JP2021063472A - 真空ポンプ装置 - Google Patents
真空ポンプ装置 Download PDFInfo
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- JP2021063472A JP2021063472A JP2019188807A JP2019188807A JP2021063472A JP 2021063472 A JP2021063472 A JP 2021063472A JP 2019188807 A JP2019188807 A JP 2019188807A JP 2019188807 A JP2019188807 A JP 2019188807A JP 2021063472 A JP2021063472 A JP 2021063472A
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- Prior art keywords
- side cover
- heat insulating
- vacuum pump
- rotor chamber
- pump device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000009413 insulation Methods 0.000 abstract description 8
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 46
- 238000001816 cooling Methods 0.000 description 32
- 125000006850 spacer group Chemical group 0.000 description 22
- 238000000034 method Methods 0.000 description 19
- 239000000463 material Substances 0.000 description 14
- 239000006227 byproduct Substances 0.000 description 9
- 239000000110 cooling liquid Substances 0.000 description 7
- 229910001018 Cast iron Inorganic materials 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000002826 coolant Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910001566 austenite Inorganic materials 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/0085—Prime movers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/30—Casings or housings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
- F04C2240/402—Plurality of electronically synchronised motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/60—Shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/10—Stators
- F05B2240/14—Casings, housings, nacelles, gondels or the like, protecting or supporting assemblies there within
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/20—Rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/60—Shafts
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
一態様では、前記サイドカバーは、その内部に空間を有する中空構造を有しており、前記断熱体は、前記サイドカバーの前記空間内に存在する気体層を含む。
一態様では、前記断熱体は、前記サイドカバー内に配置された断熱部材を含む。
一態様では、前記サイドカバーは、前記ロータ室の端面を形成する内側サイドカバーと、前記軸方向において前記内側サイドカバーの外側に位置する外側サイドカバーを有し、前記断熱部材は、前記内側サイドカバーと前記外側サイドカバーとの間に挟まれている。
一態様では、前記断熱部材の断面積は、前記サイドカバーの断面積よりも小さい。
一態様では、前記サイドカバー内に配置されたサイドヒータをさらに備えている。
図1は、真空ポンプ装置の一実施形態を示す断面図である。以下に説明する実施形態の真空ポンプ装置は、容積式真空ポンプ装置である。特に、図1に示す真空ポンプ装置は、気体の流路内にオイルを使用しない、いわゆるドライ真空ポンプ装置である。ドライ真空ポンプ装置は、気化したオイルが上流側に流れることがないので、高い清浄度が必要とされる半導体デバイスの製造装置に好適に使用することができる。
2 ポンプケーシング
2a 吸気口
2b 排気口
5 ポンプロータ
7 回転軸
8 電動機
8A モータロータ
8B モータステータ
10A,10B サイドカバー
12 軸受ハウジング
14 モータハウジング
16 ギヤハウジング
17 軸受
18 軸受
20 ギヤ
21 冷却管
22 冷却管
25A,25B 断熱構造体
27 通孔
29A,29B 気体層
31A,31B 内側サイドカバー
32A,32B 外側サイドカバー
33 窪み
34 空間
35 シール
41A,41B 断熱部材(断熱プレート)
42A,42B 断熱部材(断熱スペーサ)
45 通孔
47 窪み
50 ヒータ
55A,55B サイドヒータ
56 溝
Claims (7)
- ロータ室を内部に有するポンプケーシングと、
前記ロータ室内に配置されたポンプロータと、
前記ポンプロータが固定された回転軸と、
前記回転軸に連結された電動機と、
前記ロータ室の端面を形成するサイドカバーと、
前記回転軸の軸方向において、前記サイドカバーの外側に位置するハウジング構造体と、
前記ポンプケーシングと前記ハウジング構造体との間に位置する断熱体を備えている、真空ポンプ装置。 - 前記断熱体は、前記サイドカバーと前記ハウジング構造体との間に挟まれた断熱構造体を含む、請求項1に記載の真空ポンプ装置。
- 前記サイドカバーは、その内部に空間を有する中空構造を有しており、
前記断熱体は、前記サイドカバーの前記空間内に存在する気体層を含む、請求項1または2に記載の真空ポンプ装置。 - 前記断熱体は、前記サイドカバー内に配置された断熱部材を含む、請求項1または2に記載の真空ポンプ装置。
- 前記サイドカバーは、前記ロータ室の端面を形成する内側サイドカバーと、前記軸方向において前記内側サイドカバーの外側に位置する外側サイドカバーを有し、
