JP2021044547A - 反応物質気化システムのための加熱ゾーン分離 - Google Patents
反応物質気化システムのための加熱ゾーン分離 Download PDFInfo
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Abstract
Description
本出願とともに提出された出願データシートにおいて外国または国内における優先権主張が特定される任意のおよび全ての出願は、37 CFR 1.57の下で参照により本明細書に組み込まれる。
典型的な固体または液体の原料反応物質送達システムは、一つまたは複数の発熱体および/または冷却体を備えるシステム内に配置される。容器は、気化される化学反応物質を含むことができる。キャリアガスは、反応物質蒸気をキャリアガスと共に容器の出口を通って、最終的に反応チャンバーに運ぶ。
前述の明細書では、その特定の実施形態を参照して本発明を説明した。しかし、本発明の広い趣旨および範囲から逸脱することなく、様々な修正および変更がそれになされうることは明らかであろう。したがって、明細書と図面は、制限的な意味ではなく、例示的な意味でみなされるべきである。
Claims (20)
- 温度ゾーン制御システムであって、
少なくとも部分的に排気されるように構成される反応物質原料キャビネットと、
固体原料化学反応物質をその中に保持するよう構成される容器ベースであって、前記反応物質原料キャビネット内に配置されるように構成される、容器ベースと、
前記容器ベースの遠位部に連結するリッドであって、一つまたは複数のリッドバルブを備える、リッドと、
ガス源から前記容器へガスを送達するように構成される複数のガスパネルバルブと、
前記一つまたは複数のリッドバルブを加熱するように構成される第1の発熱体と、
熱シールドであって、その第1の部分は、前記一つまたは複数のリッドバルブと前記容器ベースとの間に配置され、その第2の部分は、前記第1の発熱体と前記複数のガスパネルバルブとの間に配置され、前記熱シールドは、前記リッドバルブから前記容器ベースへの熱伝達を妨げるように構成される、熱シールドと、を備えるシステム。 - 前記容器ベースの近位部と熱連通する冷却体をさらに含み、前記容器ベースの前記近位部を優先的に冷却するように構成され、それにより、前記容器ベースの近位部から遠位部への温度勾配を確立する、請求項1に記載のシステム。
- 前記熱シールドの前記第1の部分は第1のプレートを備え、前記熱シールドの前記第2の部分は第2のプレートを備え、前記第1のプレートは前記第2のプレートに対してある角度で配置される、請求項1に記載のシステム。
- 第1のパネルは前記一つまたは複数のリッドバルブと前記容器ベースとの間に配置され、前記第2のプレートは前記容器ベースの軸とほぼ平行に配置される、請求項3に記載のシステム。
- 第2の発熱体をさらに備え、前記第2の発熱体は第2のプレートが前記一つまたは複数のリッドバルブと前記複数のガスパネルバルブとの間に配置されるように配置される、請求項1に記載のシステム。
- 前記第1の発熱体から前記一つまたは複数のリッドバルブへの熱伝達率の、前記第1の発熱体から前記容器ベースへの熱伝達率に対する比が約5より大きいように、前記熱シールドは前記容器ベースへの熱伝達を妨げるように構成される、請求項1に記載のシステム。
- 前記熱シールドの部分が、前記一つまたは複数のリッドバルブと前記リッドの少なくとも一部との間に配置されるように構成される、請求項1に記載のシステム。
- 前記第1の発熱体は、前記容器ベースを第1の閾値温度よりも低い第2の閾値温度より上に上昇させることなく、前記一つまたは複数のリッドバルブを前記第1の閾値温度より上に維持するように構成される、請求項1に記載のシステム。
- 前記第1の発熱体と連結する冷却体は、前記容器ベースを第1の閾値温度よりも低い第2の閾値温度より上に上昇させることなく、前記一つまたは複数のリッドバルブを前記第1の閾値温度より上に維持する、請求項1に記載のシステム。
- 前記一つまたは複数のリッドバルブのそれぞれは、それを通る微粒子状物質の通過を妨げるように構成されるそれぞれのフィルターを備える、請求項1に記載のシステム。
- 前記複数のフィルターのうちの少なくとも一つの空隙率は、閾値温度未満で反応物質がそこを通過するのを妨げ、閾値温度超で反応物質がそこを通過することを可能にするように構成される、請求項10に記載のシステム。
- 反応物質原料キャビネット内の熱伝達を制御する方法であって、前記方法は、
容器のリッドの入口を通して容器ベース内にキャリアガスを連続的に流すことと、
前記反応物質原料キャビネットの発熱体から前記リッドの前記入口に熱を伝達することであって、前記入口と前記容器ベースとの間に配置される第1の部分を備える熱シールドは、発熱体から容器ベースへの熱の伝達を妨げ、前記入口は前記容器ベースより高い温度に維持される、伝達することと、
前記容器ベース内のキャリアガス中の化学前駆体を気化させることと、
前記気化させた化学反応物質を前記リッドの出口を通して反応チャンバーに流すことと、を含む、方法。 - 前記反応物質原料は、前記キャリアガスを前記容器に流すように構成される複数のガスパネルバルブをさらに含み、前記方法は、前記複数のガスパネルバルブを加熱することをさらに含み、(i)第2の発熱体と複数のガスパネルバルブとを備える第1のゾーンと(ii)前記入口と出口とを備える第2のゾーンとの間に配置される前記熱シールドの第2の部分は、第2の発熱体から前記リッドの前記入口および出口への熱伝達を妨げる、請求項12に記載の方法。
- 水冷を使用して容器ベースの一部を冷却することをさらに含む、請求項12に記載の方法。
- 前記発熱体から前記容器ベースへの前記熱伝達を妨げることは、(a)第1の発熱体から前記入口への熱伝達率の(b)前記第1の発熱体から前記容器ベースへの熱伝達率に対する比が4より大きいことを含む、請求項12に記載の方法。
- 前記発熱体から前記容器ベースへの前記熱伝達を妨げることは、前記容器ベースを第1の閾値温度よりも低い第2の閾値温度よりも上に上昇させることなく、前記リッドを前記第1の閾値温度より上に維持することを含む、請求項12に記載の方法。
- 第1の閾値温度の第2の閾値温度に対する比は、少なくとも約1.15である、請求項12に記載の方法。
- 前記入口、前記出口、または両方を通過する微粒子状物質を濾過することをさらに含む、請求項12に記載の方法。
- 前記微粒子状物質を濾過することは、閾値温度未満で反応物質がそこを通過するのを妨げ、閾値温度超で前記反応物質がそこを通過することを可能にすることを含む、請求項18に記載の方法。
- 前記反応物質原料キャビネットを少なくとも部分的に排気することをさらに含む、請求項19に記載の方法。
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