feeds the original fabric RS according to the moving speed of the first support table 62. As a result, the laminated sheet LS is peeled off from the release sheet RL, and as shown by the alternate long and short dash line in FIG. 1, the third adhesive sheet AS3 is on the upper surface of the second ring frame RF2, and the second adhesive sheet AS2 is attached to the adherend WK. It is pressed and attached to the other surface WK2 by the pressing roller 34. Next, the entire leading laminated sheet LS is attached to the second ring frame RF2 and the adherend WK to form the second integrated object UP2, and the tip portion of the next laminated sheet LS following the leading laminated sheet LS in the feeding direction. Is peeled off by a predetermined length at the peeling edge 33A of the peeling plate 33, the sheet attaching means 30 stops driving the rotary motor 35A.

After that, the movement of the first support table 62 to the right continues, and as shown by the alternate long and short dash line in FIG. 1, when the first support table 62 reaches directly under the reversing means 40, the adherend transporting means 60 Stops driving the linear motor 61. After that, the reversing means 40 drives the linear motor 41, lowers the frame 42 as shown by the alternate long and short dash line in FIG. 1, then drives each chuck motor 45, and the second ring frame is driven by each chuck arm 45A. Grasp RF2. Next, when the adherend transporting means 60 stops driving the decompression means (not shown) and releases the suction holding of the second integrated object UP2 on the inner and outer support surfaces 62A and 62C, the reversing means 40 causes the linear motion motor 41. And the rotation motor 44 is driven to lift the second integrated object UP2 to a predetermined height, and then the second integrated object UP2 is turned upside down. Then, the adherend transporting means 60 drives the linear motor 61 to return the first support table 62 to the initial position, and after moving the second support table 63 directly under the reversing means 40, the reversing means 40 moves. The linear motor 41 is driven so that the second adhesive sheet AS2 is on the second support table 63 side, and the second integrated object UP2 is placed on the second support table 63. Next, when the adherend transporting means 60 drives a decompression means (not shown) and starts suction holding of the second integrated object UP2 by the holding portion 63A and the strong holding portion 63B, the reversing means 40 causes the linear motion motor 41 and the chuck motor. 45 is driven to return the frame 42 and the chuck arm 45A to the initial positions.

After that, the adherend transport means 60 drives the linear motor 61 to move the second support table 63 to the right, and as shown by the two-dot chain line in FIG. 1, the left end portion of the adherend WK is the pressing member 55C. When it is located directly below, the drive of the linear motor 61 is stopped. Next, the sheet peeling means 50 drives the linear motion motor 54A, and as shown by the two-dot chain line in FIG. 1, the auxiliary roller 54C is retracted from below the accommodating means 53C, and then the rotary motor 52A and the linear motion motor The 53A is driven, and the accommodating means 53C is lowered to a predetermined position directly above the inner sheet AS1A while feeding out the peeling tape PT. Then, the sheet peeling means 50 drives the linear motor 55A and lowers the pressing member 55C as shown in FIG. 2A so that the inner sheet protruding portion AS1C does not come into contact with the second adhesive sheet AS2. After sandwiching the inner sheet protruding portion AS1C between the sheet protruding portion AS3A and the peeling tape PT, the heating means 55D is driven to heat the peeling tape PT to adhere the peeling tape PT to the inner sheet AS1A.

