JP2021070837A - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
- Publication number
- JP2021070837A JP2021070837A JP2019196642A JP2019196642A JP2021070837A JP 2021070837 A JP2021070837 A JP 2021070837A JP 2019196642 A JP2019196642 A JP 2019196642A JP 2019196642 A JP2019196642 A JP 2019196642A JP 2021070837 A JP2021070837 A JP 2021070837A
- Authority
- JP
- Japan
- Prior art keywords
- base material
- protective member
- film
- film forming
- roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008021 deposition Effects 0.000 title abstract description 7
- 239000010408 film Substances 0.000 claims abstract description 232
- 230000001681 protective effect Effects 0.000 claims abstract description 149
- 239000010409 thin film Substances 0.000 claims abstract description 63
- 230000002441 reversible effect Effects 0.000 claims abstract 2
- 239000000463 material Substances 0.000 claims description 225
- 230000001070 adhesive effect Effects 0.000 claims description 20
- 239000000853 adhesive Substances 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 abstract description 15
- 239000000758 substrate Substances 0.000 abstract description 14
- 238000004026 adhesive bonding Methods 0.000 abstract 1
- 230000002542 deteriorative effect Effects 0.000 abstract 1
- 239000003292 glue Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 32
- 239000002994 raw material Substances 0.000 description 24
- 230000004888 barrier function Effects 0.000 description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 230000002093 peripheral effect Effects 0.000 description 15
- 238000000034 method Methods 0.000 description 12
- 229910052681 coesite Inorganic materials 0.000 description 8
- 229910052906 cristobalite Inorganic materials 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 235000012239 silicon dioxide Nutrition 0.000 description 8
- 229910052682 stishovite Inorganic materials 0.000 description 8
- 229910052905 tridymite Inorganic materials 0.000 description 8
- 239000010410 layer Substances 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 6
- 238000011144 upstream manufacturing Methods 0.000 description 6
- 238000004804 winding Methods 0.000 description 6
- 238000005192 partition Methods 0.000 description 4
- 239000002985 plastic film Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 238000001764 infiltration Methods 0.000 description 3
- 230000008595 infiltration Effects 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 229920006255 plastic film Polymers 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 229920002457 flexible plastic Polymers 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000004050 hot filament vapor deposition Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 230000001141 propulsive effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H18/00—Winding webs
- B65H18/08—Web-winding mechanisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H20/00—Advancing webs
- B65H20/02—Advancing webs by friction roller
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H37/00—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
- B65H37/04—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations for securing together articles or webs, e.g. by adhesive, stitching or stapling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H41/00—Machines for separating superposed webs
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Textile Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Winding Of Webs (AREA)
