JP2021054632A5 - - Google Patents

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Publication number
JP2021054632A5
JP2021054632A5 JP2019181870A JP2019181870A JP2021054632A5 JP 2021054632 A5 JP2021054632 A5 JP 2021054632A5 JP 2019181870 A JP2019181870 A JP 2019181870A JP 2019181870 A JP2019181870 A JP 2019181870A JP 2021054632 A5 JP2021054632 A5 JP 2021054632A5
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JP
Japan
Prior art keywords
data set
substrate
transport
abnormality
transfer
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JP2019181870A
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English (en)
Japanese (ja)
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JP7319162B2 (ja
JP2021054632A (ja
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Priority claimed from JP2019181870A external-priority patent/JP7319162B2/ja
Priority to JP2019181870A priority Critical patent/JP7319162B2/ja
Priority to US17/765,374 priority patent/US12084288B2/en
Priority to CN202080069453.3A priority patent/CN114503247A/zh
Priority to KR1020227014040A priority patent/KR20220074905A/ko
Priority to PCT/JP2020/035501 priority patent/WO2021065576A1/ja
Priority to TW109133007A priority patent/TWI880957B/zh
Publication of JP2021054632A publication Critical patent/JP2021054632A/ja
Publication of JP2021054632A5 publication Critical patent/JP2021054632A5/ja
Publication of JP7319162B2 publication Critical patent/JP7319162B2/ja
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JP2019181870A 2019-10-02 2019-10-02 搬送異常予測システム Active JP7319162B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2019181870A JP7319162B2 (ja) 2019-10-02 2019-10-02 搬送異常予測システム
PCT/JP2020/035501 WO2021065576A1 (ja) 2019-10-02 2020-09-18 搬送異常予測システム
CN202080069453.3A CN114503247A (zh) 2019-10-02 2020-09-18 搬送异常预测系统
KR1020227014040A KR20220074905A (ko) 2019-10-02 2020-09-18 반송 이상 예측 시스템
US17/765,374 US12084288B2 (en) 2019-10-02 2020-09-18 Conveyance abnormality prediction system
TW109133007A TWI880957B (zh) 2019-10-02 2020-09-24 搬送異常預測系統及搬送異常預測方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019181870A JP7319162B2 (ja) 2019-10-02 2019-10-02 搬送異常予測システム

Publications (3)

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JP2021054632A JP2021054632A (ja) 2021-04-08
JP2021054632A5 true JP2021054632A5 (enExample) 2022-08-08
JP7319162B2 JP7319162B2 (ja) 2023-08-01

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Family Applications (1)

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JP2019181870A Active JP7319162B2 (ja) 2019-10-02 2019-10-02 搬送異常予測システム

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US (1) US12084288B2 (enExample)
JP (1) JP7319162B2 (enExample)
KR (1) KR20220074905A (enExample)
CN (1) CN114503247A (enExample)
TW (1) TWI880957B (enExample)
WO (1) WO2021065576A1 (enExample)

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JP7246256B2 (ja) * 2019-05-29 2023-03-27 東京エレクトロン株式会社 搬送方法及び搬送システム
US12227847B2 (en) * 2021-03-31 2025-02-18 Applied Materials, Inc. Level monitoring and active adjustment of a substrate support assembly
JP7166395B1 (ja) 2021-06-23 2022-11-07 セイコーソリューションズ株式会社 監視システム、監視方法、及び監視プログラム
JP7501547B2 (ja) * 2021-06-30 2024-06-18 株式会社デンソー 設備状態監視システム
JP2024153954A (ja) * 2021-07-08 2024-10-30 株式会社Preferred Networks データ処理装置およびプログラム
JP2023023394A (ja) * 2021-08-05 2023-02-16 株式会社荏原製作所 基板支持装置、洗浄装置、基板の回転速度を算出する装置ならびに方法、および機械学習装置
JP7288486B2 (ja) * 2021-09-17 2023-06-07 株式会社Kokusai Electric 基板処理方法、基板処理装置、半導体装置の製造方法、及びプログラム
KR102709677B1 (ko) * 2021-11-26 2024-09-26 울랄라랩 주식회사 비전센서 기반의 컨베이어 장치에 대한 예지보전 장치 및 방법
CN114655655B (zh) * 2022-03-09 2024-07-26 南京北路软件技术有限公司 一种基于UNet网络的传送带跑偏检测方法
TWI804405B (zh) * 2022-08-04 2023-06-01 友達光電股份有限公司 振動偵測方法及振動偵測裝置
CN117302897B (zh) * 2023-11-23 2024-01-26 常州市传动输送机械有限公司 一种带式输送机智能监测防控方法及系统
KR102768348B1 (ko) * 2024-04-25 2025-02-19 슈어데이터랩 주식회사 머신러닝 기반의 냉동공조기용 고장 예측 시스템 및 이를 이용한 방법

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JP2000191136A (ja) * 1998-12-25 2000-07-11 Dainippon Screen Mfg Co Ltd 基板処理装置およびその保守方法
TW469483B (en) * 1999-04-19 2001-12-21 Applied Materials Inc Method and apparatus for aligning a cassette
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