前記断熱部材は、前記内側サイドカバーと前記外側サイドカバーとの間に挟まれている、請求項4に記載の真空ポンプ装置。 - 前記断熱部材の断面積は、前記サイドカバーの断面積よりも小さい、請求項5に記載の真空ポンプ装置。
- 前記サイドカバー内に配置されたサイドヒータをさらに備えている、請求項1乃至6のいずれか一項に記載の真空ポンプ装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019188807A JP7261139B2 (ja) | 2019-10-15 | 2019-10-15 | 真空ポンプ装置 |
EP20201640.8A EP3808982A1 (en) | 2019-10-15 | 2020-10-13 | Vacuum pump with thermal insulation |
TW109135334A TWI845777B (zh) | 2019-10-15 | 2020-10-13 | 真空泵裝置 |
KR1020200132867A KR20210045321A (ko) | 2019-10-15 | 2020-10-14 | 진공 펌프 장치 |
CN202011095756.0A CN112664453A (zh) | 2019-10-15 | 2020-10-14 | 真空泵装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019188807A JP7261139B2 (ja) | 2019-10-15 | 2019-10-15 | 真空ポンプ装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2021063472A true JP2021063472A (ja) | 2021-04-22 |
JP2021063472A5 JP2021063472A5 (ja) | 2022-03-30 |
JP7261139B2 JP7261139B2 (ja) | 2023-04-19 |
Family
ID=74561661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019188807A Active JP7261139B2 (ja) | 2019-10-15 | 2019-10-15 | 真空ポンプ装置 |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP3808982A1 (ja) |
JP (1) | JP7261139B2 (ja) |
KR (1) | KR20210045321A (ja) |
CN (1) | CN112664453A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2606224B (en) * | 2021-04-30 | 2024-01-31 | Edwards Ltd | Stator for a vacuum pump |
EP4269749A1 (de) * | 2022-04-25 | 2023-11-01 | Gerard Sterz | Drehkolbenmaschine und ihre verwendung |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0717978U (ja) * | 1993-08-27 | 1995-03-31 | 株式会社島津製作所 | ドライ真空ポンプ |
WO2003098047A1 (fr) * | 2002-05-20 | 2003-11-27 | Ts Corporation | Pompe a vide |
JP2004293434A (ja) * | 2003-03-27 | 2004-10-21 | Aisin Seiki Co Ltd | ドライポンプ |
JP2007262906A (ja) * | 2006-03-27 | 2007-10-11 | Nabtesco Corp | 2段式真空ポンプ |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4017365B2 (ja) | 2001-07-19 | 2007-12-05 | 株式会社荏原製作所 | ドライ真空ポンプ |
JP2005105829A (ja) * | 2003-09-26 | 2005-04-21 | Aisin Seiki Co Ltd | ドライポンプ |
JP2009092042A (ja) * | 2007-10-11 | 2009-04-30 | Nabtesco Corp | 回転ロータ式ポンプの軸受保護機構 |
TWI491804B (zh) * | 2010-04-19 | 2015-07-11 | Ebara Corp | 乾真空泵裝置及該乾真空泵裝置之冷卻方法 |
JP5793004B2 (ja) * | 2011-06-02 | 2015-10-14 | 株式会社荏原製作所 | 真空ポンプ |
KR101712962B1 (ko) * | 2015-09-24 | 2017-03-07 | 이인철 | 냉각장치를 갖춘 진공펌프 |
GB2563595B (en) * | 2017-06-19 | 2020-04-15 | Edwards Ltd | Twin-shaft pumps |
-
2019
- 2019-10-15 JP JP2019188807A patent/JP7261139B2/ja active Active
-
2020
- 2020-10-13 EP EP20201640.8A patent/EP3808982A1/en active Pending
- 2020-10-14 KR KR1020200132867A patent/KR20210045321A/ko active Search and Examination
- 2020-10-14 CN CN202011095756.0A patent/CN112664453A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0717978U (ja) * | 1993-08-27 | 1995-03-31 | 株式会社島津製作所 | ドライ真空ポンプ |
WO2003098047A1 (fr) * | 2002-05-20 | 2003-11-27 | Ts Corporation | Pompe a vide |
JP2004293434A (ja) * | 2003-03-27 | 2004-10-21 | Aisin Seiki Co Ltd | ドライポンプ |
JP2007262906A (ja) * | 2006-03-27 | 2007-10-11 | Nabtesco Corp | 2段式真空ポンプ |
Also Published As
Publication number | Publication date |
---|---|
EP3808982A1 (en) | 2021-04-21 |
TW202129153A (zh) | 2021-08-01 |
JP7261139B2 (ja) | 2023-04-19 |
CN112664453A (zh) | 2021-04-16 |
KR20210045321A (ko) | 2021-04-26 |
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