Next, the sheet peeling means 50 stops driving the suction means 53F, releases the suction holding of the peeling tape PT on the suction surface 53D, and then drives the linear motor 53A and the linear motor 55A to drive the accommodation means 53C and the pressing. The member 55C is returned to the initial position. After that, the sheet peeling means 50 drives the linear motor 57A, and as shown in FIG. 2B, the peeling roller 57C is moved to the right, tension is applied to the peeling tape PT, and the inside from the adherend WK. The sheet AS1A is peeled off. At this time, since the strong holding portion 63B is provided on the second support table 63, even if the inner sheet protruding portion AS1C and the third sheet protruding portion AS3A are adhered to each other, the third adhesive sheet AS3 is the inner sheet. It does not get up with AS1A and lift the adherend WK to damage it. Next, when the entire inner sheet AS1A is peeled from the adherend WK to form the third integrated object UP3, the sheet peeling means 50 stops driving the linear motor 57A, and then the linear motor 54A and the suction means 53F are moved. It is driven, and as shown in FIG. 2C, the auxiliary roller 54C is returned to the initial position, and the suction holding of the peeling tape PT on the suction surface 53D is started. Then, the sheet peeling means 50 drives the linear motor 56A, and as shown in FIG. 2C, the cutting blade 56C is moved up and down to cut the peeling tape PT, and the operator or the transfer means (not shown) is the inner sheet AS1A. The sheet peeling means 50 drives the linear motor 57A to return the peeling roller 57C to the initial position. Next, the adherend transporting means 60 drives the linear motor 61, returns the second support table 63 to the initial position, stops driving the decompression means (not shown), and the third holding portion 63A and the strong holding portion 63B. When the suction holding of the integrated object UP3 is released, the operator or the conveying means (not shown) conveys the third integrated object UP3 on the second support table 63 to the next step, and the same operation as described above is repeated thereafter.

According to the above embodiment, the inner sheet protruding portion AS1C is sandwiched between the third sheet protruding portion AS3A and the peeling tape PT so that the inner sheet protruding portion AS1C does not come into contact with the second adhesive sheet AS2, and the peeling thereof is performed. Since the tape PT is pressed against the inner sheet AS1A and attached, precise operation control becomes unnecessary, and it is possible to prevent the apparatus from becoming complicated.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the constituents of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, the sheet attaching means attaches a third adhesive sheet having a size protruding from the outer edge of the second adhesive sheet to the other surface of the adherend via a second adhesive sheet having a size protruding from the outer edge of the adherend. Anything that can be attached to is not limited as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same applies to other means and processes).

The sheet cutting means 10 may cut the first adhesive sheet AS1 from the sticking surface side of the first adhesive sheet AS1, or cut the first adhesive sheet AS1 from the non-sticking surface side of the first adhesive sheet AS1. Alternatively, the drive device for moving the cutting blade 12 (the articulated robot 11 in the above embodiment) may be cut by another drive device without being shared with the drive device for moving the suction pad 22 by the transfer means 20. The blade 12 may be moved, the cutting blade 12 may not be attached to and detached from the articulated robot 11, or the articulated robot 11 may directly support the cutting blade 12 without using the bracket 12A. ..

The transfer means 20 is another drive device without sharing the drive device for moving the suction pad 22 (articulated robot 11 in the above embodiment) with the drive device for moving the cutting blade 12 by the sheet cutting means 10. The suction pad 22 may be moved, the suction pad 22 may not be attached to or detached from the articulated robot 11, or the articulated robot 11 directly supports the cut suction pad 22 without going through the frame 21. Alternatively, at least one of the first ring frame RF1 and the outer sheet AS1B may not be removed from the first support table 62, and the first ring frame RF1 to which the outer sheet AS1B or the outer sheet AS1B is attached may be attached. When transporting the second ring frame RF2 to a predetermined collection position by another device or by hand, when placing the second ring frame RF2 on the first support table 62 by another device or by hand, or when the second ring frame RF2 is placed. If it is not placed on the first support table 62, it may not be provided in the transfer device EA of the present invention.

