JP7426170B2 - 流量センサ素子 - Google Patents
流量センサ素子 Download PDFInfo
- Publication number
- JP7426170B2 JP7426170B2 JP2020113910A JP2020113910A JP7426170B2 JP 7426170 B2 JP7426170 B2 JP 7426170B2 JP 2020113910 A JP2020113910 A JP 2020113910A JP 2020113910 A JP2020113910 A JP 2020113910A JP 7426170 B2 JP7426170 B2 JP 7426170B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- flow rate
- sensor element
- sensitive film
- film pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000009966 trimming Methods 0.000 claims description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 7
- 230000001681 protective effect Effects 0.000 description 5
- 239000012530 fluid Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Measuring Volume Flow (AREA)
Description
2 :基体
2a :左側端部
2b :右側端部
3 :感温膜パターン
3a :始端
3b :終端
4 :第1配線部
5 :第2配線部
6 :トリミングライン
7、8 :電極
9 :貫通孔
10 :保護膜
11 :ステー
14 :温度補償用抵抗素子
26、27 :抵抗器
28 :ブリッジ回路
29 :第1の直列回路
30 :第2の直列回路
31、32 :出力部
33 :差動増幅器
34 :フィードバック回路
Claims (3)
- 球状の基体と、
前記基体の表面全体に形成された、温度変化により電気抵抗値が変化する感温膜パターンと、を具備し、
前記感温膜パターンの両端部には、第1配線部と第2配線部が夫々接続されており、前記第1配線部は、前記基体に形成された貫通孔を通って、前記第2配線部と同方向に引き出されており、
前記第1配線部は、前記感温膜パターンの端部と、前記貫通孔の一方の開口を埋める電極を介して接続固定されている、ことを特徴とする流量センサ素子。 - 前記感温膜パターンは、前記基体の表面に形成された感温膜がトリミングされて形成されていることを特徴とする請求項1に記載の流量センサ素子。
- 前記感温膜パターンは、スパイラルパターンで形成されることを特徴とする請求項1又は請求項2に記載の流量センサ素子。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020113910A JP7426170B2 (ja) | 2020-07-01 | 2020-07-01 | 流量センサ素子 |
PCT/JP2021/022792 WO2022004373A1 (ja) | 2020-07-01 | 2021-06-16 | 流量センサ素子 |
DE112021003533.9T DE112021003533T5 (de) | 2020-07-01 | 2021-06-16 | Strömungssensorelement |
US18/013,705 US20230296418A1 (en) | 2020-07-01 | 2021-06-16 | Flow sensor element |
CN202180047300.3A CN115769084A (zh) | 2020-07-01 | 2021-06-16 | 流量传感器元件 |
TW110123737A TW202206817A (zh) | 2020-07-01 | 2021-06-29 | 流量感測元件 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020113910A JP7426170B2 (ja) | 2020-07-01 | 2020-07-01 | 流量センサ素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022012232A JP2022012232A (ja) | 2022-01-17 |
JP7426170B2 true JP7426170B2 (ja) | 2024-02-01 |
Family
ID=79316099
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020113910A Active JP7426170B2 (ja) | 2020-07-01 | 2020-07-01 | 流量センサ素子 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20230296418A1 (ja) |
JP (1) | JP7426170B2 (ja) |
CN (1) | CN115769084A (ja) |
DE (1) | DE112021003533T5 (ja) |
TW (1) | TW202206817A (ja) |
WO (1) | WO2022004373A1 (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120137765A1 (en) | 2010-12-01 | 2012-06-07 | Hannes Wagner | Sensor Device for Measuring a Direction of Incident Flow and Evaluation Device Therefor |
US20180045751A1 (en) | 2015-02-25 | 2018-02-15 | Dublin Institute Of Technology | A multi-directional fluid velocity measurement device (fvmd) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61133866A (ja) * | 1984-12-03 | 1986-06-21 | Toyota Central Res & Dev Lab Inc | 流動状態検出センサ |
JPH0697233B2 (ja) * | 1987-02-26 | 1994-11-30 | 日本科学工業株式会社 | 流速センサ及びそれを用いた流速測定装置 |
JPH10281839A (ja) * | 1997-03-31 | 1998-10-23 | Ngk Spark Plug Co Ltd | 熱式流速センサ及びこれを用いたセンサシステム |
JP2020003354A (ja) | 2018-06-28 | 2020-01-09 | 株式会社Soken | 感温構造体および風状態計測装置 |
JP7059836B2 (ja) | 2018-07-05 | 2022-04-26 | 株式会社Soken | 風状態検出装置 |
JP7275588B2 (ja) | 2019-01-15 | 2023-05-18 | 日本ケミコン株式会社 | 電子部品、電子部品の製造方法およびノイズ処理方法 |
-
2020
- 2020-07-01 JP JP2020113910A patent/JP7426170B2/ja active Active
-
2021
- 2021-06-16 WO PCT/JP2021/022792 patent/WO2022004373A1/ja active Application Filing
- 2021-06-16 US US18/013,705 patent/US20230296418A1/en active Pending
- 2021-06-16 CN CN202180047300.3A patent/CN115769084A/zh active Pending
- 2021-06-16 DE DE112021003533.9T patent/DE112021003533T5/de active Pending
- 2021-06-29 TW TW110123737A patent/TW202206817A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120137765A1 (en) | 2010-12-01 | 2012-06-07 | Hannes Wagner | Sensor Device for Measuring a Direction of Incident Flow and Evaluation Device Therefor |
US20180045751A1 (en) | 2015-02-25 | 2018-02-15 | Dublin Institute Of Technology | A multi-directional fluid velocity measurement device (fvmd) |
Also Published As
Publication number | Publication date |
---|---|
CN115769084A (zh) | 2023-03-07 |
WO2022004373A1 (ja) | 2022-01-06 |
JP2022012232A (ja) | 2022-01-17 |
DE112021003533T5 (de) | 2023-04-20 |
US20230296418A1 (en) | 2023-09-21 |
TW202206817A (zh) | 2022-02-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5055349B2 (ja) | 熱式ガスセンサ | |
JP6825821B2 (ja) | 流量センサ | |
JP6706871B2 (ja) | 流量センサ | |
US9400197B2 (en) | Fluid flow sensor | |
KR100408199B1 (ko) | 열식 유량센서 | |
US5465618A (en) | Thermal flow sensor and heat-sensitive resistor therefor | |
JP7426170B2 (ja) | 流量センサ素子 | |
JP5079723B2 (ja) | 湿度センサ | |
TWI825722B (zh) | 感測元件 | |
US10655992B2 (en) | Anemometer | |
JP5029509B2 (ja) | 流量センサ | |
JP4080581B2 (ja) | 流量センサー | |
JP2013210356A (ja) | 温度測定装置 | |
JP7341595B2 (ja) | 流量センサ | |
JP2022012231A (ja) | 流量センサ素子 | |
JP2000046608A (ja) | 流量センサー | |
JP7445371B2 (ja) | センサ装置 | |
US20240011811A1 (en) | Sensor device | |
JP2001004422A (ja) | 流体識別機能を有する流量センサー | |
JPH07270441A (ja) | 風速センサ | |
JP2568766B2 (ja) | 質量流量センサ | |
JP2000329599A (ja) | 熱式流速計 | |
JPH07270442A (ja) | 風速センサ | |
JP2021183953A (ja) | 流量センサ装置 | |
RU1795307C (ru) | Электронный термометр |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230522 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20231026 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20231031 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20231215 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240109 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240117 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7426170 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |