JP2021038745A5 - - Google Patents

Description

Vacuum pump

The present invention is a vacuum pump comprising a vacuum chamber that is separated from the pressure chamber to the vacuum-tight by a board, in particular a turbo molecular pump, a method for producing a及beauty vacuum pump.

In the prior art, a vacuum pump having a glass feedthrough with an insulated brazing junction for conducting a signal from a vacuum chamber to a pressure chamber is known. However, when there are many signals to be conducted, the board is much cheaper than vacuum feedthrough. Are also known in the same vacuum pump having such a board, not be used in the case of pumping corrosive gases. This is because corrosive process gases can damage the board. Thus, as it is important in the semiconductor industry if example embodiment, this type of application must be used expensive glass feedthrough than having brazed portions.

Starting from this prior art, an object of the present invention is to provide a vacuum pump that is economically viable and can be used more flexibly.

According to the present invention, this object is achieved by the method for manufacturing a vacuum pump having the features of the vacuum pump及beauty claim 13 having the features of claim 1.

The vacuum pump according to the present invention, particularly a turbo molecular pump, comprises a vacuum chamber defined by a pump housing and a board, the pump housing has a connection opening, and the connection opening is vacuum-tightly closed by the board. It has been, thereby, the board separates the vacuum chamber from the pressure chamber, in front of the board in the vacuum side, the gas barrier is provided which is separated from the board.

The present invention is based on the general idea of isolating process gas from the board. According to its advantages, the corrosive process gas, which without damaging the board in contact with the board, cut with Ponpin grayed. As a result, the vacuum pump according to the present invention has more flexible usability. In the vacuum pump according to the present invention, the board can also be used as a vacuum feedthrough when pumping a corrosive process gas, which is a simpler and cheaper means than a glass feedthrough having a brazing joint. Therefore, the vacuum pump according to the present invention can be manufactured more economically.

The gas barrier is at least substantially airtight, at least substantially, prevents the passage of pumped gas. The gas barrier is arranged in the vacuum chamber of the vacuum pump so that the process gas is isolated from the board. Optionally board及beauty for electrical connection coupling part of the board so as not impaired by the barrier, gas barrier, board及Beauty / or not in contact directly with the connecting joint. Furthermore, according to its advantages, the board及beauty connection coupling part, even if the gas barrier is present, maintenance, since changes及beauty / or is accessible for servicing, the board if example embodiment with easily replaced Wear.

While the vacuum generated by the at least one pump stage in the vacuum chamber may be present in the operating state of the vacuum pump, the board, as the vacuum feedthrough, a vacuum chamber is separated from the pressure chamber if example embodiment the atmospheric pressure may act .. Leakage rate of the board as a vacuum feedthrough, kills at least substantially ignored.

Advantageous configurations of the invention, the dependent claims, it is clear from the description及beauty drawings.

According to one embodiment, the gas barrier of the vacuum pump comprises a sealing material. Sealing material is preferably, optionally and in any geometry with components which are enclosed therein, it kills in use to carry out the casting at least a portion of the vacuum chamber. Encapsulation material as a gas barrier is a part of the vacuum chamber or vacuum chamber, without the use of additional sealing means and cut by Hama charging at least approximately airtight.

Formation of gas barrier, line e Ru in various forms depending on the material. For example, a sealing material, in a state of fluidity, the vacuum chamber can flow into the area provided to accommodate the gas barrier, where the sealing material is cured subsequent thereto. A gas barrier formed by another form, cut into the vacuum chamber of the vacuum pump introduced at each appropriate form. For example, the gas barrier of the vacuum pump may have a self-expanding material properties. Further, gas barrier, as a solid, by introducing a part of the vacuum chamber, where it is cut at a Rise Zhang. In this case, the solid has a shape memory characteristic, and a pressure Chijimika ability to introduce into the vacuum chamber, thereby not only allows its own passive expansion after the auxiliary means also uses an auxiliary agent, thereby, Ru row to give a forced expansion.

Preferably, the vacuum pump has at least one connecting conductor, which extends through the gas barrier and is connected to the board, especially on the side of the board facing the gas barrier. The other end of the electrical connection conductors, a vacuum pump motor, since the actuator system及beauty / or may be connected to the sensor system, a signal, through a gas barrier, the board and the vacuum pump motor, the actuator system及beauty / or kill the transmission heat transfer between the sensor system.

Preferably, the connection between the connecting conductor and the board is a plug-in connection. This is cheaper, especially when there are a large number of connecting conductors, and at the same time is more comfortable to handle than brazing joints. Furthermore, plug connections, the assembly of the vacuum pump, repair及beauty / or advantageous with respect to maintenance. This is because the plug-in connection can be broken and reconnected without being destroyed. Alternatively, the connecting conductors can be irreversibly attached to the board, in particular the connecting conductors can be braided.

Connection conductor is in the region of the gas barrier, at least in part, on the particular end region of the gas barrier, may have at least substantially gas-tight jacket. In particular, the connection conductors are partially along its periphery, the insulator of the connecting conductor or may be surrounded by a material that prevents the entry of gas into the interior of the connecting conductors. Thus, through the gas barrier, is optionally also the surface of the connection conductor or inner insulator connecting conductor kills with more effectively deter gas exchange through the outer. As the coating material, if example embodiment is particularly suitable shrink tubing or other sealing means having an inner adhesive. Shrink tubing or another sealing means, in particular in the end region of the gas barrier, i.e. a gas in the vacuum chamber, the board-side or in contact directly with the pumping area side areas, and optionally present therein are in contact with each other, it kills in use in the area of the gas barrier.

