JP2021192419A - Transfer device and transfer method - Google Patents

Abstract

To provide a transfer device and a transfer method which can adhere peeling tape to an inner sheet without adhering the inner sheet to a second adhesive sheet.SOLUTION: A transfer device EA comprises: sheet cutting means 10 which cuts a first adhesive sheet AS1 adhered to one surface WK1 of an adherend WK so that the first adhesive sheet AS1 may be divided into an inner sheet AS1A adhered to the adherend WK and an outer sheet AS1B; position recognizing means 30 which can recognize the position of the adherend WK; sheet adhering means 40 which adheres a second adhesive sheet AS2 to another surface WK2 of the adherend WK; and sheet peeling means 60 which adheres peeling tape PT to the inner sheet AS1A so as to peel off the inner sheet. The position recognizing means 30 is provided in a manner capable of recognizing the position of the adherend WK with respect to the inner sheet AS1A. The sheet peeling means 60 obtains the position of the adherend WK based on a recognition result from the position recognizing means 30 and adheres the peeling tape PT within a corresponding region AS1R.SELECTED DRAWING: Figure 1

Description

The present invention relates to a transfer device and a transfer method.

A transfer device is known in which a second adhesive sheet is attached to the other surface of an adherend to which the first adhesive sheet is attached to one surface, and the first adhesive sheet is peeled off from the adherend (for example,). See Patent Document 1).

Japanese Unexamined Patent Publication No. 2017-162870

However, in the substrate transfer device 1 (transfer device) as described in Patent Document 1, when the adhesive tape T1 (first adhesive sheet) is cut outside the outer edge of the wafer W (adhesive body), it is cut. When trying to attach the release tape Q (release tape) to the non-attached surface side of the first adhesive sheet (inner sheet), the exact position of the adherend cannot be grasped, and the outer edge of the inner sheet is attached to the adhesive tape T2. The inner sheet may be pressed against the (second adhesive sheet) to be attached to the second adhesive sheet (particularly when the first adhesive sheet is opaque). When the inner sheet is attached to the second adhesive sheet in this way, if the adhesive force between the inner sheet and the second adhesive sheet is superior to the adhesive force between the inner sheet and the peeling tape, the inner side is used. When the sheet is peeled off, the peeling tape comes off from the inner sheet, causing poor peeling.

An object of the present invention is to provide a transfer device and a transfer method capable of attaching a release tape to the inner sheet without attaching the inner sheet to the second adhesive sheet.

The present invention has adopted the configuration described in the claims.

According to the present invention, the position of the adherend with respect to the inner sheet in the state where the inner sheet is attached is recognized, and the release tape is attached to the corresponding area of the inner sheet based on the recognition result. The peeling tape can be attached to the inner sheet without attaching the inner sheet to the second adhesive sheet.
Further, according to the present invention, the position of the adherend with respect to the second frame member in a state where the second frame member is arranged in the vicinity of the adherend is recognized, and the inner sheet is based on the recognition result. Since the release tape is attached to the corresponding area, the release tape can be attached to the inner sheet without attaching the inner sheet to the second adhesive sheet.

Explanatory drawing of the transfer apparatus which concerns on one Embodiment of this invention. An operation explanatory diagram of the transfer device.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Further, in the present embodiment, "up" is "down" in the direction of the arrow on the Z axis when the direction is shown without specifying the figure, based on the case of viewing from the front direction of FIG. 1 parallel to the Y axis. Is the opposite direction, "left" is the direction of the arrow on the X axis, "right" is the opposite direction, "front" is the front direction orthogonal to the paper surface, and "rear" is the opposite direction in the direction of the arrow on the Y axis. do.

[First Embodiment]
The transfer device EA of the present invention cuts the first adhesive sheet AS1 attached to one surface WK1 of the adherend WK to a size protruding from the outer edge of the adherend WK, and cuts the first adhesive sheet AS1 into a size protruding from the outer edge of the adherend WK. The sheet cutting means 10 for dividing the inner sheet AS1A attached to the adherend WK and the outer sheet AS1B located outside the inner sheet AS1A, and the second ring frame RF2 as the second frame member are adhered to the adherend. The second adhesive sheet AS2 is attached to the transfer means 20 arranged in the vicinity of the WK, the position recognition means 30 capable of recognizing the position of the adherend WK, the other surface WK2 of the adherend WK, and the second ring frame RF2. The sheet affixing means 40, the reversing means 50 for reversing the adherend WK to which the second adhesive sheet AS2 is affixed, and the inner sheet AS1A affixing the peeling tape PT to apply tension to the peeling tape PT. The sheet peeling means 60 for peeling the inner sheet AS1A from the adherend WK is provided, and is arranged in the vicinity of the adherend transport means 70 for transporting the adherend WK.
In the present embodiment, the adherend WK is supported by the first ring frame RF1 as the first frame member via the first adhesive sheet AS1 to form the first integrated object UP1.

The sheet cutting means 10 is composed of a plurality of arms, and is a so-called articulated robot as a drive device that can displace what is supported by the tip arm 11A, which is a working portion, at any position and at any angle within the working range. It includes a robot 11 and a cutting blade 12 as a cutting member supported by the tip arm 11A of the articulated robot 11 via a bracket 12A.

The transfer means 20 is supported by the articulated robot 11 shared with the sheet cutting means 10 and the tip arm 11A of the articulated robot 11 via the frame 21, and the suction force is generated by a decompression means (not shown) such as a decompression pump or a vacuum ejector. It is provided with a suction pad 22 (holding means) to be provided.

