JP2021038745A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2021038745A5 JP2021038745A5 JP2020085580A JP2020085580A JP2021038745A5 JP 2021038745 A5 JP2021038745 A5 JP 2021038745A5 JP 2020085580 A JP2020085580 A JP 2020085580A JP 2020085580 A JP2020085580 A JP 2020085580A JP 2021038745 A5 JP2021038745 A5 JP 2021038745A5
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vacuum
- board
- gas barrier
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims description 52
- 238000005086 pumping Methods 0.000 claims description 37
- 239000003566 sealing material Substances 0.000 claims description 27
- 238000007789 sealing Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 210000003027 Ear, Inner Anatomy 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 129
- 239000000463 material Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 14
- 239000002826 coolant Substances 0.000 description 11
- 238000002347 injection Methods 0.000 description 11
- 239000007924 injection Substances 0.000 description 11
- 238000005096 rolling process Methods 0.000 description 8
- 231100000078 corrosive Toxicity 0.000 description 7
- 231100001010 corrosive Toxicity 0.000 description 7
- 239000012212 insulator Substances 0.000 description 6
- 238000003801 milling Methods 0.000 description 6
- 230000001681 protective Effects 0.000 description 6
- 230000001808 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 238000005219 brazing Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive Effects 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000008393 encapsulating agent Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 210000001736 Capillaries Anatomy 0.000 description 1
- 230000037250 Clearance Effects 0.000 description 1
- 210000001503 Joints Anatomy 0.000 description 1
- 210000003932 Urinary Bladder Anatomy 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000035512 clearance Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000875 corresponding Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000004059 degradation Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 230000001771 impaired Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral Effects 0.000 description 1
- 230000000750 progressive Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001568 sexual Effects 0.000 description 1
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19194646.6A EP3626971B1 (fr) | 2019-08-30 | 2019-08-30 | Pompe à vide |
EP19194646 | 2019-08-30 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2021038745A JP2021038745A (ja) | 2021-03-11 |
JP2021038745A5 true JP2021038745A5 (fr) | 2021-11-04 |
JP7092825B2 JP7092825B2 (ja) | 2022-06-28 |
Family
ID=67810495
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020085580A Active JP7092825B2 (ja) | 2019-08-30 | 2020-05-15 | 真空ポンプ |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP3626971B1 (fr) |
JP (1) | JP7092825B2 (fr) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006016405A1 (de) * | 2006-04-07 | 2007-10-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Antriebsgerät |
DE202007012070U1 (de) * | 2007-08-30 | 2009-01-08 | Oerlikon Leybold Vacuum Gmbh | Stromdurchführung einer Vakuumpumpe |
JP2014011120A (ja) * | 2012-07-02 | 2014-01-20 | Shimadzu Corp | 電気フィードスルー、真空ポンプおよびプリント基板 |
JP6758865B2 (ja) * | 2016-03-04 | 2020-09-23 | エドワーズ株式会社 | 真空ポンプ |
EP3431769B1 (fr) * | 2017-07-21 | 2022-05-04 | Pfeiffer Vacuum Gmbh | Pompe à vide |
-
2019
- 2019-08-30 EP EP19194646.6A patent/EP3626971B1/fr active Active
-
2020
- 2020-05-15 JP JP2020085580A patent/JP7092825B2/ja active Active
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8757987B2 (en) | Vacuum pump for differentially pumping multiple chambers | |
CN105283672B (zh) | 用于离心式压缩机的振动隔离安装件 | |
CN103206385B (zh) | 湿式涡轮机 | |
KR20030017466A (ko) | 라디얼 터보송풍기 | |
US20140363319A1 (en) | Rotary vane vacuum pump | |
US10364895B2 (en) | Shaft seal assembly | |
US7160081B2 (en) | Vacuum pump | |
US20180163732A1 (en) | Vacuum pump | |
WO2015079550A1 (fr) | Machine rotative équipée d'un dispositif d'étanchéité d'arbre | |
WO2016087303A1 (fr) | Unité de moteur-compresseur à paliers magnétiques | |
JP2021038745A5 (fr) | ||
US20210172530A1 (en) | Shaft Seal Assembly | |
JP6655133B2 (ja) | 真空ポンプ | |
JP7092825B2 (ja) | 真空ポンプ | |
JP6807971B2 (ja) | 真空装置 | |
JPS614890A (ja) | 回転ポンプ | |
JP2020133628A5 (fr) | ||
JP6479127B2 (ja) | 真空ポンプ | |
US20120027583A1 (en) | Vacuum pump | |
JP6552579B2 (ja) | 真空ポンプ | |
EP2273130A1 (fr) | Boîtier de compresseur de gaz et système comportant le boîtier | |
JP7221891B2 (ja) | 真空システム及びこのような真空システムを製造するための方法 | |
US7186027B2 (en) | Fan motor with fluid dynamic bearing | |
JP5261663B2 (ja) | 潤滑剤シール式回転翼形油回転真空ポンプ | |
JP2021092219A (ja) | 真空ポンプ |