Gas barrier, according to one embodiment, be arranged in a first pump portion of the pump, and the pump, not in contact with the second pump portion for viewing the constant pumping region of the vacuum chamber. In particular, the gas barrier does not come into contact with a portion of the pump housing of the second pump portion according to the present embodiment. In this case, pump parts, in particular, are coupled to each other in a vacuum pump assembled, are examples Ebaneji stop may be a separate component of the vacuum pump. The first pump section can be a pump under partial In example embodiment, the second pump section can be a pump on the portion. Pumping area of the vacuum chamber is one of a vacuum pump or may include a plurality of pump stages, also the vacuum pump motor, the actuator system及beauty / or may include a sensor system at least partially.

Gas barrier is, without contacting the second pump section and are arranged only in the first pump section, this is, on the one hand, the introduction of gas barrier easy to assembling及vacuum pump on the other beauty / or decomposition, thus the maintenance of the pump, change及beauty / or Ru can easily repair. Because easy to exchange-separate handling and failed structure group of pump parts because Ru line e.

According to one embodiment, the gas barrier is located in a channel that is formed in the pump housing and communicates with the vacuum chamber. In particular, the channel is Ru may extend from the connecting opening of the vacuum pump through the pump housing to the pumping area. Channels, which additionally against gas barrier, the motor, the actuator system及beauty / or also one for connecting the board to the sensor system may be sized to cut a plurality of connecting conductors in yield capacity. Channel may have a dimension that continuity also allows the connection conductors of the connectors for connection to the board. In particular, the channel may have a diagonal dimension of the largest board-enabled connector that is required can be conducting width.

Channel, or bent may be have a curved region, the region is filled with a gas barrier. Such channel arrangement structure, gas barrier board及beauty / or advantageous to isolate from the connection coupling part. Channel region or curved bent, while the gas barrier is the regions or curved filling only bent region, the channel or the vacuum chamber, while the area adjacent to the gas barrier is released from the gas barrier material by that there, kill is for work to siphon-like. For example, channels have been filled to a certain level by the gas barrier, perforated in this case, the channel, the V-shaped or U-shaped portion which remains gas barrier before及beauty / or the region of the later is released You can do it . In particular, when the sealing material is used, for injection of the working operation, the pump portion including the channel, also the sealing material is bent into a siphon shape reaches only curved regions, the channel is a gas barrier around the entire periphery until it filled by, cut with oriented injection direction. After the encapsulant has hardened, a pump portion having a gas barrier is, kills an optionally Positioning the operating state of the pump.

According to one embodiment, the bent region of the channel has at least two intersecting perforated portion, particularly bag-shaped hole及beauty / or the milling unit is formed on at least a portion of the pump. In this way, wear in the form formed easily pump portion a bent channel. Various perforations, blind hole及Beauty / or milling unit may also from the same surface of the pump section starting from different surfaces, in this case, the resulting channel is adjacent to the pressure chamber connected Ru may extend towards the pumping area of the vacuum pump through the opening. Additional perforations, blind hole及Beauty / or milling unit, so cut with suitably Tip the extension of the channel, the connection conductor及beauty / or kills at yield volumes of connector channel. Alternatively or additionally, channel, angle members or if example embodiment kills in forming the form by the introduction of separate components by other elements.

The bent region of the channel can be bent multiple times in a labyrinth. In particular, when the through is assumed, it is necessary to drastically change multiple times direction, channels, Ru can extend as such. In this case, the direction if example embodiment, may be perpendicular to each other, in this case, it is also possible another angle within the framework of structural circumstances. Thus, the channel is again also partially obtained also in trough-shaped is formed in a siphon-like, thereby, continuity of the connection conductors to the pumping region of the vacuum pump from the board becomes possible, and channel or by gas barrier care of the channel portion dense filling is possible.

Bent region of the channel, the surface of the pump housing may be image fixed by the angle member which is fixed to the pump housing. In particular, the angle member can be a separate component attached to the pump housing and has at least two portions whose surfaces extend at an angle to each other. In particular, the surface is wear right angle shape formed with each other, a different angle is also possible.

For example, open channels can be placed in the pump housing, this channel is separate component, in particular by mounting the angle member is modified into channels having a bent geometry. To accommodate the curved surface of the angle member, additionally against open channel, another perforations, blind hole及Beauty / or may be arranged millings within the pump housing. Thus, preferably, cut with use a more compact channel. For only the dimensions of the open channel need to be large enough to accommodate the connector of the connecting conductor in some cases, while the bent region of the channel is only the connecting conductor itself. This is because it is sufficient to accommodate the connector, and it is not necessary to accommodate the connector. Open channel further because it provides easy access to all of the edges are formed in the channel at the time of manufacture, easily deburring及beauty / or the edges Ru lines give a rounding. Thus, preferably, the connecting conductor also wear damage of the insulator of the connecting conductor in avoidance.

Preferably, a seal element is arranged between the angle member and the pump housing. Sealing element, the O-ring also if example embodiment may be a sealing strip. Thus, a bent channel, so cut with seal in the region of separately mounted angle members, especially when using a sealing material as a gas barrier, the outflow of the sealing material during injection is prevented. Sealing element, cut with omitted when or to use a sealing material having a high viscosity when using another kind of gas barrier.

The vacuum region, the space volume remaining between the gas barrier and the board, at least approximately In example embodiment, both the pumping region及beauty pressure chamber of the vacuum chamber, not could be connected to direct gas, therefore, the following Also called dead space. Accordingly, adjacent to the dead space, the vacuum chamber, the pressure differential between the pumping area adjacent thereto while being separated by a gas barrier, and及Beauty / or dead spaces, while being separated by the board pressure difference between the pressure chamber to the pumping region of the dead space and the vacuum chamber及beauty / or never be brought direct pressure fit between the pressure chamber. Optionally, between the pump area and the dead space of the vacuum chamber, or can be identified based on the leak rate between the pressure chamber and dead space, the leakage gas flow remaining, slowly progressive pressure conformance is may result, however this pressure fit, in the case of low leakage rate, for several hours or if example embodiment but also several months may be done elapses.