The position recognition means 30 includes an image pickup means such as a camera or a projector, and a detection means 31 such as various sensors such as an optical sensor and an ultrasonic sensor, and a second ring frame RF2 is arranged in the vicinity of the adherend WK. The position of the adherend WK with respect to the second ring frame RF2 in the state is recognizable.

The sheet attaching means 40 includes a support roller 41 for supporting the original fabric RS on which the second adhesive sheet AS2 is temporarily attached to the strip-shaped release sheet RL, a guide roller 42 for guiding the original fabric RS, and a release sheet with the release edge 43A. A peeling plate 43 as a peeling means for peeling the second adhesive sheet AS2 from the peeling sheet RL by folding back the RL, and a pressing roller 44 as a pressing means for pressing and attaching the second adhesive sheet AS2 to the adherend WK. The drive roller 45, which is supported by an output shaft (not shown) of the rotary motor 45A as a drive device and sandwiches the release sheet RL with the pinch roller 45B, and the output shaft of the drive device (not shown) support the automatic operation of the transfer device EA. During the process, a recovery roller 46 is provided as a recovery means for recovering the release sheet RL by constantly applying a predetermined tension to the release sheet RL existing between the peel roller 45B and the pinch roller 45B.

The reversing means 50 includes a linear motor 51 as a drive device, a frame 52 supported by the output shaft 51A, forward extending arms 53 supported by the left and right ends of the frame 52, and the front of each arm 53. It is provided with a rotation motor 54 as a drive device supported by the machine and a chuck motor 55 (holding means) as a drive device supported by the output shaft 54A and having a pair of chuck arms 55A.

The sheet peeling means 60 includes a tape supporting means 61 that rotatably supports the wound heat-sensitive adhesive peeling tape PT, and the tape supporting means 61 that supports the peeling tape PT supported by the tape supporting means 61. It assists the feeding means 62 that sandwiches and imparts a feeding output to the peeling tape PT, the lead holding means 63 that holds the lead end of the peeling tape PT, and the lead holding means 63 to hold the peeling tape PT. Holding assisting means 64, the peeling tape sticking means 65 for pressing and sticking the peeling tape PT against the inner sheet AS1A, the cutting means 66 for cutting the peeling tape PT, and applying tension to the peeling tape PT. A tension applying means 67 is provided, and the position of the adherend WK is obtained from the outer edge position as a predetermined position of the second ring frame RF2 based on the recognition result of the position recognition means 30, and the adherend WK is attached. The peeling tape PT is attached to the corresponding area AS1R on the non-attached surface side of the inner sheet AS1A corresponding to the attached area AS1S.

The tape supporting means 61 feeds out a rotating arm 61B that can rotate around the shaft 61A, a support roller 61C that is supported on the free end side thereof and supports the wound stripping tape PT, and a support roller 61C. It is provided with a spring 61D as an urging means for urging in the direction of the means 62.
The feeding means 62 includes a rotating motor 62A as a drive device, and a feeding roller 62B which is supported by an output shaft (not shown) and which applies a rotational force to the peeling tape PT supported by the support roller 61C.
The lead holding means 63 is sucked and held via the accommodating means 63C supported by the output shaft 63B of the linear motion motor 63A as a drive device and the suction hole 63E formed on the suction surface 63D which is the bottom surface of the accommodating means 63C. It is equipped with a suction means 63F (holding means) as a support means such as a possible decompression pump and a vacuum ejector.
The holding assisting means 64 includes a linear motor 64A as a drive device, and an auxiliary roller 64C supported by the output shaft 64B thereof and which brings the peeling tape PT into contact with the suction surface 63D.
The peeling tape attaching means 65 includes a linear motor 65A as a drive device housed in the housing means 63C, a pressing member 65C supported by the slider 65B, and pressing the peeling tape PT against the inner sheet AS1A, and a pressing member. It is provided with a coil heater provided inside the 65C and a heating means 65D such as the heating side of the heat pipe.
The cutting means 66 includes a linear motor 66A as a driving device housed in the housing means 63C, and a cutting blade 66C supported by the slider 66B and capable of cutting the peeling tape PT.
The tension applying means 67 includes a linear motor 67A as a driving device and a peeling roller 67C supported by the slider 67B thereof.

The adherend transport means 70 includes a linear motor 71 as a drive device, a first support table 72 supported by a first slider 71A of the linear motor 71, and a second support table 72 supported by a second slider 71B of the linear motor 71. It is provided with a support table 73.
The first support table 72 has an inner support surface 72A (holding means) that can be adsorbed and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector, and an inner support surface 72A formed on the outside of the inner support surface 72A and viewed from above. A concave groove 72B formed into an annular shape in a plan view, and an outer support surface 72C (holding means) formed on the outside of the concave groove 72B and capable of suction and holding by a decompression means (not shown) such as a decompression pump or a vacuum ejector. Is provided.
The second support table 73 is provided with a holding portion 73A (holding means) on the upper surface thereof, which can be adsorbed and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector, and an annular shape in a plan view inside the holding portion 73A. The inner sheet AS1A is provided with a strong holding portion 73B (holding means) for holding the protruding portion protruding from the adherend WK with a suction holding force stronger than the suction holding force of the holding portion 73A.

Next, the operation of the transfer device EA will be described.
First, with respect to the transfer device EA in which each member is arranged at the initial position shown by the solid line in FIG. 1, the user of the transfer device EA (hereinafter, simply referred to as “user”) determines the original fabric RS and After setting the peeling tape PT, a signal for starting automatic operation is input via an operation means (not shown) such as an operation panel or a personal computer. Then, the sheet peeling means 60 drives the suction means 63F to start sucking and holding the peeling tape PT on the suction surface 63D, and the sheet sticking means 40 drives the rotary motor 45A to feed the original fabric RS. When the tip end portion of the leading second adhesive sheet AS2 in the feeding direction is peeled off by the peeling edge 43A of the peeling plate 43 by a predetermined length, the drive of the rotary motor 45A is stopped. Next, when a user or a transporting means (not shown) such as an articulated robot or a belt conveyor places the first integrated object UP1 on the first support table 72 as shown by the solid line in FIG. 1, the adherend transporting means 70 Drives a decompression means (not shown) to start adsorption and holding of the first integrated object UP1 on the inner and outer support surfaces 72A and 72C.

After that, the sheet cutting means 10 drives the articulated robot 11, and as shown by the alternate long and short dash line in FIG. 1, the cutting blade 12 is pierced into the first adhesive sheet AS1 at a position separated from the outer edge of the adherend WK by a predetermined distance. After making the cutting blade 12 make one round along the concave groove 72B, the cutting blade 12 is returned to the initial position. As a result, the first adhesive sheet AS1 is divided into an inner sheet AS1A and an outer sheet AS1B. Next, the transfer means 20 drives the articulated robot 11, cuts off the cutting blade 12 held by the tip arm 11A, holds the suction pad 22 by the tip arm 11A, and then attaches the suction pad 22 to the first ring. It comes into contact with the upper surface of the frame RF1 and drives a decompression means (not shown) to start suction holding of the first ring frame RF1 by the suction pad 22. Then, when the adherend transporting means 70 stops driving the decompression means (not shown) and releases the suction holding of the first integrated object UP1 on the outer support surface 72C, the transfer means 20 drives the articulated robot 11 and is outside. After transporting the first ring frame RF1 to which the sheet AS1B is attached to a predetermined collection position (not shown), the drive of the decompression means (not shown) is stopped, and the suction holding of the first ring frame RF1 by the suction pad 22 is released. Next, the transfer means 20 drives the articulated robot 11 to bring the suction pad 22 into contact with the upper surface of the uppermost second ring frame RF2 integrated in the frame stocker portion ST, and then drives the decompression means (not shown). Then, the suction holding of the second ring frame RF2 on the suction pad 22 is started. After that, when the transfer means 20 drives the articulated robot 11 and the second ring frame RF2 is placed on the outer support surface 72C, the adherend transport means 70 drives a decompression means (not shown) on the outer support surface 72C. The adsorption retention of the second ring frame RF2 of the above is started. Next, the transfer means 20 stops driving the decompression means (not shown), releases the suction holding of the second ring frame RF2 by the suction pad 22, and then drives the articulated robot 11 to move the suction pad 22 to the initial position. After returning, the suction pad 22 held by the tip arm 11A is separated, and the cutting blade 12 is held by the tip arm 11A.

Then, the adherend transport means 70 drives the linear motor 71 to move the first support table 72 to the right, and when the first support table 72 reaches a predetermined position with respect to the position recognition means 30, the position recognition means 30 drives the detection means 31, recognizes the position of the adherend WK with respect to the second ring frame RF2, outputs the recognition result to the sheet peeling means 60, and stops driving the detection means 31. Next, when the first support table 72 reaches a predetermined position with respect to the sheet sticking means 40, the sheet sticking means 40 drives the rotation motor 45A and feeds the original fabric RS according to the moving speed of the first support table 72. As a result, the second adhesive sheet AS2 is peeled off from the release sheet RL, and the second adhesive sheet AS2 peeled off from the release sheet RL is a second ring frame by the pressing roller 44 as shown by the alternate long and short dash line in FIG. It is pressed and attached to the upper surface of RF2 and the other surface WK2 of the adherend WK. After that, the entire leading second adhesive sheet AS2 is attached to the second ring frame RF2 and the adherend WK to form the second integrated object UP2, and the next second adhesive sheet following the leading second adhesive sheet AS2 is formed. When the tip portion of the AS2 in the feeding direction is peeled off by the peeling edge 43A of the peeling plate 43 by a predetermined length, the sheet sticking means 40 stops driving the rotary motor 45A.

After that, the movement of the first support table 72 to the right continues, and as shown by the two-dot chain line in FIG. 1, when the first support table 72 reaches directly under the reversing means 50, the adherend transporting means 70 Stops driving the linear motor 71. Next, the reversing means 50 drives the linear motor 51, lowers the frame 52 as shown by the alternate long and short dash line in FIG. 1, then drives each chuck motor 55, and the second ring is driven by each chuck arm 55A. Grasp the frame RF2. Then, when the adherend transporting means 70 stops driving the decompression means (not shown) and releases the suction holding of the second integrated object UP2 on the inner and outer support surfaces 72A and 72C, the reversing means 50 causes the linear motion motor 51 and After driving the rotation motor 54 and lifting the second integrated object UP2 to a predetermined height, the second integrated object UP2 is turned upside down. Next, the adherend transport means 70 drives the linear motor 71 to return the first support table 72 to the initial position and move the second support table 73 directly under the reversing means 50, and then the reversing means 50 moves. The linear motor 51 is driven so that the second adhesive sheet AS2 is on the second support table 73 side, and the second integrated object UP2 is placed on the second support table 73. After that, when the adherend transporting means 70 drives a decompression means (not shown) and starts suction holding of the second integrated object UP2 by the holding portion 73A and the strong holding portion 73B, the reversing means 50 causes the linear motion motor 51 and the chuck motor. The 55 is driven to return the frame 52 and the chuck arm 55A to the initial positions.

