JP2021125615A - 半導体装置及び半導体記憶装置 - Google Patents
半導体装置及び半導体記憶装置 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 488
- 238000003860 storage Methods 0.000 title claims description 26
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 157
- 229910052738 indium Inorganic materials 0.000 claims abstract description 156
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 123
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 123
- 239000011701 zinc Substances 0.000 claims abstract description 107
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 87
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 87
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 claims abstract description 30
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 22
- 229910052733 gallium Inorganic materials 0.000 claims description 22
- 239000003990 capacitor Substances 0.000 claims description 18
- 238000009413 insulation Methods 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 395
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 38
- 239000001301 oxygen Substances 0.000 description 38
- 229910052760 oxygen Inorganic materials 0.000 description 38
- 229910052751 metal Inorganic materials 0.000 description 32
- 229910044991 metal oxide Inorganic materials 0.000 description 29
- 150000004706 metal oxides Chemical class 0.000 description 29
- 238000010438 heat treatment Methods 0.000 description 23
- 239000000203 mixture Substances 0.000 description 18
- 239000000126 substance Substances 0.000 description 18
- 239000002184 metal Substances 0.000 description 17
- 238000000926 separation method Methods 0.000 description 15
- 206010021143 Hypoxia Diseases 0.000 description 13
- 230000003071 parasitic effect Effects 0.000 description 13
- 230000007423 decrease Effects 0.000 description 12
- 230000006870 function Effects 0.000 description 12
- 239000010936 titanium Substances 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 9
- 229910052721 tungsten Inorganic materials 0.000 description 9
- 239000010937 tungsten Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 8
- 150000002736 metal compounds Chemical class 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- 238000000441 X-ray spectroscopy Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
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Abstract
【解決手段】実施形態の半導体装置は、第1の領域と、第2の領域と、第1の領域と第2の領域との間の第3の領域と、を有する第1の酸化物半導体層と、ゲート電極と、第3の領域とゲート電極との間に設けられたゲート絶縁層と、第1の領域に電気的に接続された第1の電極と、第2の領域に電気的に接続された第2の電極と、第1の領域と第1の電極との間、及び、第2の領域と第2の電極との間の少なくとも一方に設けられ、インジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が45%以下である第2の酸化物半導体層と、を備える。
【選択図】図1
Description
第1の実施形態の半導体装置は、第1の領域と、第2の領域と、第1の領域と第2の領域との間の第3の領域と、を有する第1の酸化物半導体層と、ゲート電極と、第3の領域とゲート電極との間に設けられたゲート絶縁層と、第1の領域に電気的に接続された第1の電極と、第2の領域に電気的に接続された第2の電極と、第1の領域と第1の電極との間、及び、第2の領域と第2の電極との間の少なくとも一方に設けられ、インジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が45%以下である第2の酸化物半導体層と、を備える。
第2の実施形態の半導体装置は、第1の酸化物半導体層はインジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が70%以下である点で、第1の実施形態の半導体装置と異なる。以下、第1の実施形態と重複する内容については、一部記述を省略する。
第3の実施形態の半導体装置は、ゲート電極が第1の酸化物半導体層の上側に位置する点で、第1の実施形態の半導体装置と異なる。以下、第1の実施形態と重複する内容については、一部記述を省略する。
第4の実施形態の半導体装置は、ゲート電極が、第1の酸化物半導体層を囲む点で、第1の実施形態の半導体装置と異なっている。以下、第1の実施形態と重複する内容については、一部記述を省略する。