According to one embodiment, the area of the vacuum pump defined by the gas barrier and the board is connected to a secondary gas source.

Preferably, secondary gas source, eg if the seal gas, the protective gas, the inert gas also provides a vent gas, thereby, a dead space, the predetermined atmosphere having no corrosive components formed Will be done. Such a protective gas atmosphere, even if it should have a leakage rate to the extent that the gas barrier can not be ignored, cut with effectively deter undesired gas diffusion toward the pumping region of the vacuum chamber to the dead space through the gas barrier.

In this case, the pressure in the dead space during operation of the vacuum pump may be adapted to the pressure in the pumping region of the vacuum chamber, in this case, if example embodiment, the gas is under higher pressure in the dead space, slowly vacuum Can diffuse into the pumping area of the chamber. When followed by a vacuum pump which is switched off, pumping region of the vacuum chamber is vented, if example embodiment, again gas, depending on the leak rate of the gas barrier, returning to the dead space from the pumping region of the vacuum chamber diffusion Can be. When the gas diffusing into the dead space still contains trace amounts of corrosive process gas, the corrosive process gas can cause damage to the board as a vacuum feedthrough. A protective gas atmosphere which is produced by the secondary gas source, kill such a situation by suitably thwart.

Without gas barrier, along the cable connection, a large amount of protective gas, in order to ensure adequate protection of the board, after the operation in及beauty operation of the vacuum pump, if flow in the direction of the pumping region of the vacuum chamber It doesn't become. When at least combined with the substantially gas-tight barrier, increases in consumption of protective gas for generating a predetermined atmosphere definitive in the dead space is an amount up to very small, negligible.

Secondary gas source may be connected to a dead space in a variety of forms, if example embodiment, the secondary gas source, or perforations towards the different gas inlets that already exists in the vacuum pump is covered the horizontal connection portion of the channel forms, and / or by horizontal connection portion toward the another area that can be insufflated with a secondary gas source, and / or a separate dead space to a secondary gas source Can be connected by the connection part of.

Another object of the present invention is a method of manufacturing a vacuum pump. In this manufacturing method, which provides a vacuum chamber及beauty board defined by the pump housing, is connected openings formed in the pump housing, the connection opening is closed in a vacuum-tight by a board, thereby, board, a vacuum chamber It is assumed that a gas barrier is formed in front of the board on the vacuum side, separated from the pressure chamber, and the gas barrier is separated from the board. With such vacuum pumps produced, cut with correspondingly achieving the advantages previously described.

According to one embodiment, the gas barrier in the pump housing, resulting channelized also bent with a curved region forming at least one obtained are laying connecting conductors, to or curved regions bent channel through the channel Can be formed, connecting conductors can be connected to the board, and the board can be vacuum tightly attached to the pump housing.

In this case, the channel, the one-piece by a pump housing, or the pump housing及beauty / or additional components, eg if the angle member may be formed on the multi-piece by what covering element or similar thereto.

Depending on the specific configuration of the channel及beauty another component, the order of method steps kill a change. When channels open the angle member is attached is used, if example embodiment, before the channel that is bent by assembling the angle member is formed, initially, disconnecting conductor through open channels laid set. Alternatively or a same goes true for additionally other method steps.

Hereinafter, the present invention will be described exemplarily based on a preferred embodiment with reference to the accompanying figures. Drawings, the scope of the description of the figures及beauty claims, discloses a large number of features are combined. Those skilled in the art would preferably consider these features individually and integrate them into another meaningful combination.

The perspective view of the turbo molecular pump is shown. The bottom view of the turbo molecular pump of FIG. 1 is shown. The cross-sectional view of the turbo molecular pump along the cutting line AA shown in FIG. 2 is shown. The cross-sectional view of the turbo molecular pump along the cutting line BB shown in FIG. 2 is shown. The cross-sectional view of the turbo molecular pump along the cutting line CC shown in FIG. 2 is shown. FIG. 6 shows a cross-sectional view of a lower portion of a pump having a bent channel, a gas barrier and a board as a vacuum feedthrough according to a first embodiment. The manufacturing schematic for forming the channel of FIG. 6 is shown. FIG. 6 shows a cross-sectional view of the bent channel of FIG. The cross-sectional view of the lower part of the pump of FIG. 6 in the injection direction is shown. FIG. 5 shows a cross-sectional view of a lower portion of a pump having a bent channel, a gas barrier and a board as a vacuum feedthrough according to a second embodiment. The manufacturing schematic for forming the channel of FIG. 8 is shown. FIG. 8 shows a cross-sectional view of the bent channel of FIG. The cross-sectional view of the lower part of the pump of FIG. 8 in the injection direction is shown. FIG. 3 shows a cross-sectional view of a lower portion of the pump having a bent channel with an angle member, a gas barrier and a board as a vacuum feedthrough, according to a third embodiment. Shows the angle members of the plan view及beauty view 10 of the pump lower part. FIG. 10 shows a schematic manufacturing diagram for forming the open channel of FIG. FIG. 10 shows a cross-sectional view of a bent channel to which the angle member of FIG. 10 is attached. The cross-sectional view of the lower part of the pump of FIG. 10 in the injection direction is shown. The cross-sectional view of the vacuum pump which has the pump lower part of 3rd Embodiment is shown.

The turbo molecular pump 111 shown in FIG. 1 has a pump inlet 115 surrounded by an inlet flange 113. The pump inlet 115, with means known per se, as possible de connect the vacuum container (not shown). Gas coming from the vacuum vessel is sucked from the vacuum container through the pump inlet 115, and kill the feed pressure to the pump outlet 117 through the pump. The pump outlet 117,予真air pump (eg if a rotary vane pump) can be connected.