Next, the adherend transport means 70 drives the linear motor 71 to move the second support table 73 to the right, and as shown by the two-dot chain line in FIG. 1, the left end portion of the adherend WK is a pressing member. When it is located directly under 65C, the driving of the linear motor 71 is stopped. At this time, the sheet peeling means 60 detects the outer edge position of the second ring frame RF2 by an image pickup means such as a camera or a projector, or a detection means (not shown) such as various sensors such as an optical sensor or an ultrasonic sensor, and this detection is performed. Based on the result and the recognition result output from the position recognition means 30, the position of the left end portion of the adherend WK is specified, and a drive stop command of the linear motor 71 is output to the adherend transport means 70. Therefore, the sheet peeling means 60 can stop the second support table 73 in a state where the left end portion of the adherend WK is accurately positioned directly under the pressing member 65C. Then, the sheet peeling means 60 drives the linear motion motor 64A, and as shown by the two-dot chain line in FIG. 1, the auxiliary roller 64C is retracted from below the accommodating means 63C, and then the rotary motor 62A and the linear motion motor 63A are retracted. Is driven, and the accommodating means 63C is lowered to a predetermined position directly above the inner sheet AS1A while paying out the peeling tape PT. Next, the sheet peeling means 60 drives the linear motor 65A, lowers the pressing member 65C as shown in FIG. 2A, presses the peeling tape PT into the corresponding region AS1R of the inner sheet AS1, and then heats the sheet. The means 65D is driven to heat the peeling tape PT to adhere the peeling tape PT to the inner sheet AS1A. At this time, since the left end portion of the adherend WK is accurately positioned directly under the pressing member 65C, the outer edge portion of the inner sheet AS1A is pressed against the second adhesive sheet AS2, and the inner sheet AS1A is pressed against the second adhesive sheet AS2. It will not be attached to.

After that, the sheet peeling means 60 stops driving the suction means 63F, releases the suction holding of the peeling tape PT on the suction surface 63D, and then drives the linear motor 63A and the linear motor 65A to drive the accommodation means 63C and the pressing. The member 65C is returned to the initial position. Next, the sheet peeling means 60 drives the linear motor 67A, and as shown in FIG. 2B, the peeling roller 67C is moved to the right to apply tension to the peeling tape PT from the adherend WK. The inner sheet AS1A is peeled off. Then, when the entire inner sheet AS1A is peeled from the adherend WK and the third integrated object UP3 is formed, the sheet peeling means 60 stops driving the linear motor 67A, and then the linear motor 64A and the suction means 63F are used. It is driven, and as shown in FIG. 2C, the auxiliary roller 64C is returned to the initial position, and the suction holding of the peeling tape PT on the suction surface 63D is started. Next, the sheet peeling means 60 drives the linear motor 66A, and as shown in FIG. 2C, the cutting blade 66C is moved up and down to cut the peeling tape PT, and the operator or the transfer means (not shown) is the inner sheet AS1A. The sheet peeling means 60 drives the linear motor 67A to return the peeling roller 67C to the initial position. After that, the adherend transporting means 70 drives the linear motor 71, returns the second support table 73 to the initial position, stops driving the decompression means (not shown), and the third holding portion 73A and the strong holding portion 73B. When the suction holding of the integrated object UP3 is released, the operator or the conveying means (not shown) conveys the third integrated object UP3 on the second support table 73 to the next step, and the same operation as described above is repeated thereafter.

According to the first embodiment as described above, the position of the adherend WK with respect to the second ring frame RF2 in a state where the second ring frame RF2 is arranged in the vicinity of the adherend WK is recognized, and the recognition thereof. Since the peeling tape PT is attached to the corresponding area AS1R of the inner sheet AS1A based on the result, the peeling tape PT is attached to the inner sheet AS1A without attaching the inner sheet AS1A to the second adhesive sheet AS2. be able to.

[Second Embodiment]
For example, the transfer device of the present invention may be the transfer device EA1 shown in FIG. 1 (A).
In the second embodiment, those having the same configuration as the first embodiment and having the same function are assigned the same numbers as the first embodiment, the configuration description is omitted, and the operation description and the illustration are simplified. To become.
That is, the transfer device EA1 of the present invention cuts the first adhesive sheet AS1 attached to one surface WK1 of the adherend WK to a size protruding from the outer edge of the adherend WK, and the first adhesive sheet AS1 The sheet cutting means 10 for dividing the inner sheet AS1A attached to the adherend WK into the outer sheet AS1B located outside the inner sheet AS1A, and the second ring frame RF2 in the vicinity of the adherend WK. The transfer means 20 to be arranged, the position recognition means 30 capable of recognizing the position of the adherend WK, the sheet sticking means 40 for sticking the second adhesive sheet AS2 to the other surface WK2 of the adherend WK, and the second adhesion. The reversing means 50 for flipping the adherend WK to which the sheet AS2 is attached is attached, and the peeling tape PT is attached to the inner sheet AS1A, and tension is applied to the peeling tape PT to apply tension from the adherend WK to the inner sheet AS1A. It is provided with a sheet peeling means 60 for peeling the sheet, and is arranged in the vicinity of the adherend transporting means 70 for transporting the adherend WK.