第5の実施形態の半導体記憶装置は、第1の方向に延びる第1の配線と、第1の方向と交差する第2の方向に延びる第2の配線と、メモリセルと、を備え、メモリセルは、第1の配線に電気的に接続された第1の領域と、第2の領域と、第1の領域と第2の領域との間の第3の領域と、を有する第1の酸化物半導体層と、第1の酸化物半導体層を囲み、第2の配線に電気的に接続されたゲート電極と、第1の酸化物半導体層とゲート電極との間に設けられたゲート絶縁層と、第2の領域に電気的に接続されたキャパシタと、第1の領域と第1の配線との間、及び、第2の領域とキャパシタとの間の少なくとも一方に設けられ、インジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が45%以下である第2の酸化物半導体層と、を有する。メモリセルが、第4の実施形態の半導体装置の第2の領域に電気的に接続されたキャパシタを備える。以下、第1ないし第4の実施形態と重複する内容については一部記述を省略する。
第6の実施形態の半導体装置は、第1の酸化物半導体層と、導電層と、第1の酸化物半導体層と導電層との間に設けられ、インジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が45%以下である第2の酸化物半導体層と、を備える。第6の実施形態の半導体装置は、第1の酸化物半導体層と導電層との間に第2の酸化物半導体層を設ける点で、第1の実施形態と異なっている。以下、第1の実施形態と重複する内容については、一部記述を省略する。
10a 第1の領域
10b 第2の領域
10c 第3の領域
12 ゲート電極
14 ゲート絶縁層
16 ソース電極(第1の電極)
18 ドレイン電極(第2の電極)
20 第2の酸化物半導体層
22 第3の酸化物半導体層
42 コンタクトプラグ(導電層)
100 トランジスタ(半導体装置)
200 トランジスタ(半導体装置)
201 キャパシタ
300 トランジスタ(半導体装置)
400 半導体メモリ(半導体記憶装置)
BLx ビット線(第1の配線)
MC1 第1のメモリセル(メモリセル)
WLx ワード線(第2の配線)
Claims (19)
- 第1の領域と、第2の領域と、前記第1の領域と前記第2の領域との間の第3の領域と、を有する第1の酸化物半導体層と、
ゲート電極と、
前記第3の領域と前記ゲート電極との間に設けられたゲート絶縁層と、
前記第1の領域に電気的に接続された第1の電極と、
前記第2の領域に電気的に接続された第2の電極と、
前記第1の領域と前記第1の電極との間、及び、前記第2の領域と前記第2の電極との間の少なくとも一方に設けられ、インジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が45%以下である第2の酸化物半導体層と、
を備える半導体装置。 - 前記第1の領域と前記第1の電極との間、及び、前記第2の領域と前記第2の電極との間の他方に設けられ、インジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が45%以下である第3の酸化物半導体層を、更に備える請求項1記載の半導体装置。
- 前記第1の酸化物半導体層は、インジウム(In)、ガリウム(Ga)、及び、亜鉛(Zn)を含む請求項1又は請求項2記載の半導体装置。
- 前記第1の酸化物半導体層はインジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が70%以下である請求項1又は請求項2記載の半導体装置。
- 前記ゲート電極は、前記第1の酸化物半導体層を囲む請求項1ないし請求項4いずれか一項記載の半導体装置。
- 前記第2の酸化物半導体層のインジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が35%以上である請求項1ないし請求項5いずれか一項記載の半導体装置。
- 前記第1の領域、及び、前記第2の領域はn型半導体である請求項1ないし請求項6いずれか一項記載の半導体装置。
- 前記第2の酸化物半導体層が前記第1の領域と前記第1の電極との間に設けられた場合、前記ゲート電極と前記第1の電極との間の距離が30nm以上であり、
前記第2の酸化物半導体層が前記第2の領域と前記第2の電極との間に設けられた場合、前記ゲート電極と前記第2の電極との間の距離が30nm以上である請求項1ないし請求項7いずれか一項記載の半導体装置。 - 第1の方向に延びる第1の配線と、
前記第1の方向と交差する第2の方向に延びる第2の配線と、
メモリセルと、を備え、
前記メモリセルは、
前記第1の配線に電気的に接続された第1の領域と、第2の領域と、前記第1の領域と前記第2の領域との間の第3の領域と、を有する第1の酸化物半導体層と、
前記第1の酸化物半導体層を囲み、前記第2の配線に電気的に接続されたゲート電極と、
前記第1の酸化物半導体層と前記ゲート電極との間に設けられたゲート絶縁層と、
前記第2の領域に電気的に接続されたキャパシタと、
前記第1の領域と前記第1の配線との間、及び、前記第2の領域と前記キャパシタとの間の少なくとも一方に設けられ、インジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が45%以下である第2の酸化物半導体層と、を有する半導体記憶装置。 - 前記第1の領域と前記第1の配線との間、及び、前記第2の領域と前記キャパシタとの間の他方に設けられ、インジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が45%以下である第3の酸化物半導体層を、更に備える請求項9記載の半導体記憶装置。
- 前記第1の酸化物半導体層は、インジウム(In)、ガリウム(Ga)、及び、亜鉛(Zn)を含む請求項9又は請求項10記載の半導体記憶装置。
- 前記第1の酸化物半導体層はインジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が70%以下である請求項9又は請求項10記載の半導体記憶装置。
- 前記第2の酸化物半導体層のインジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が35%以上である請求項9ないし請求項12いずれか一項記載の半導体記憶装置。
- 前記第1の領域、及び、前記第2の領域はn型半導体である請求項9ないし請求項13いずれか一項記載の半導体記憶装置。
- 前記第2の酸化物半導体層が前記第1の領域と前記第1の配線との間に設けられた場合、前記ゲート電極と前記第1の配線との間の距離が30nm以上である請求項9ないし請求項14いずれか一項記載の半導体記憶装置。
- 第1の酸化物半導体層と、
導電層と、
前記第1の酸化物半導体層と前記導電層との間に設けられ、インジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が45%以下である第2の酸化物半導体層と、
を備える半導体装置。 - 前記第1の酸化物半導体層は、インジウム(In)、ガリウム(Ga)、及び、亜鉛(Zn)を含む請求項16記載の半導体記憶装置。
- 前記第1の酸化物半導体層はインジウム(In)、アルミニウム(Al)、及び、亜鉛(Zn)を含み、インジウム、アルミニウム、及び、亜鉛の総和に対するアルミニウムの原子比が8%以上23%以下であり、インジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が70%以下である請求項16記載の半導体記憶装置。
- 前記第2の酸化物半導体層のインジウム、アルミニウム、及び、亜鉛の総和に対するインジウムの原子比が35%以上である請求項16ないし請求項18いずれか一項記載の半導体記憶装置。
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