The inlet flange 113 forms the upper end of the housing 119 of the vacuum pump 111 in the direction of the vacuum pump of FIG. The pump housing 119 has a lower portion 121. An electronics housing 123 is arranged on the side of the lower portion 121. The electronics housing 123, an electrical and / or electronic components of the vacuum pump 111 is housed. These components, if example embodiment is for operating the electric motor 125 disposed in the vacuum pump. The electronics housing 123 is provided with a plurality of connections 127 for accessories. Furthermore, the data interface 129 (which conforms to the example if RS485 standard)及beauty current supply connection 131 are arranged in the electronics housing 123.

The housing 119 of the turbo molecular pump 111 is provided with a ventilation inlet 133, particularly in the form of a ventilation valve. Via the vent inlet 133, Ru-line to give a vent to the vacuum pump 111. A seal gas connection portion 135 (also referred to as a purge gas connection portion) is further arranged in the region of the lower portion 121 of the pump. Through the sealing gas connection 135, purge gas, for protecting the electric motor 125 (see FIG. 3 For example) with respect to the gas pumped by the pump, Ru Write-enable der feed into motor chamber 137. In the motor chamber 137, the electric motor 125 is housed in the vacuum pump 111. Two additional coolant connecting portions 139 are arranged on the lower portion 121 of the pump. In this case, one coolant connection is provided as an inlet for the coolant and the other coolant connection is provided as an outlet. The coolant can be introduced into the vacuum pump for cooling purposes.

Lower surface 141 of the vacuum pump, since the cut with use as a base, the vacuum pump 111 is cut with operation in vertical at the lower surface 141. However, the vacuum pump 111, it is also possible to fix the vacuum vessel through the inlet flange 113, thereby, cut with operating in, so to speak suspended state. Further, the vacuum pump 111 may also be configured to cut in operation when it is oriented in a different form than the orientation shown in Figure 1. The lower surface 141 rather than downward, sideways, or it can also be realized form of a vacuum pump which is upwardly distribution置可capacity.

Various screws 143 are further arranged on the lower surface 141 shown in FIG. These screws secure the components of the vacuum pump, which are not specified here in detail, to each other. For example, bearing cover 145 is fixed to the bottom surface 141.

A fixing hole 147 is further arranged on the lower surface 141. Through the fixing hole 147, the pump 111, cut with fixed to the installation surface when e example.

2 to 5 show the coolant pipe 148. In this coolant pipe 148, coolant introduced or is derived via a coolant connection portion 139 can be circular.

As shown in the cross-sectional views of FIGS. 3-5, the vacuum pump has a plurality of process gas pump stages. These process gas pump stages are for pumping the process gas acting on the pump inlet 115 to the pump outlet 117.

A rotor 149 is arranged in the pump housing 119. The rotor 149 has a rotor shaft 153 that can rotate about the rotation axis 151.

The turbo molecular pump 111 has a plurality of turbo molecular pump stages connected in series with each other so as to exert a pumping action. These turbo molecular pump stages have a plurality of radial rotor disks 155 fixed to the rotor shaft 153 and a stator disk 157 arranged between the rotor disks 155 and fixed within the housing 119. In this case, one rotor disk 155 and one stator disk 157 adjacent thereto form one turbo molecular pump stage, respectively. The stator discs 157 are held by spacer rings 159 at desired axial spacing from each other.

The vacuum pumps also have Holbeck pump stages that are arranged in and out of each other in the radial direction and connected in series with each other to exert a pumping action. The rotor of the Holbeck pump stage has a rotor hub 161 located on the rotor shaft 153 and two cylindrical side surface Holbeck rotor sleeves 163,165 fixed to the rotor hub 161 and supported by the rotor hub 161. These Holbeck rotor sleeves 163 and 165 are coaxially oriented with respect to the axis of rotation 151 and are connected in and out of each other in the radial direction. Further, two Holbeck stator sleeves 167 and 169 having a cylindrical side surface are provided. These Holbeck stator sleeves 167,169 are similarly oriented coaxially with respect to the axis of rotation 151 and are connected in and out of each other when viewed in the radial direction.

Of Holweck pumping stage, the surface to achieve the pumping action, by the side, i.e. Holweck rotor sleeve 163, 165及beauty Holweck inner surface of the radial stator sleeve 167, 169及beauty / or formed by the outer surface There is. The radial inner surface of the outer Holbeck stator sleeve 167 faces the radial outer surface of the outer Holbeck rotor sleeve 163, forming a radial Holbeck gap 171 and this Holbeck gap 171. At the same time, a first Holbeck pump stage following the turbo molecular pump is formed. The radial inner surface of the outer Holbeck rotor sleeve 163 faces the radial outer surface of the inner Holbeck stator sleeve 169, forming a radial Holbeck gap 173, and this Holbeck gap 173. At the same time, a second Holbeck pump stage is formed. The radial inner surface of the inner Holbeck stator sleeve 169 faces the radial outer surface of the inner Holbeck rotor sleeve 165, forming a radial Holbeck gap 175, and this Holbeck gap 175. At the same time, a third Holbeck pump stage is formed.

The lower end of the Holbeck rotor sleeve 163 may be provided with a channel extending in the radial direction. Through this channel, the Holbeck gap 171 located on the outer side in the radial direction is connected to the central Holbeck gap 173. Further, the upper end of the inner Holbeck stator sleeve 169 may be provided with a channel extending in the radial direction. Through this channel, the central Holbeck gap 173 is connected to the Holbeck gap 175 located inward in the radial direction. As a result, a plurality of Holbeck pump stages connected to each other inside and outside are connected in series with each other. The lower end of the Holbeck rotor sleeve 165 located radially inward may further be provided with a connecting channel 179 leading to the outlet 117.