The position recognizing means 30 is provided so as to be able to recognize the position of the adherend WK with respect to the inner sheet AS1A in a state where the inner sheet AS1A is attached to the adherend WK.

The sheet peeling means 60 obtains the position of the adherend WK from the outer edge position as a predetermined position of the inner sheet AS1A based on the recognition result of the position recognition means 30, and the sticking area to which the adherend WK is attached. The peeling tape PT is attached to the corresponding area AS1R on the non-attached surface side of the inner sheet AS1A corresponding to AS1S.

In such a transfer device EA1, the sheet cutting means 10 divides the first adhesive sheet AS1 into the inner sheet AS1A and the outer sheet AS1B in the same manner as in the first embodiment, and then the transfer means 20 drives the articulated robot 11. Then, the outer sheet AS1B is removed and the second ring frame RF2 is placed on the first support table 72. Next, the adherend transport means 70 drives the linear motor 71 to move the first support table 72 to the right, and when the first support table 72 reaches a predetermined position with respect to the position recognition means 30, the position recognition means 30 drives the detection means 31, recognizes the position of the adherend WK with respect to the inner sheet AS1A, outputs the recognition result to the sheet peeling means 60, and stops driving the detection means 31. After that, the sheet attaching means 40 attaches the second adhesive sheet AS2 to the upper surface of the second ring frame RF2 and the other surface WK2 of the adherend WK in the same manner as in the first embodiment to form the second integrated object UP2. Then, after the reversing means 50 flips the second integrated object UP2 upside down in the same manner as in the first embodiment, the second integrated object UP2 is placed on the second support table 73. Next, the sheet peeling means 60 detects the outer edge position of the inner adhesive sheet AS1A by a detection means (not shown), and the position of the left end portion of the adherend WK is based on the detection result and the recognition result output from the position recognition means 30. The second support table 73 is stopped in a state where the left end portion is accurately positioned directly under the pressing member 65C. Then, in the same manner as in the first embodiment, the sheet peeling means 60 adheres the peeling tape PT to the inner sheet AS1A, applies tension to the peeling tape PT to peel the inner sheet AS1A from the adherend WK, and thereafter. The same operation as described above is repeated.

According to the second embodiment as described above, the position of the adherend WK with respect to the inner sheet AS1A in the state where the inner sheet AS1A is attached is recognized, and the corresponding area of the inner sheet AS1A is recognized based on the recognition result. Since the peeling tape PT is attached to the inside of AS1R, the peeling tape PT can be attached to the inner sheet AS1A without attaching the inner sheet AS1A to the second adhesive sheet AS2.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the constituents of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, the sheet cutting means cuts the first adhesive sheet attached to one surface of the adherend to a size protruding from the outer edge of the adherend, and the first adhesive sheet is attached to the adherend. Any material may be used as long as it can be divided into an inner sheet and an outer sheet located outside the inner sheet, and is limited as long as it is within the technical range in light of the common general technical knowledge at the time of filing. Not done (same for other means and processes).

The sheet cutting means 10 may cut the first adhesive sheet AS1 from the sticking surface side of the first adhesive sheet AS1, or cut the first adhesive sheet AS1 from the non-sticking surface side of the first adhesive sheet AS1. Alternatively, the drive device for moving the cutting blade 12 (the articulated robot 11 in the above embodiment) may be cut by another drive device without being shared with the drive device for moving the suction pad 22 by the transfer means 20. The blade 12 may be moved, the cutting blade 12 may not be attached to and detached from the articulated robot 11, or the articulated robot 11 may directly support the cutting blade 12 without using the bracket 12A. ..

The transfer means 20 is another drive device without sharing the drive device for moving the suction pad 22 (articulated robot 11 in the above embodiment) with the drive device for moving the cutting blade 12 by the sheet cutting means 10. The suction pad 22 may be moved, the suction pad 22 may not be attached to or detached from the articulated robot 11, or the articulated robot 11 directly supports the cut suction pad 22 without going through the frame 21. Alternatively, at least one of the first ring frame RF1 and the outer sheet AS1B may not be removed from the first support table 72, and the first ring frame RF1 to which the outer sheet AS1B or the outer sheet AS1B is attached may be attached. When transporting to a predetermined collection position by another device or by hand, the transfer device EA or EA1 of the present invention may not be provided, and the second ring frame RF2 may be provided by another device or by hand to the first support table. When it is placed on the 72, or when the second ring frame RF2 is not placed on the first support table 72, it may not be provided in the transfer device EA1 of the present invention.

The position recognition means 30 may include a length measuring sensor as the detection means 31, or recognizes the position of the adherend WK while moving the first support table 72 without moving or moving itself. Alternatively, the position of the adherend WK may be recognized without moving or moving itself without moving the first support table 72, or the sheet sticking means 40, the reversing means 50 and the cover may be recognized. The recognition result may be output to at least one of the body transport means 70, and each of the means receiving the recognition result may attach the second adhesive sheet AS2 to the adherend WK or the second integrated object UP2. The operation of flipping the top and bottom or stopping the first support table 72 directly under the flipping means 50 may be performed based on the recognition result, or the recognition result may be saved and the sheet sticking means 40, The recognition result may be output to the reversing means 50, the sheet peeling means 60, and the adherend transporting means 70 according to the operation timings of each.

