JP2021085788A - 評価装置、評価方法 - Google Patents

評価装置、評価方法 Download PDF

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Publication number
JP2021085788A
JP2021085788A JP2019215775A JP2019215775A JP2021085788A JP 2021085788 A JP2021085788 A JP 2021085788A JP 2019215775 A JP2019215775 A JP 2019215775A JP 2019215775 A JP2019215775 A JP 2019215775A JP 2021085788 A JP2021085788 A JP 2021085788A
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JP
Japan
Prior art keywords
evaluation
image
light
evaluation device
region
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Pending
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JP2019215775A
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English (en)
Japanese (ja)
Inventor
隆之 後藤
Takayuki Goto
隆之 後藤
拓郎 曽根
Takuro Sone
拓郎 曽根
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Ricoh Co Ltd
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Ricoh Co Ltd
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Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP2019215775A priority Critical patent/JP2021085788A/ja
Priority to CN202011345264.2A priority patent/CN112964720A/zh
Publication of JP2021085788A publication Critical patent/JP2021085788A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10004—Still image; Photographic image

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Signal Processing (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2019215775A 2019-11-28 2019-11-28 評価装置、評価方法 Pending JP2021085788A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2019215775A JP2021085788A (ja) 2019-11-28 2019-11-28 評価装置、評価方法
CN202011345264.2A CN112964720A (zh) 2019-11-28 2020-11-26 评价装置、评价方法、存储介质以及计算机装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019215775A JP2021085788A (ja) 2019-11-28 2019-11-28 評価装置、評価方法

Publications (1)

Publication Number Publication Date
JP2021085788A true JP2021085788A (ja) 2021-06-03

Family

ID=76087528

Family Applications (1)

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JP2019215775A Pending JP2021085788A (ja) 2019-11-28 2019-11-28 評価装置、評価方法

Country Status (2)

Country Link
JP (1) JP2021085788A (zh)
CN (1) CN112964720A (zh)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4784555B2 (ja) * 2007-05-25 2011-10-05 トヨタ自動車株式会社 形状評価方法、形状評価装置および三次元検査装置
JP2009036747A (ja) * 2007-07-06 2009-02-19 Toray Ind Inc 回路パターンの欠陥検査装置および欠陥検査方法
JP4416827B1 (ja) * 2008-09-10 2010-02-17 シャープ株式会社 評価装置、校正方法、校正プログラム、及び、記録媒体
CN102356628B (zh) * 2009-12-08 2015-03-11 松下电器产业株式会社 图像处理装置及图像处理方法
JP6213662B2 (ja) * 2014-03-07 2017-10-18 新日鐵住金株式会社 表面性状指標化装置、表面性状指標化方法及びプログラム
JP2017083414A (ja) * 2015-10-30 2017-05-18 株式会社東芝 欠陥検出装置及び欠陥検出方法
JP6880825B2 (ja) * 2016-04-27 2021-06-02 日本製鉄株式会社 板パネルの外観の定量評価方法、装置およびプログラム
JP2019003081A (ja) * 2017-06-16 2019-01-10 マクセル株式会社 光源装置およびヘッドアップディスプレイ装置

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Publication number Publication date
CN112964720A (zh) 2021-06-15

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