- Advancing Webs (AREA)
- Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Abstract
Description
2 基材
3 束保持ロール
4 束保持ロール
5 メインロール
6 メインロールチャンバ
7 成膜チャンバ
7a 成膜チャンバ
7b 成膜チャンバ
8 案内ロール(案内部材)
8a 膜形成面側ロール
8b 背面側ロール
9a 保護部材貼り合わせ部
9b 保護部材剥離部
31 芯部
41 芯部
51 外周面
61 間仕切り部
71 真空ポンプ
72 プラズマ電極
73 原料ガス供給部
74 電極カバー
91 束保持ロール
92 束保持ロール
95 案内ロール
100 成膜装置
101 基材
102 成膜チャンバ
103 メインロール
104 案内ロール
104a 膜形成面側ロール
104b 背面側ロール
B 保護部材
B1 強粘着部
B2 弱粘着部
M 薄膜
S 隙間
Claims (7)
- ロールトゥロールで搬送される基材の膜形成面側に薄膜を形成させる成膜チャンバと、
基材の膜形成面側もしくはその反対側と接触して基材の搬送方向を案内することにより基材の搬送経路を形成する案内部材と、
基材の搬送経路における前記成膜チャンバより下流側に位置して基材の膜形成面側と最初に接触する前記案内部材と前記成膜チャンバとの間に設けられ、可撓性を有する保護部材を基材の膜形成面側に貼り合わせる保護部材貼り合わせ部と、
を備えることを特徴とする、成膜装置。 - 前記保護部材の基材と対向する側の面は、基材の幅方向において基材の両端部に対向する部分の粘着力がこれらの間の部分の粘着力より高いことを特徴とする、請求項1に記載の成膜装置。
- 前記保護部材は、基材の幅方向において基材の一部のみと対向することを特徴とする、請求項1に記載の成膜装置。
- 基材の搬送方向は反転可能であり、前記保護部材貼り合わせ部は前記成膜チャンバをはさんで基材の搬送経路の両側に設けられていることを特徴とする、請求項1から3のいずれかに記載の成膜装置。
- 前記保護部材が基材に貼り合わせられたまま、基材が巻き取られることを特徴とする、請求項1から4のいずれかに記載の成膜装置。
- 基材が巻き取られる前に前記保護部材を基材から剥離させる保護部材剥離部をさらに有することを特徴とする、請求項1から4のいずれかに記載の成膜装置。
- 前記保護部材剥離部にて剥離した前記保護部材は前記保護部材貼り合わせ部へ送られ、保護部材の循環経路が形成されていることを特徴とする、請求項6に記載の成膜装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019196642A JP7291606B2 (ja) | 2019-10-29 | 2019-10-29 | 成膜装置 |
PCT/JP2020/033591 WO2021084911A1 (ja) | 2019-10-29 | 2020-09-04 | 成膜装置 |
CN202080075134.3A CN114630925B (zh) | 2019-10-29 | 2020-09-04 | 成膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019196642A JP7291606B2 (ja) | 2019-10-29 | 2019-10-29 | 成膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021070837A true JP2021070837A (ja) | 2021-05-06 |
JP7291606B2 JP7291606B2 (ja) | 2023-06-15 |
Family
ID=75712611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2019196642A Active JP7291606B2 (ja) | 2019-10-29 | 2019-10-29 | 成膜装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7291606B2 (ja) |
CN (1) | CN114630925B (ja) |
WO (1) | WO2021084911A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05329981A (ja) * | 1992-06-04 | 1993-12-14 | Furukawa Saakitsuto Foil Kk | 保護フィルム付き片面粗化処理銅箔 |
JP2006043965A (ja) * | 2004-08-02 | 2006-02-16 | Canon Anelva Corp | 巻取式表面処理装置および表面処理方法 |
JP2012057131A (ja) * | 2010-09-13 | 2012-03-22 | Fujifilm Corp | 機能性フィルムの製造方法 |
JP2016010889A (ja) * | 2014-06-27 | 2016-01-21 | 富士フイルム株式会社 | ガスバリアフィルムおよび機能性フィルムの製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012052170A (ja) * | 2010-08-31 | 2012-03-15 | Fujifilm Corp | 機能性フィルムの製造方法 |
EP3363874A1 (de) * | 2017-02-20 | 2018-08-22 | Amc Ag | Abdeckmaterial für grossflächiges abkleben mit unterschiedlich stark klebenden bereichen |
-
2019
- 2019-10-29 JP JP2019196642A patent/JP7291606B2/ja active Active
-
2020
- 2020-09-04 WO PCT/JP2020/033591 patent/WO2021084911A1/ja active Application Filing
- 2020-09-04 CN CN202080075134.3A patent/CN114630925B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05329981A (ja) * | 1992-06-04 | 1993-12-14 | Furukawa Saakitsuto Foil Kk | 保護フィルム付き片面粗化処理銅箔 |
JP2006043965A (ja) * | 2004-08-02 | 2006-02-16 | Canon Anelva Corp | 巻取式表面処理装置および表面処理方法 |
JP2012057131A (ja) * | 2010-09-13 | 2012-03-22 | Fujifilm Corp | 機能性フィルムの製造方法 |
JP2016010889A (ja) * | 2014-06-27 | 2016-01-21 | 富士フイルム株式会社 | ガスバリアフィルムおよび機能性フィルムの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN114630925A (zh) | 2022-06-14 |
CN114630925B (zh) | 2024-03-08 |
WO2021084911A1 (ja) | 2021-05-06 |
JP7291606B2 (ja) | 2023-06-15 |
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