In the sheet attaching means 40, a closed loop-shaped or short cut in the entire width direction is formed in the strip-shaped adhesive sheet base material temporarily attached to the release sheet RL, and a predetermined region partitioned by the cut is formed. 2 The original fabric as the adhesive sheet AS2 may be fed out, or the original fabric in which the strip-shaped adhesive sheet base material is temporarily attached to the release sheet RL is adopted, and the strip-shaped adhesive sheet base material is closed-looped or the entire short width direction. The notch may be formed by a cutting means, and a predetermined area partitioned by the notch may be used as the second adhesive sheet AS2, or the strip-shaped adhesive sheet base material may be attached to the adherend WK. 2 When the adhesive sheet AS2 is peeled from the peeling sheet RL, the torque of the rotating motor 45A may be controlled so that a predetermined tension is applied to the original fabric RS, or the support roller 41, the guide roller 42, etc. may be controlled. Instead of the roller, the original fabric RS or the release sheet RL may be supported or guided by a plate-shaped member, a shaft member, or the like, or the original fabric RS may be supported by folding it in a fan fold without winding it. Alternatively, the second adhesive sheet AS2 is held by a holding member that is supported by the output shaft of a linear motion motor as a drive device and can be sucked and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector, and the holding member is held. The second adhesive sheet AS2 held in 1 may be pressed against the adherend WK and attached to the adherend WK, or the release sheet RL may be fanfold-folded, chopped with a shredder or the like, or randomly accumulated. A recovery means for recovering the release sheet RL may be adopted, or a recovery means may not be adopted, or the first support table 72 may be moved without or while being moved. The second adhesive sheet AS2 may be attached to the adherend WK, or the second adhesive sheet AS2 to which the release sheet RL is not temporarily attached may be unwound and attached to the adherend WK. The second adhesive sheet AS2 may be attached only to the body WK.

The reversing means 50 holds at least one of the second ring frame RF2, the second adhesive sheet AS2, the inner sheet AS1A, and the adherend WK in the second integrated object UP2, and inverts the second integrated object UP2. Alternatively, the first support table 72 may be retracted from below the second integrated object UP2 without raising the second integrated object UP2, and the second integrated object UP2 may be turned upside down. It may be configured to be supported by the first support table 72 or the second support table 73, the rotation motor 54 may be one or three or more, and the chuck motor 55 may be one or three. Alternatively, the sheet peeling means 60 may be inside from below the second integrated object UP2 supported by the first support table 72, for example, while the second integrated object UP2 is formed by the sheet attaching means 40. When the sheet AS1A is configured to be peelable, it does not have to be provided in the transfer devices EA and EA1 of the present invention.

The sheet peeling means 60 may attach the peeling tape PT in the corresponding region AS1R closer to the central portion of the adherend WK than the outer edge of the adherend WK, or the sheet peeling tape PT may be attached. It may be attached to the inner sheet AS1A, or a pinch roller that sandwiches the peeling tape PT with the feeding roller 62B without urging the support roller 61C in the feeding means 62 direction is adopted to feed the peeling tape PT. Alternatively, the inner sheet AS1A may be pulled from the adherend WK by applying tension to the peeling tape PT by at least one of the drive of the feeding means 62, the drive of the linear motor 71, and the drive of the linear motor 67A. It may be peeled off, or when the accommodating means 63C is lowered to a predetermined position directly above the inner sheet AS1A, the lead end of the peeling tape PT sucked and held by the suction surface 63D is brought into contact with the inner sheet AS1A. Alternatively, the accommodating means 63C may not be provided, or the peeling tape PT after peeling the inner sheet AS1A may be held only by the lead holding means 63 without adopting the holding assisting means 64, or may be held. The auxiliary means 64 may be used in place of or in combination with the auxiliary roller 64C to bring the peeling tape PT into contact with the suction surface 63D by a rod-shaped member, a plate-shaped member, air blowing, or the like, or a heating means. The pressure-sensitive adhesive peeling tape PT may be attached to the inner sheet AS1A without adopting the 65D or by adopting the heating means 65D, or by spraying a gas instead of the pressing member 65C for peeling. A configuration may be adopted in which the tape PT is attached to the inner sheet AS1A, or at least one of the peeling tape attaching means 65 and the cutting means 66 may not be accommodated in the accommodating means 63C, and the peeling tape PT may be attached. It may not be cut, the peeling tape PT may be cut by another device or manually without adopting the cutting means 66, or the tape may be cut, for example, without adopting the linear motor 67A and the peeling roller 67C. For peeling without moving or moving the peeling tape holding members such as the support means 61, the feeding means 62, and the lead holding means 63, or by moving the second support table 73 without moving the second support table 73. By moving the tape holding member or moving another device supporting the second integrated object UP2 relative to the peeling tape holding member, tension is applied to the peeling tape PT and the adherend WK. The inner sheet AS1A may be peeled off from the inner sheet.
The sheet peeling means 60 employs at least one of a driving device for moving the pressing member 65C in the left-right direction and a driving device for moving the pressing member 65C in the front-rear direction, and is based on the recognition result output from the position recognition means 30. The position of the adherend WK may be specified, and the pressing member 65C may be moved in the left-right direction or the front-back direction to attach the peeling tape PT in the corresponding area AS1R, or the driving device for moving the pressing member 65C in the left-right direction. When the above is adopted, the adherend transporting means 70 is linear when the left end portion of the adherend WK is located directly under the pressing member 65C without obtaining the drive stop command of the linear motor 71 by the sheet peeling means 60. The drive of the motor 71 can be stopped.
The sheet peeling means 60 in the transfer device EA of the first embodiment may set a predetermined position of the second ring frame RF2 for obtaining the position of the adherend WK as, for example, the inner edge position of the second ring frame RF2. It may be the position of a V notch (not shown) formed on the second ring frame RF2, the position of a flat portion (not shown), or the like.
The sheet peeling means 60 in the transfer device EA1 of the second embodiment sets a predetermined position of the inner sheet AS1A for obtaining the position of the adherend WK, for example, a mark (not shown) such as a figure or a symbol provided on the inner sheet AS1A. It may be a position such as.
In the above embodiment, the sheet peeling means 60 uses a detection means (not shown) to determine the position of the adherend WK based on the recognition result of the position recognition means 30, but without using a detection means (not shown). For example, the position of the adherend WK may be obtained from the transport speed and the transport time of the adherend WK of the adherend transport means 70 based on the recognition result of the position recognition means 30.