In the sheet attaching means 30, the strip-shaped adhesive sheet base material temporarily attached to the release sheet RL is formed with a closed loop shape or a notch in the entire short width direction, so that a predetermined area partitioned by the notch is laminated. The raw fabric as the sheet LS may be fed out, or the raw fabric in which the strip-shaped adhesive sheet base material is temporarily attached to the release sheet RL is adopted, and the strip-shaped adhesive sheet base material is cut in a closed loop shape or the entire short width direction. The indentation may be formed by a cutting means, and a predetermined area partitioned by the notch may be used as a laminated sheet LS, a strip-shaped adhesive sheet base material may be attached to an adherend WK, or the laminated sheet LS may be peeled off. When peeling from the sheet RL, the torque of the rotary motor 35A may be controlled so that a predetermined tension is applied to the raw fabric RS, or a plate shape may be used instead of the rollers such as the support roller 31 and the guide roller 32. The original fabric RS or the release sheet RL may be supported or guided by a member, a shaft member, or the like, or the original fabric RS may be supported by, for example, fan-folded without winding, or the drive device. The laminated sheet LS is held by a holding member that is supported by the output shaft of the linear motion motor and can be adsorbed and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector, and the laminated sheet held by the holding member is adhered. You may adopt a pressing means that presses and attaches to the body WK, or you can fold the release sheet RL into a fan fold, chop it with a shredder, or randomly collect it to collect the release sheet RL. The means may or may not be adopted, and the first support table 62 may or may not be moved, and the first support table 62 may be moved by itself to attach the laminated sheet LS to the adherend WK. Alternatively, the laminated sheet LS to which the release sheet RL is not temporarily attached may be drawn out and attached to the adherend WK, or the second adhesive sheet AS2 may be attached to the adherend WK and the third adhesive sheet may be attached. The sheet may be attached to the first support table 62, the third adhesive sheet AS3 may be attached to nothing, or the second adhesive sheet AS2 may be attached to the adherend WK. It may be configured to include a sheet affixing means and a second sheet affixing means for affixing the third adhesive sheet AS3 to the second adhesive sheet AS2 affixed to the adherend WK by the second sheet affixing means.

The reversing means 40 holds at least one of the second ring frame RF2, the second adhesive sheet AS2, the third adhesive sheet AS3, the inner sheet AS1A, and the adherend WK in the second integrated object UP2, and the second integrated body 40 The object UP2 may be inverted upside down, or the first support table 62 may be retracted from below the second integrated object UP2 without raising the second integrated object UP2, for example. May be turned upside down, may be configured to be supported by the first support table 62 or the second support table 63, the rotation motor 44 may be one or three or more, and the chuck motor 45 may be used. May be one or three or more, and while the second integrated object UP2 is formed by the sheet attaching means 30, for example, from below the second integrated object UP2 supported by the first support table 62. When the sheet peeling means 50 has a configuration capable of peeling the inner sheet AS1A, it does not have to be provided in the transfer device EA of the present invention.

The sheet peeling means 50 sandwiches the inner sheet protruding portion AS1C between the third sheet protruding portion AS3A and the peeling tape PT at a position closer to the adherend WK than the outer edge portion of the inner sheet protruding portion AS1C in the inner sheet AS1A. Alternatively, the sheet-fed peeling tape PT may be attached to the inner sheet AS1A, or a pinch for sandwiching the peeling tape PT with the feeding roller 52B without urging the support roller 51C in the feeding means 52 direction. A roller may be adopted to feed the peeling tape PT, or the peeling tape PT is tensioned by at least one of the driving of the feeding means 52, the driving of the linear motor 61, and the driving of the linear motor 57A. The inner sheet AS1A may be attached and peeled from the adherend WK, or when the accommodating means 53C is lowered to a predetermined position directly above the inner sheet AS1A, the peeling tape PT sucked and held by the suction surface 53D. The lead end may be brought into contact with the inner sheet AS1A, the accommodating means 53C may not be provided, or the peeling tape PT after peeling the inner sheet AS1A may be used as the lead holding means without adopting the holding assisting means 54. It may be configured to be held only by the 53, or the holding assisting means 54 may be used in place of or in combination with the auxiliary roller 54C to bring the peeling tape PT into contact with the suction surface 53D by a rod-shaped member, a plate-shaped member, air blowing, or the like. The configuration may be adopted, in which the heating means 55D is not adopted, or the heating means 55D is adopted and the pressure-sensitive adhesive peeling tape PT is attached to the inner sheet AS1A, or the pressing is performed. Instead of the member 55C, a configuration may be adopted in which a gas is blown to attach the peeling tape PT to the inner sheet AS1A, or at least one of the peeling tape attaching means 55 and the cutting means 56 is accommodated in the accommodating means 53C. The peeling tape PT may not be cut, the peeling tape PT may not be cut, the peeling tape PT may be cut manually by another device or by hand without adopting the cutting means 56, and the linear motor 57A and Without adopting the peeling roller 57C, for example, the second support table 63 may be moved without or while moving the peeling tape holding member such as the tape supporting means 51, the feeding means 52, and the lead holding means 53. , The peeling tape holding member is moved without moving the second support table 63, or another device supporting the second integrated object UP2 is moved relative to the peeling tape holding member for peeling. Apply tension to the tape PT The inner sheet AS1A may be peeled off from the adherend WK, or a forced peeling means for forcibly peeling the inner sheet AS1A from the third adhesive sheet AS3 may be provided. For example, vibration is applied at the time of peeling, the inner sheet is peeled off by adsorbing and holding the protruding portion AS1C, and the inner sheet is peeled off with air, a spatula, or the like.