The surfaces of the Holbeck stator sleeves 163 and 165, each of which exerts the pumping action described above, have a plurality of Holbeck grooves spirally orbiting around the rotation axis 151 and extending in the axial direction. On the other hand, the opposite sides of the Holbeck rotor sleeves 163,165 are smoothly formed and pump gas forward in the Holbeck groove for the operation of the vacuum pump 111.

For rotatable journalled in the rotor shaft 153, a rolling bearing 181 in the area of the pump outlet 117 is provided, the magnetic bearing 183 of the permanent magnet is provided in the region of the pump inlet 115.

In the area of the rolling bearing 181, a conical splash nut 185 is provided on the rotor shaft 153. It has an outer diameter that increases towards rolling bearing 181. The splash nut 185 is in sliding contact with at least one scraping member of the working medium reservoir. The working medium reservoir has a plurality of absorbent discs 187 stacked one above the other. These disks 187, the working medium for the rolling bearing 181, the lubricant is impregnated Invite example embodiment.

During operation of the vacuum pump 111, the working medium is transmitted from the working medium storage to the rotating splash nut 185 via the scraping member by the capillary phenomenon and along the splash nut 185 based on centrifugal force. , Splash nut 185 is pumped towards the rolling bearing 181 towards the increasing outer diameter. If there in the example, the lubricating function is exhibited. Rolling 181及beauty operating medium reservoir is surrounded by a trough-shaped insert 189 and the bearing cover 145 with a vacuum pump.

The permanent magnet type magnetic bearing 183 has a bearing half portion 191 on the rotor side and a bearing half portion 193 on the stator side. They each have one ring stack, which consists of a plurality of rings 195,197 of permanent magnets stacked up and down in the axial direction. Ring magnets 195 and 197, while forming a radial bearing gap 199 to each other, have opposite, in this case, the rotor side of the ring magnet 195 is radially outward, and the ring magnet 197 of the stator side, the radius It is located inside the direction. The magnetic field present in the bearing gap 199 causes a magnetic repulsive force between the ring magnets 195 and 197. The repulsive force provides radial support for the rotor shaft 153. The ring magnet 195 on the rotor side is supported by the support portion 201 of the rotor shaft 153. The support portion 201 surrounds the ring magnet 195 on the outer side in the radial direction. The ring magnet 197 on the stator side is supported by the support portion 203 on the stator side. The support portion 203 extends through a ring magnet 197 and is suspended on a radial support 205 of the housing 119. The ring magnet 195 on the rotor side is fixed by the cover element 207 connected to the support portion 203 in parallel with the rotation axis 151. The ring magnet 197 on the stator side is fixed by a fixing ring 209 coupled to the support portion 203 and a fixing ring 211 coupled to the support portion 203 in one direction parallel to the rotation axis 151. Further, a disc spring 213 may be provided between the fixing ring 211 and the ring magnet 197.

In the magnetic bearing, very bearing or have safety bearings 215 are provided. Safety bearing 215 This very bearing or, during normal operation of the vacuum pump, and idling in a non-contact, and finally engaging the rotor 149 is excessively displaced relative radial direction with respect to the stator, thereby, Since the collision between the structure on the rotor side and the structure on the stator side is prevented, a stopper in the radial direction with respect to the rotor 149 is formed. Safety bearing 215 is configured as a non-lubricated rolling bearing, and the rotor 149及beauty / or forming a radial clearance with the stator. This gap prevents the safety bearing 215 from engaging during normal pump operation. The radial displacement with which the safety bearing engages is sized sufficiently large that the safety bearing 215 does not engage during normal operation of the vacuum pump and is at the same time small enough so that the structure on the rotor side. Collision between the and the structure on the stator side is prevented in all situations.

The vacuum pump 111 includes an electric motor 125 that rotationally drives the rotor 149. The armature of the electric motor 125 is formed by a rotor 149. The rotor shaft 153 of the rotor 149 extends through the motor stator 217. The rotor shaft 153, the portion extending through the motor stator 217, also radially outwardly with embedded permanent magnet assembly may be arranged. An intermediate chamber 219 is arranged between the motor stator 217 and the portion of the rotor 149 extending through the motor stator 217. The hollow chamber 219 has a motor gap in the radial direction. Through this motor gap, the motor stator 217 and the permanent magnet assembly transmit driving torque, so that they can magnetically influence each other.

The motor stator 217 is fixed in the pump housing in the motor chamber 137 provided for the electric motor 125. Via a sealing gas connection 135, (also referred to as a purge gas, which may be air or nitrogen if example embodiment) seal gas, it is possible to reach into the motor chamber 137. Through the seal gas, the electric motor 125 is cut with protection against corrosion of the portion of the process gas process gas, eg if. Motor chamber 137, cut with evacuated via the pump outlet 117. That is, the vacuum pressure realized by the pre-vacuum pump connected to the pump outlet 117 acts, at least approximately approximately, on the motor chamber 137.

A so-called labyrinth seal 223 known per se may be further provided between the rotor hub 161 and the wall portion 221 that defines the motor chamber 137. This achieves better sealing of the motor chamber 217, especially for the Holbeck pump stage located radially outward.

FIG. 6 shows a first embodiment of the pump lower portion 121 of the turbo molecular pump 111 in an assembled operating state. The turbo molecular pump 111 has a vacuum chamber V defined by a pump housing 119, which is separated from the pressure chamber D by a board 241 as a feedthrough. The board 241 is vacuum-tightly attached to the pump housing 119 using an O-ring 243 in the area of the connection opening 225.

Vacuum chamber V has a channel 224 which is bent, in the channel 224, have gas barrier 231 is arranged, the gas barrier 231 is provided on the front of the board 241 in the vacuum side and the process gas, board 241 isolates from the connection coupling part of及beauty board 241. In the illustrated embodiment, the gas barrier 231, the channel 224 is a region 229 which is bent into a siphon-like (Fig. 7B) a sealing material filling the airtight.

