JP2021089249A - 流量センサ - Google Patents
流量センサ Download PDFInfo
- Publication number
- JP2021089249A JP2021089249A JP2019220952A JP2019220952A JP2021089249A JP 2021089249 A JP2021089249 A JP 2021089249A JP 2019220952 A JP2019220952 A JP 2019220952A JP 2019220952 A JP2019220952 A JP 2019220952A JP 2021089249 A JP2021089249 A JP 2021089249A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- resistance element
- conductive portion
- heat conductive
- rate detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 67
- 239000000758 substrate Substances 0.000 claims abstract description 49
- 230000000149 penetrating effect Effects 0.000 claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims description 11
- 239000012530 fluid Substances 0.000 abstract description 10
- 239000010410 layer Substances 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 19
- 239000002184 metal Substances 0.000 description 19
- 239000011241 protective layer Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 230000004043 responsiveness Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
Landscapes
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
Description
下記に、上記実施の形態における特徴点を整理する。
2 :絶縁基板
2a :流量検知面
2b :裏面
3 :流量検知用抵抗素子
4 :温度補償用抵抗素子
5 :第1の熱伝導部
6 :第2の熱伝導部
7 :絶縁層
8 :配線引出部
9a〜9d :配線パターン
10a〜10d :ランド
11a、11b :金属部
12a〜12d :金属延出部
13 :導通部
16 :セラミック基板
17 :抵抗層
18 :端子
19 :半田層
20 :保護層
26、27 :抵抗器
28 :ブリッジ回路
29 :第1の直列回路
30 :第2の直列回路
31、32 :出力部
33 :差動増幅器
34 :フィードバック回路
A〜D :風向
Claims (4)
- 絶縁基板と、
前記絶縁基板の厚み方向に貫く第1の熱伝導部と、
前記第1の熱伝導部の流量検知面とは反対側に配置される流量検知用抵抗素子と、
前記流量検知用抵抗素子と同じ面側に配置される温度補償用抵抗素子と、
を有することを特徴とする流量センサ。 - 前記第1の熱伝導部は、平面視円形状であること特徴とする請求項1に記載の流量センサ。
- 更に、前記第1の熱伝導部の外側に、前記第1の熱伝導部から略等距離、離れた位置に、前記絶縁基板を厚み方向に貫くリング状の第2の熱伝導部を有し、前記第2の熱伝導部の前記流量検知面とは反対側に、前記温度補償用抵抗素子が配置されることを特とする請求項1又は請求項2に記載の流量センサ。
- 前記流量検知用抵抗素子は、セラミック基板と、前記セラミック基板の表面に設けられた抵抗層と、前記抵抗層と電気的に接続し、前記セラミック基板の表面に設けられた端子と、を有して構成されており、前記端子は、前記第1の熱伝導部の前記流量検知面とは反対側に形成されたランドに電気的に接続されていることを特徴とする請求項1から請求項3のいずれかに記載の流量センサ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019220952A JP7341595B2 (ja) | 2019-12-06 | 2019-12-06 | 流量センサ |
PCT/JP2020/043867 WO2021111952A1 (ja) | 2019-12-06 | 2020-11-25 | 流量センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019220952A JP7341595B2 (ja) | 2019-12-06 | 2019-12-06 | 流量センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021089249A true JP2021089249A (ja) | 2021-06-10 |
JP7341595B2 JP7341595B2 (ja) | 2023-09-11 |
Family
ID=76220018
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019220952A Active JP7341595B2 (ja) | 2019-12-06 | 2019-12-06 | 流量センサ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP7341595B2 (ja) |
WO (1) | WO2021111952A1 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63201530A (ja) * | 1987-02-17 | 1988-08-19 | Sharp Corp | フロ−センサ |
JP2013003068A (ja) * | 2011-06-21 | 2013-01-07 | Panasonic Corp | 流量センサ |
US20170097252A1 (en) * | 2015-10-05 | 2017-04-06 | Wisenstech Ltd. | Composite mems flow sensor on silicon-on-insulator device and method of making the same |
JP2018054528A (ja) * | 2016-09-30 | 2018-04-05 | ミツミ電機株式会社 | 流向流速測定装置 |
WO2018105753A2 (ja) * | 2017-05-08 | 2018-06-14 | 株式会社村田製作所 | センサ基板、風速測定装置および風量測定装置 |
-
2019
- 2019-12-06 JP JP2019220952A patent/JP7341595B2/ja active Active
-
2020
- 2020-11-25 WO PCT/JP2020/043867 patent/WO2021111952A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63201530A (ja) * | 1987-02-17 | 1988-08-19 | Sharp Corp | フロ−センサ |
JP2013003068A (ja) * | 2011-06-21 | 2013-01-07 | Panasonic Corp | 流量センサ |
US20170097252A1 (en) * | 2015-10-05 | 2017-04-06 | Wisenstech Ltd. | Composite mems flow sensor on silicon-on-insulator device and method of making the same |
JP2018054528A (ja) * | 2016-09-30 | 2018-04-05 | ミツミ電機株式会社 | 流向流速測定装置 |
WO2018105753A2 (ja) * | 2017-05-08 | 2018-06-14 | 株式会社村田製作所 | センサ基板、風速測定装置および風量測定装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2021111952A1 (ja) | 2021-06-10 |
JP7341595B2 (ja) | 2023-09-11 |
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