The adherend transporting means 60 may have a drive device for moving the first support table 62 and a drive device for moving the second support table 63 separately, and the first support table 63 may be moved without adopting the first support table 63. The support table 62 may perform the same operation as the second support table 63, or a drive device for moving at least one of the first support table 62 and the second support table 63 in the front-rear direction is adopted, and each means is adopted. The adherend WK may be able to move in the left-right direction within the work area of Any annular shape such as an annular shape or an elliptical annular shape may be used, the concave groove 62B may not be formed on the first support table 62, and a system for imparting holding force to the inner support surface 62A and the outer support surface 62C. May be one system, or one system may be provided for each to impart holding power to a total of two systems, or one system may be provided to impart holding power to the holding portion 63A and the strong holding portion 63B. Or, one system may be provided for each of them to give a holding force to a total of two systems, or a part of the inner sheet AS1A corresponding to the area where the adherend WK is not attached or The strong holding portion 63B may be formed in all (annular), may or may not be provided in the transfer device EA of the present invention, and may not be provided in the transfer device EA of the present invention. In this case, the adherend WK may be conveyed by another device, or other means such as the sheet attaching means 30 and the sheet peeling means 50 may move without transporting the adherend WK. When the transfer device EA of the present invention is provided, the adherend WK may be conveyed and other means such as the sheet attaching means 30 and the sheet peeling means 50 may be moved.

The adherend WK supplied to the transfer device EA may be attached with only the first adhesive sheet AS1 without being supported by the first ring frame RF1.
The first and second frame members may be, for example, non-annular members other than the annular first and second ring frames RF1 and RF2.

The materials, types, shapes, etc. of the first, second, and third adhesive sheets AS1, AS2, AS3, the peeling tape PT, and the adherend WK in the present invention are not particularly limited. For example, the first, second, and third adhesive sheets AS1, AS2, AS3, the peeling tape PT, and the adherend WK may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a square shape, or any other shape. However, the first, second, and third adhesive sheets AS1, AS2, AS3, and the peeling tape PT may be in an adhesive form such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness, and the first heat-sensitive adhesiveness may be obtained. When the second and third adhesive sheets AS1, AS2 and AS3 are adopted, an appropriate coil heater for heating the first, second and third adhesive sheets AS1, AS2 and AS3, the heating side of the heat pipe, etc. It may be adhered by an appropriate method such as providing a heating means of. Further, such first, second and third adhesive sheets AS1, AS2, AS3 and the peeling tape PT are, for example, a single layer having only an adhesive layer, and an intermediate between the base material and the adhesive layer. It may be one having a layer, one having three or more layers such as having a cover layer on the upper surface of the base material, and further, a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer. The double-sided adhesive sheet may have a single-layer or multi-layer intermediate layer, or may be a single-layer or multi-layer without an intermediate layer. The adherend WK includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wood boards or resins. It may be a single object, or it may be a compound formed by two or more of them, and any form of a member, an article, or the like can be targeted. The first, second, and third adhesive sheets AS1, AS2, and AS3 are replaced with functional and versatile readings, for example, information description labels, decorative labels, protective sheets, dicing tapes, and die attach films. Any sheet, film, tape or the like such as a dicing tape or a recording layer forming resin sheet may be used.