Board 241, which is connected to the connection conductor 233, the connection conductor 233, through gas barrier 231 to the opening 239, and extends toward the pumping region 240 of the turbo molecular pump 111 (FIG. 8). The connecting conductor 233 has a connector 235, and the connector 235 is connected to the board 241. The connector 235 and the portion of the connecting conductor 233 that connects to the connector 235 are housed in a storage chamber 226 of the bent channel 224. Connection conductor 233, its pumping region 24 0 Distance Rinotan unit, the motor of the turbo molecular pump 111, the actuator system及beauty / or may be connected to the sensor system.

Sealing material 231, so the board 241 or not in contact with the connector 235, by a gas barrier 231, not particularly give cause failure of the contact by the sealing material. Therefore, gas barrier 231及beauty board 241, the vacuum chamber V, fractionated constant regions called dead space T, this area, at least substantially, to guide the gas is pumped region 240及beauty pressure Not connected to room D. The dead space T, a connection variable capacity a secondary gas source (not shown), secondary gas source allows venting of dead space T by the protective gas, thereby, the corrosion The sexual process gas is more effectively separated from the board 241. Pump Bottom portion 121 is oriented as required by operating conditions, or kill by placement in any orientation as required. This is because the cured encapsulant material 231 retains its action as a gas barrier under all orientations.

Sealing material 231, in the illustrated embodiment, be arranged exclusively in the pump lower part 121, and not in contact with the pump on the portion 249 for viewing the constant pumping region 240 of the vacuum chamber (Figure 8). Therefore, the pump lower part 121, preferably service, to easily decompose maintenance及beauty repair purposes, Ru handling e taken separately. Additional flexibility in assembling及beauty degradation of the turbo molecular pump 111 is obtained by connecting the junction of the board 241 is configured to be inserted, thereby, possible easy replacement of the board 241 if example embodiment It becomes.

7A-7C illustrate the manufacture of the first embodiment of the pump lower portion 121 in FIG. For clarity, other components of the turbomolecular pump 111, located within the pump lower portion 121, are not shown.

In FIG. 7A, a portion of the channel 224 provided for accommodating the gas barrier 231 is made up of two bag holes 227a, 227b that intersect each other, and the bag holes 227a, 227b are formed of the lower part 121 of the pump, respectively. Starting from the opposite side, the illustrated embodiment shows crossing at an angle of 90 °. Of course, in principle, different angles can be considered depending on the structural peripheral conditions. The first blind holes 227a are in the pump housing 119, starting from the side of a predetermined pressure chamber D, and picture up a connection opening 225. The second blind hole 227b is image constant opening 239 towards the pumping area 240 of the turbo molecular pump 111. The pump housing 119, the region of the connecting opening 225 has a third blind holes 227c, a third blind hole 227c is a channel 224, the electrical or housing for accommodating the electronic connection components Expand by the amount of room 226. In the illustrated embodiment, the third bag hole 227 and the first bag hole 227a intersect at an angle of 45 °, in which case another angle is possible here as well.

FIG. 7B shows the entire cross section of the resulting channel 224. In the region where the first bag hole 227a and the second bag hole 227b intersect, the channel 224 has a region having a curved contour 229, which contour 229 is in the illustrated orientation of the pump lower portion 121. , Oriented to the right.

FIG. 7C shows the pump lower portion 121 during the introduction of the gas barrier 231 in the injection direction corresponding to the state in which the pump lower portion 121 is rotated 90 ° to the right with respect to the operating state in FIG. 6 in the illustrated embodiment. Shown. Through the channel 224, the connecting conductor 233 is first laid, and the connecting conductor 233 has a connector 235 for connecting to the board 241 on the side of the connecting opening 225. In this case, the dimensions of the channel 224 has a connection conductor 233及beauty connector 235 is selected to cut at conduction. A seal groove 237 is provided to accommodate an O-ring 243 for vacuum-tightly assembling the board 241.

In the illustrated embodiment, the gas barrier 231 is configured as a sealing material, the sealing material initially has sufficient fluidity to be introduced into the channel 224 by infusion, following which, It cures there. For injection, the pump lower portion 121 is positioned such that the bent region 229 forms the lowest point of the channel 224 in the form of a siphon, as shown. Through the connection opening 225及beauty / or towards the pump area 240 openings 239, sealing material 231 until the channel 224 is closed airtight, is introduced into the siphon-shaped region 229 of the channel 224. At that time, the connecting conductor 233 is embedded in the sealing material 231. Front and rear regions of the sealing material, because it is still being released from the gas barrier 231, a sealing material, the board 241 or not in contact with the connecting coupling of the board 241. The lower part 121 of the pump is held in the orientation shown until the sealing material 231 is cured.

Figure 8 is a second embodiment of a pump lower part 121 of the turbo molecular pump 111, and is shown in assembled operating state, FIG 9A~-9C schematically shows the manufacture of the second embodiment .. The second embodiment is similar to a large extent in the first embodiment shown in FIG. 6, thus, hereinafter, specific reference the differences between these embodiments.

FIG. 8 shows a pump lower portion 121, which has a board 241 as a vacuum feedthrough and a bent channel 224, and a gas barrier 231 is arranged in the channel 224. Another pump portion, wherein the pump on the portion 249 for viewing the constant pumping region 240 of the turbo molecular pump 111 is not mounted on the pump lower part 121 and is sealed by arranged O-ring seal groove 247 ing.

