JP7092825B2 - 真空ポンプ - Google Patents
真空ポンプ Download PDFInfo
- Publication number
- JP7092825B2 JP7092825B2 JP2020085580A JP2020085580A JP7092825B2 JP 7092825 B2 JP7092825 B2 JP 7092825B2 JP 2020085580 A JP2020085580 A JP 2020085580A JP 2020085580 A JP2020085580 A JP 2020085580A JP 7092825 B2 JP7092825 B2 JP 7092825B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vacuum
- board
- channel
- gas barrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/068—Mechanical details of the pump control unit
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0693—Details or arrangements of the wiring
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19194646 | 2019-08-30 | ||
EP19194646.6A EP3626971B1 (fr) | 2019-08-30 | 2019-08-30 | Pompe à vide |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2021038745A JP2021038745A (ja) | 2021-03-11 |
JP2021038745A5 JP2021038745A5 (fr) | 2021-11-04 |
JP7092825B2 true JP7092825B2 (ja) | 2022-06-28 |
Family
ID=67810495
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020085580A Active JP7092825B2 (ja) | 2019-08-30 | 2020-05-15 | 真空ポンプ |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP3626971B1 (fr) |
JP (1) | JP7092825B2 (fr) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017155709A (ja) | 2016-03-04 | 2017-09-07 | エドワーズ株式会社 | 真空ポンプ |
JP2019023469A (ja) | 2017-07-21 | 2019-02-14 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空ポンプ |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006016405A1 (de) * | 2006-04-07 | 2007-10-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Antriebsgerät |
DE202007012070U1 (de) * | 2007-08-30 | 2009-01-08 | Oerlikon Leybold Vacuum Gmbh | Stromdurchführung einer Vakuumpumpe |
JP2014011120A (ja) * | 2012-07-02 | 2014-01-20 | Shimadzu Corp | 電気フィードスルー、真空ポンプおよびプリント基板 |
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2019
- 2019-08-30 EP EP19194646.6A patent/EP3626971B1/fr active Active
-
2020
- 2020-05-15 JP JP2020085580A patent/JP7092825B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017155709A (ja) | 2016-03-04 | 2017-09-07 | エドワーズ株式会社 | 真空ポンプ |
JP2019023469A (ja) | 2017-07-21 | 2019-02-14 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空ポンプ |
Also Published As
Publication number | Publication date |
---|---|
EP3626971A1 (fr) | 2020-03-25 |
EP3626971B1 (fr) | 2022-05-11 |
JP2021038745A (ja) | 2021-03-11 |
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