The drive device in the above embodiment is an electric device such as a rotary motor, a linear motor, a linear motor, a single-axis robot, an articulated robot having two-axis or three-axis or more joints, an air cylinder, a hydraulic cylinder, and a rodless. Actuators such as cylinders and rotary cylinders can be adopted, and those in which they are directly or indirectly combined can also be adopted.
In the above embodiment, when a rotating member such as a roller is adopted, a driving device for rotationally driving the rotating member may be provided, and the surface of the rotating member or the rotating member itself can be deformed by rubber, resin, or the like. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or another member such as a shaft or a blade that rotates or does not rotate may be adopted instead of the roller. Alternatively, when a pressing means such as a pressing roller or a pressing head or a pressing member that presses a pressed object is adopted, a roller, a round bar, or a blade may be used in place of or in combination with the above-exemplified ones. A member such as a material, rubber, resin, or sponge may be adopted, or a structure that presses by blowing a gas such as air or gas may be adopted, or a deformable member such as rubber or resin may be adopted. It may be composed of, or it may be composed of a member that does not deform, and when a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off an object to be peeled is adopted, it is exemplified above. A plate-shaped member, a round bar, a roller, or the like may be used in place of or in combination with the material, or the material to be peeled off may be made of a deformable member such as rubber or resin, or may be deformed. It may be composed of members that do not, or when a member that supports (holds) a supported member (held member) such as a supporting (holding) means or a supporting (holding) member is adopted, a mechanical chuck or a chuck cylinder. Supporting member is supported (held) by gripping means such as, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli suction, suction suction, drive equipment, etc. If a material for cutting a member to be cut such as a cutting means or a cutting member or forming a cut or a cutting line in the member to be cut is used, the above-exemplified material may be used instead of the above-exemplified material. Alternatively, use a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying of gas or liquid, etc. to cut, or use a combination of appropriate drive equipment to cut. It may be moved to cut the object, or if the urging means is adopted, it may be composed of a spring, rubber, resin or the like.

EA ... Transfer device 10 ... Sheet cutting means 30 ... Sheet sticking means 50 ... Sheet peeling means AS1 ... First adhesive sheet AS1A ... Inner sheet AS1B ... Outer sheet AS1C ... Inner sheet protruding part AS2 ... Second adhesive sheet AS3 ... Third adhesive Sheet AS3A ... Third sheet protruding part PT ... Peeling tape WK ... Adhesive body WK1 ... One side WK2 ... The other side

Claims (2)

The first adhesive sheet attached to one surface of the adherend is cut to a size protruding from the outer edge of the adherend, and the first adhesive sheet is cut into the inner sheet attached to the adherend and the said. A sheet cutting means that divides the inner sheet into an outer sheet located on the outside of the inner sheet,
A sheet attaching means for attaching a third adhesive sheet having a size protruding from the outer edge of the second adhesive sheet to the other surface of the adherend via a second adhesive sheet having a size protruding from the outer edge of the adherend. When,
A sheet peeling means for attaching a peeling tape to the inner sheet and applying tension to the peeling tape to peel the inner sheet from the adherend is provided.
The sheet cutting means cuts the first adhesive sheet to a size protruding from the outer edge of the second adhesive sheet.
The sheet peeling means is the third adhesive sheet protruding from the outer edge of the second adhesive sheet so that the protruding portion of the inner sheet of the inner sheet protruding from the outer edge of the adherend does not come into contact with the second adhesive sheet. A transfer device, characterized in that the inner sheet protruding portion is sandwiched between the protruding portion of the third sheet and the peeling tape, and the peeling tape is pressed against the inner sheet to be attached. The first adhesive sheet attached to one surface of the adherend is cut to a size protruding from the outer edge of the adherend, and the first adhesive sheet is cut into the inner sheet attached to the adherend and the said. A sheet cutting process that divides the inner sheet into an outer sheet located outside the inner sheet,
A sheet attaching step of attaching a third adhesive sheet having a size protruding from the outer edge of the second adhesive sheet to the other surface of the adherend via a second adhesive sheet having a size protruding from the outer edge of the adherend. When,
A sheet peeling step of attaching a peeling tape to the inner sheet and applying tension to the peeling tape to peel the inner sheet from the adherend was carried out.
In the sheet cutting step, the first adhesive sheet is cut to a size protruding from the outer edge of the second adhesive sheet.
In the sheet peeling step, the third adhesive sheet protruding from the outer edge of the second adhesive sheet so that the protruding portion of the inner sheet of the inner sheet protruding from the outer edge of the adherend does not come into contact with the second adhesive sheet. The transfer method is characterized in that the protruding portion of the inner sheet is sandwiched between the protruding portion of the third sheet and the peeling tape, and the peeling tape is pressed against the inner sheet and attached.

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