As FIG. 9A shows, the channel 224 has two blind holes 227a, have been prepared from 227b, blind holes 227a, 227b intersect at an angle of 90 °, in this case, structural circumstances can also select the consideration of another angle. Since both bag holes 227a and 227b are formed from the same side of the pump lower portion 121, here from the side of the pumping region 240, a perforation portion is provided in the opening 239 toward the pumping region 240 and the pump housing 119. to image a constant and another pierced aperture 251 is. A milling portion 245 provided on the opposite side of the pump lower portion 121 completes the conduction of the bent channel 224 to the side of the connection opening 225. Compared with the channel 224 of FIG. 6, where the cut with a smaller configuration of the connection openings 225 for the board 241 as a vacuum feedthrough. This is because the milling section 245 forms a right angle to the surface of the pump housing 119.

FIG. 9B shows the entire cross section of the resulting channel 224. The intersecting bag holes 227a, 227b form a siphon-like bent region 229 of the channel 224.

FIG. 9C shows the orientation of the encapsulating material as the gas barrier 231 in the injection direction during introduction, showing the lower portion 121 of the pump. Since both bladder holes 227a, 227b in FIG. 9A are formed from the same side of the pump housing 119, the pump upper portion 249 is already assembled at the time of injection to seal the perforation opening 251 with the sealing material 231. Must be. The opening 239 establishes communication between the channel 224 and the pumping region 240 of the turbomolecular pump 111.

To inject molding the gas barrier 231 to the channel 224, the pump lower part 121及beauty pump on portion 249, together with the conductive connection conductor 233, Hama charging the encapsulating material 231 from the connection opening 225 in a region 229 which is bent into a siphon-like It is arranged so as to cut with. At that time, the perforation opening 251 is similarly filled with the encapsulating material 231, and the perforation opening 251 is sealed by contact with the pump upper portion 249.

After sealing material 231 is cured, the board 241 is connected to the connector 235 of the connection conductor 233, and since cut with only assembling the vacuum-tight on the connection opening 225 of the pump lower part 121, the board, the vacuum chamber Separate V from the pressure chamber D. In this case, the pump lower member 121及beauty pump upper portion 249 may be kicked with the direction of the setting as for the operation of the turbo molecular pump 111, in particular, the pump lower part 121 downward, the pump upper part 249 It may be oriented upwards (Fig. 8).

Third embodiment of a pump lower part 121, have been shown in cross-section in FIG. 10, steps for making the pump lower part 121 of this type, shown schematically in FIG. 11 A- 11 C. The illustrated embodiment has a labyrinth-like bent channel 224 multiple times. In this case, the bent region is partially defined by the surface of the pump housing 119 and partly by the angle member 259 fixed to the pump housing 119.

FIG. 11A shows the lower portion 121 of the pump as a plan view of the turbo molecular pump 111 as viewed from the pumping region 240 side, and shows the angle member 259 before assembly. The pump lower part 121, a channel 253 opens being drilled through, a pump lower part 121, and adjacent thereto, additionally, a first recess 255a for accommodating the connecting conductor 233 and the second Has a recess of 255b. A fixed region 260 is provided for assembling the angle member 259 to the lower portion 121 of the pump. Seal groove 257, the channel 253 is opened and the recess 255a, so surrounds the 255b, a sealing element 261, it kills in placement between the angle member 259 and the pump housing 119.

FIG. 11B shows a cross-sectional view of a pump lower portion 121 having an open channel 253 and recesses 255a, 255b. Due to the open structural form, all edges 262 are well accessible for processing. In particular, line e rounding deburring or the edge 262, thereby, the connection conductor 233 or never insulator connecting conductor 233 is damaged.

As shown in FIG. 11C, the open channel 253, the recesses 255a, 255b, and the assembled angle member 259 form a labyrinth-shaped channel 224, and the wall portion of the channel 224 is the pump housing 119. And the angle member 259 attached to the pump housing 119. Channel 224 has a region 229 which is bent, region 229, barrier 231, is provided to accommodate the example Ebafutome material. 6 or shown in FIG. 8, as compared with the first及beauty second embodiment of the channel 224, channel 253, which is configured open, over stretched length of the whole, the conduction of the connector 235 It does not have to have the dimensions that allow it. Rather, the bent region 229 only needs to provide space for the connecting conductor 233, which allows for compact dimensions of the channel. A seal strip 261 guided in the seal groove 257 between the angle member 259 and the pump housing 119 seals the channel 224.

In order to inject and mold the encapsulating material as the gas barrier 231 the pump lower portion 121 conducts the connecting conductor 233 through the open channel 253 and after assembling the angle member 259 to form the labyrinth-like channel 224. because it is positioned in the casting direction, Ru row e from the connection opening 225 of injection into the bent region 229 (FIG. 11D). Sealing strip 261 is to seal the region 229 when using the encapsulating material of the lower viscosity, in the encapsulating material of higher viscosity kills with omitted.

After sealing material 231 is cured, the connection conductor 233, via a connector 235, Ki de connected to board 241, can assemble the board 241, the pump housing 119 to the vacuum-tight on the connecting opening 225, and the pump lower 121, directing the setting as for the operation of the turbo molecular pump 111, cut with binding to the pump upper part 249 of the pump.

Through the sealing material 231, the inner及Beauty / or the insulator connecting conductor 233 is through the outer surface, in order to avoid gas exchange between the pumping region 240 and the board 241 of the turbo molecular pump 111, FIG. connecting conductor 233 in 12, in the region of the gas barrier 231, at least partially, at least substantially air-tight covering body 265. In particular, also the side of the pumping area 240 is in direct contact with the vacuum region V on the side of the board 241, in the end region of the gas barrier 231, air-tight covering body 265, the surface or the insulator of the connecting conductors 233 It blocks the ingress of gas into, and thus the possible passage of gas through the sealing material 231 along the connecting conductor 233. As shown here, gas-tight cover member 265, shrink tubing, Ru particular obtained by shrink tubing comprising an inner adhesive.

In order to prevent gas exchange through the inside of the connecting conductor 233, as shown in FIG. 12, at the end of the connecting conductor 233 on the side away from the board 241, the motor and actuator system of the turbo molecular pump 111.及beauty / or Ru write-enable der buried connection portion 267 is similarly encapsulating material 269 leading to the sensor system.

