JP2021086859A - 基板支持装置、熱処理装置、基板支持方法、熱処理方法 - Google Patents
基板支持装置、熱処理装置、基板支持方法、熱処理方法 Download PDFInfo
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Abstract
Description
以下、本実施の形態に関する基板支持装置、熱処理装置、基板支持方法、熱処理方法について説明する。
図1は、本実施の形態に関する熱処理装置100の構成の例を概略的に示す平面図である。また、図2は、本実施の形態に関する熱処理装置100の構成の例を概略的に示す正面図である。
次に、熱処理装置100における半導体ウエハWの処理手順について説明する。図12は、半導体ウエハWの処理手順を示すフローチャートである。以下に説明する熱処理装置100の処理手順は、制御部3が熱処理装置100の各動作機構を制御することにより進行する。
フラッシュ光が照射されるフラッシュランプアニールによって、フラッシュ光が照射される半導体ウエハWの上面の温度は短時間で上昇するため、半導体ウエハWの上面には急激な熱膨張が生じる。そして、当該熱膨張に起因して、半導体ウエハWの上面が凸形状となるように半導体ウエハWが湾曲する。
次に、図16、図17、図18および図19を参照しつつ、式(9)に従うrpinの場合と、他のrpinの場合とで、基板支持ピン77に支持された半導体ウエハWが熱処理によって湾曲し基板支持ピン77から跳ねた(ジャンプした)場合の高さを比較する。
次に、以上に記載された実施の形態によって生じる効果の例を示す。なお、以下の説明においては、以上に記載された実施の形態に例が示された具体的な構成に基づいて当該効果が記載されるが、同様の効果が生じる範囲で、本願明細書に例が示される他の具体的な構成と置き換えられてもよい。
以上に記載された実施の形態では、それぞれの構成要素の材質、材料、寸法、形状、相対的配置関係または実施の条件などについても記載する場合があるが、これらはすべての局面においてひとつの例であって、本願明細書に記載されたものに限られることはないものとする。
4 ハロゲン加熱部
5 フラッシュ加熱部
6 チャンバー
7 保持部
10 移載機構
11 移載アーム
12 リフトピン
13 水平移動機構
14 昇降機構
20 下部放射温度計
21,26 透明窓
22,27 温度測定ユニット
24,29 赤外線センサー
25 上部放射温度計
31 温度算定部
33 表示部
34 入力部
41,51 筐体
43,52 リフレクタ
53 ランプ光放射窓
61 チャンバー側部
61a,61b,79 貫通孔
62 凹部
63 上側チャンバー窓
64 下側チャンバー窓
65 熱処理空間
66 搬送開口部
68,69 反射リング
71 基台リング
72 連結部
74 サセプタ
75 保持プレート
75a 保持面
76 ガイドリング
77 基板支持ピン
78 開口部
81 ガス供給孔
82,87 緩衝空間
83 ガス供給管
84,89,192 バルブ
85 処理ガス供給源
86 ガス排気孔
88,191 ガス排気管
100 熱処理装置
101 インデクサ部
110 ロードポート
120 受渡ロボット
120R,120S,150R 矢印
121 ハンド
130,140 冷却部
131 第1クールチャンバー
141 第2クールチャンバー
150 搬送ロボット
151a,151b 搬送ハンド
160 熱処理部
170 搬送チャンバー
181,182,183,184,185 ゲートバルブ
190 排気部
230 アライメント部
231 アライメントチャンバー
Claims (7)
- フラッシュ光の照射で加熱されることによって湾曲可能な基板に、対向するための保持プレートと、
前記保持プレートに設けられ、かつ、前記基板を支持するための複数の基板支持ピンとを備え、
複数の前記基板支持ピンは、前記保持プレートと湾曲していない状態の前記基板との間の空間の体積と、前記保持プレートと湾曲している状態の前記基板との間の空間の体積とが等しくなる位置に配置される、
基板支持装置。 - 請求項1に記載の基板支持装置であり、
前記基板支持ピンが、平面視において環状に配置される、
基板支持装置。 - 請求項1または2に記載の基板支持装置であり、
前記基板は、平面視において円形である、
基板支持装置。 - 請求項1から4のうちのいずれか1つに記載の基板支持装置と、
前記基板に前記フラッシュ光を照射するためのフラッシュランプとを備える、
熱処理装置。 - フラッシュ光の照射で加熱されることによって湾曲可能な基板に、前記基板を支持する複数の基板支持ピンが設けられる保持プレートを対向させる工程と、
複数の前記基板支持ピンを、前記保持プレートと湾曲していない状態の前記基板との間の空間の体積と、前記保持プレートと湾曲している状態の前記基板との間の空間の体積とが等しくなる位置に配置させる工程とを備える、
基板支持方法。 - 請求項6に記載の基板支持方法によって支持された前記基板に、フラッシュランプを用いて前記フラッシュ光を照射する工程を備える、
熱処理方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019212552A JP7336369B2 (ja) | 2019-11-25 | 2019-11-25 | 基板支持装置、熱処理装置、基板支持方法、熱処理方法 |
US17/079,895 US11694920B2 (en) | 2019-11-25 | 2020-10-26 | Substrate support device, thermal processing apparatus, substrate support method, and thermal processing method |
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CN202011329254.XA CN112838029A (zh) | 2019-11-25 | 2020-11-24 | 基板支撑装置、热处理装置、基板支撑方法、热处理方法 |
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JP7370763B2 (ja) * | 2019-08-22 | 2023-10-30 | 株式会社Screenホールディングス | 熱処理方法および熱処理装置 |
US11764101B2 (en) * | 2019-10-24 | 2023-09-19 | ASM IP Holding, B.V. | Susceptor for semiconductor substrate processing |
JP7336369B2 (ja) * | 2019-11-25 | 2023-08-31 | 株式会社Screenホールディングス | 基板支持装置、熱処理装置、基板支持方法、熱処理方法 |
JP7249989B2 (ja) * | 2020-12-16 | 2023-03-31 | 日本電子株式会社 | 荷電粒子線装置 |
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