In the adherend transport means 70, the drive device for moving the first support table 72 and the drive device for moving the second support table 73 may be separated, and the first support table 73 may be moved without adopting the first support table 73. The support table 72 may perform the same operation as the second support table 73, or a drive device for moving at least one of the first support table 72 and the second support table 73 in the front-rear direction is adopted, and each means is adopted. The adherend WK may be able to move in the left-right direction within the work area of Any annular shape such as an annular shape or an elliptical annular shape may be used, the concave groove 72B may not be formed on the first support table 72, and a system for imparting holding force to the inner support surface 72A and the outer support surface 72C. May be one system, or one system may be provided for each to impart holding power to a total of two systems, or one system may be provided to impart holding power to the holding portion 73A and the strong holding portion 73B. Or, one system may be provided for each of them to give a holding force to a total of two systems, or a part of the inner sheet AS1A corresponding to the area where the adherend WK is not attached or The strong holding portions 73B may be formed in all (annular), may be provided in the transfer devices EA and EA1 of the present invention, and may or may not be provided in the transfer devices EA and EA1 of the present invention. If it is not provided, the adherend WK may be transported by another device, or other means such as the sheet sticking means 40 and the sheet peeling means 60 may move without transporting the adherend WK. Alternatively, when the transfer devices EA and EA1 of the present invention are provided, the adherend WK may be conveyed and other means such as the sheet attaching means 40 and the sheet peeling means 60 may be moved.

The adherend WK supplied to the transfer devices EA and EA1 may be attached with only the first adhesive sheet AS1 without being supported by the first ring frame RF1.
The first and second frame members may be, for example, non-annular members other than the annular first and second ring frames RF1 and RF2.

The materials, types, shapes, etc. of the first and second adhesive sheets AS1, AS2, the peeling tape PT, and the adherend WK in the present invention are not particularly limited. For example, the first and second adhesive sheets AS1, AS2, the peeling tape PT, and the adherend WK may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a square shape, or any other shape. The second adhesive sheets AS1 and AS2 and the peeling tape PT may have an adhesive form such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness, and the heat-sensitive adhesive first and second adhesive sheets AS1 and AS2 are adopted. If this is the case, the first and second adhesive sheets AS1 and AS2 may be adhered by an appropriate method such as providing an appropriate coil heater or a heating means such as a heating side of a heat pipe. Further, the first and second adhesive sheets AS1, AS2 and the peeling tape PT are, for example, a single layer having only an adhesive layer, a one having an intermediate layer between the base material and the adhesive layer, and the like. It may be a so-called double-sided adhesive sheet having three or more layers such as having a cover layer on the upper surface of the base material, or a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer. It may have a single layer or a multi-layer intermediate layer, or may be a single layer or a multi-layer without an intermediate layer. The adherend WK includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wood boards or resins. It may be a single object, or it may be a compound formed by two or more of them, and any form of a member, an article, or the like can be targeted. The first and second adhesive sheets AS1 and AS2 can be read in a functional and versatile manner, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording. Any sheet such as a layer-forming resin sheet, a film, a tape, or the like may be used.

The drive device in the above embodiment is an electric device such as a rotary motor, a linear motor, a linear motor, a single-axis robot, an articulated robot having two-axis or three-axis or more joints, an air cylinder, a hydraulic cylinder, and a rodless. Actuators such as cylinders and rotary cylinders can be adopted, and those in which they are directly or indirectly combined can also be adopted.
In the above embodiment, when a rotating member such as a roller is adopted, a driving device for rotationally driving the rotating member may be provided, and the surface of the rotating member or the rotating member itself can be deformed by rubber, resin, or the like. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or another member such as a shaft or a blade that rotates or does not rotate may be adopted instead of the roller. Alternatively, when a pressing means such as a pressing roller or a pressing head or a pressing member that presses a pressed object is adopted, a roller, a round bar, or a blade may be used in place of or in combination with the above-exemplified ones. A member such as a material, rubber, resin, or sponge may be adopted, or a structure that presses by blowing a gas such as air or gas may be adopted, or a deformable member such as rubber or resin may be adopted. It may be composed of, or it may be composed of a member that does not deform, and when a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off an object to be peeled is adopted, it is exemplified above. A plate-shaped member, a round bar, a roller, or the like may be used in place of or in combination with the material, or the material to be peeled off may be made of a deformable member such as rubber or resin, or may be deformed. It may be composed of members that do not, or when a member that supports (holds) a supported member (held member) such as a supporting (holding) means or a supporting (holding) member is adopted, a mechanical chuck or a chuck cylinder. Supporting member is supported (held) by gripping means such as, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli suction, suction suction, drive equipment, etc. If a material for cutting a member to be cut such as a cutting means or a cutting member or forming a cut or a cutting line in the member to be cut is used, the above-exemplified material may be used instead of the above-exemplified material. Alternatively, use a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying of gas or liquid, etc. to cut, or use a combination of appropriate drive equipment to cut. It may be moved to cut the object, or if the urging means is adopted, it may be composed of a spring, rubber, resin or the like.

EA ... Transfer device EA1 ... Transfer device 10 ... Sheet cutting means 20 ... Transfer means 30 ... Position recognition means 40 ... Sheet sticking means 60 ... Sheet peeling means AS1 ... First adhesive sheet AS1A ... Inner sheet AS1B ... Outer sheet AS1S ... Sticking area AS1R ... Corresponding area AS2 ... Second adhesive sheet PT ... Peeling tape RF2 ... Second ring frame (second frame member)
WK ... adherend WK1 ... one side WK2 ... other side

Claims (4)

The first adhesive sheet attached to one surface of the adherend is cut to a size protruding from the outer edge of the adherend, and the first adhesive sheet is cut into the inner sheet attached to the adherend and the said. A sheet cutting means that divides the inner sheet into an outer sheet located on the outside of the inner sheet,
A position recognition means capable of recognizing the position of the adherend,
A sheet attaching means for attaching the second adhesive sheet to the other surface of the adherend, and
A sheet peeling means for attaching a peeling tape to the inner sheet and applying tension to the peeling tape to peel the inner sheet from the adherend is provided.
The position recognition means is provided so as to be able to recognize the position of the adherend with respect to the inner sheet in a state where the inner sheet is attached to the adherend.
The sheet peeling means obtains the position of the adherend from a predetermined position of the inner sheet based on the recognition result of the position recognition means, and the inner side corresponding to the sticking area to which the adherend is attached. A transfer device characterized in that the peeling tape is attached to a corresponding area on the non-attached surface side of the sheet. The first adhesive sheet attached to one surface of the adherend is cut to a size protruding from the outer edge of the adherend, and the first adhesive sheet is cut into the inner sheet attached to the adherend and the said. A sheet cutting means that divides the inner sheet into an outer sheet located on the outside of the inner sheet,
A transfer means for arranging the second frame member in the vicinity of the adherend,
A position recognition means capable of recognizing the position of the adherend,
A sheet attaching means for attaching the second adhesive sheet to the other surface of the adherend and the second frame member, and
A sheet peeling means for attaching a peeling tape to the inner sheet and applying tension to the peeling tape to peel the inner sheet from the adherend is provided.
The position recognition means is provided so as to be able to recognize the position of the adherend with respect to the second frame member in a state where the second frame member is arranged in the vicinity of the adherend.
The sheet peeling means obtains the position of the adherend from a predetermined position of the second frame member based on the recognition result of the position recognition means, and corresponds to the sticking area to which the adherend is attached. A transfer device for sticking the peeling tape in a corresponding area on the non-sticking surface side of the inner sheet. The first adhesive sheet attached to one surface of the adherend is cut to a size protruding from the outer edge of the adherend, and the first adhesive sheet is cut into the inner sheet attached to the adherend and the said. A sheet cutting process that divides the inner sheet into an outer sheet located outside the inner sheet,
The position recognition step of recognizing the position of the adherend and
A sheet affixing step of affixing the second adhesive sheet to the other surface of the adherend,
A sheet peeling step of attaching a peeling tape to the inner sheet and applying tension to the peeling tape to peel the inner sheet from the adherend was carried out.
In the position recognition step, the position of the adherend with respect to the inner sheet in a state where the inner sheet is attached to the adherend is recognized.
In the sheet peeling step, the position of the adherend is obtained from a predetermined position of the inner sheet based on the recognition result in the position recognition step, and the sticking area corresponding to the sticking area to which the adherend is stuck is obtained. A transfer method characterized in that the release tape is attached to a corresponding area on the non-attached surface side of the inner sheet. The first adhesive sheet attached to one surface of the adherend is cut to a size protruding from the outer edge of the adherend, and the first adhesive sheet is cut into the inner sheet attached to the adherend and the said. A sheet cutting process that divides the inner sheet into an outer sheet located outside the inner sheet,
A transfer step of arranging the second frame member in the vicinity of the adherend,
The position recognition step of recognizing the position of the adherend and
A sheet attaching step of attaching the second adhesive sheet to the other surface of the adherend and the second frame member, and
A sheet peeling step of attaching a peeling tape to the inner sheet and applying tension to the peeling tape to peel the inner sheet from the adherend was carried out.
In the position recognition step, the position of the adherend with respect to the second frame member in a state where the second frame member is arranged in the vicinity of the adherend is recognized.
In the sheet peeling step, the position of the adherend is obtained from a predetermined position of the second frame member based on the recognition result in the position recognition step, and the attachment region to which the adherend is attached is supported. A transfer method, characterized in that the release tape is attached to a corresponding area on the non-attached surface side of the inner sheet.

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