111 Turbo molecular pump 113 Inlet flange 115 Pump inlet 117 Pump outlet 119 Pump housing 121 Pump lower part 123 Electronics housing 125 Electric motor 127 Accessory connection 129 Data interface 131 Current supply connection 133 Ventilation inlet 135 Seal gas connection 137 Motor room 139 Coolant Connection 141 Bottom Bottom 143 Screw 145 Bearing Cover 147 Fixing Hole 148 Coolant Piping 149 Rotor 151 Rotating Axis 153 Rotor Shaft 155 Rotor Disc 157 Stator Disc 159 Spacer Ring 161 Rotor Hub 163 Holbeck Rotor Sleeve 165 Holbeck Rotor Sleeve 165 Stator sleeve 169 Holbeck stator sleeve 171 Holbeck gap 173 Holbeck gap 175 Holbeck gap 179 Connection channel 181 Rolling bearing 183 Permanent magnet type magnetic bearing 185 Splash nut 187 Disc 189 Insert 191 Rotor side bearing half 193 Bearing half 195 ring magnet 197 ring magnet 199 bearing gap 201 support portion 203 supporting portion 205 radial struts 207 covering elements 209 support ring 211 fixed ring 213 disc spring 215 very bearing or safety bearing 217 motor stator 219 intermediate chamber 221 wall portion 223 labyrinth Seal 224 Channel 225 Connection opening 226 Containment chamber 227a First bag hole 227b Second bag hole 227c Third bag hole 229 Siphon-shaped bent area 231 Gas barrier 233 Connection conductor 235 Connector 237 Seal groove for board 239 In pumping area Facing opening 240 Pumping area 241 Board 243 O-ring 245 Milling part 247 Seal groove for pump upper part 249 Pump upper part 251 Perforated opening 253 Open channel 255a First recess 255b Second recess 257 Seal groove for angle member 259 angle members 260 fixed region 261 sealing strip 262 edge 265 air-tight covering body 267 motor, an actuator system, Connection point with sensor system 269 Sealing material for connection point V Vacuum chamber D Pressure chamber T Dead space

Claims (15)

With the vacuum chamber (V) defined by the pump housing (119),
A vacuum pump, particularly a turbo molecular pump (111), comprising a board (241).
Pump housing (119) has a connection opening (225), connecting the opening (225), the board (241) have closed vacuum-tight, thereby, board (241) is , Separate the vacuum chamber (V) from the pressure chamber (D),
In front of the vacuum side depot over de (241), the gas barrier (231) is provided which is spaced from the board (241),
Vacuum pumps, especially turbo molecular pumps (111). Moth gas barrier (231), characterized in that it comprises a sealing material, a vacuum pump according to claim 1 (111). At least one connecting conductor (233) is, extend through the gas gas barrier (231), characterized in that it is connected to the board (241), a vacuum pump according to claim 1 or 2 (111). Contact connection between connection conductors (233) and the board (241), characterized in that a plug connection, a vacuum pump according to claim 3 (111). Connection conductor (233) is in the region of the gas gas barrier (231), characterized in that it has at least in part, in the end region of the gas gas barrier (231) in particular, at least approximately gas-tight covering body (265) to, claim 3 or vacuum pump according to 4 (111). Moth gas barrier (231) has, located on the first pump section (121) of the vacuum pump (111), the vacuum pump (111), the pumping area (240) of the vacuum chamber (V) the second pump portion (249), characterized in that not in contact, the vacuum pump according to at least any one of claims 1 to 5 for picture constant (111). Moth gas barrier (231) is characterized by being arranged to pump housing (119) within the channel (224) which is formed in communication with the vacuum chamber (V) in, claims 1 to 6 The vacuum pump (111) according to at least one of the above items. Ji Yaneru (224) is also bent have a curved region (229), realm (229) is characterized in that it is filled with gas barrier (231), a vacuum of Claim 7 Pump (111). Bent realm Ji Yaneru (224) (229) has at least two intersecting perforated portion, particularly bag-shaped hole (227a, 227b, 227c)及Beauty / or are formed by millings (245) The vacuum pump (111) according to claim 8, wherein the vacuum pump (111) is characterized in that. Curved realm Ji Yaneru (224) (229) is characterized by being more bent labyrinth, vacuum pump according to claim 8 or 9 (111). Curved realm Ji Yaneru (224) (229) includes a surface of the pump housing (119), that it is image constant by an angle member fixed to the pump housing (119) (259) The vacuum pump (111) according to claim 10. Characterized in that the sealing element (261) is arranged between the A Single member and (259) and the pump housing (119), a vacuum pump according to claim 11 (111). Vacuum chamber (V), the area defined by gas gas barrier and (231) and the board (241), characterized in that connected to the secondary gas source claims 1 12 The vacuum pump (111) according to at least one of the above items. A vacuum chamber (V) and a board (241) defined by a pump housing (119) are provided.
Connection opening (225) is formed in the pump housing (119),
Connection opening (225) is closed in a vacuum-tight by board (241), thereby, board (241) separates vacuum chamber (V) from the pressure chamber (D),
Gas barrier disposed in front of the vacuum side depot over de (241) (231) is formed, gas gas barrier (231) is spaced relative to the board (241),
A method for manufacturing a vacuum pump (111). The pump housing (119) within, or bent channels have a curved region (249) (224) is formed,
At least one connecting conductor through a switch Yaneru (224) (233) is laid,
Or bent Ji Yaneru (224) is a gas barrier (231) is formed in a curved realm (229),
Connection conductor (233) is connected to the board (241),
Board (241), characterized in that attached to the pump housing (119) in a vacuum-tight, method of manufacturing the vacuum pump as claimed in claim 14 (111).