JP2021038745A5 - - Google Patents
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- Publication number
- JP2021038745A5 JP2021038745A5 JP2020085580A JP2020085580A JP2021038745A5 JP 2021038745 A5 JP2021038745 A5 JP 2021038745A5 JP 2020085580 A JP2020085580 A JP 2020085580A JP 2020085580 A JP2020085580 A JP 2020085580A JP 2021038745 A5 JP2021038745 A5 JP 2021038745A5
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vacuum
- board
- gas barrier
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000004888 barrier function Effects 0.000 claims description 84
- 239000004020 conductor Substances 0.000 claims description 52
- 238000005086 pumping Methods 0.000 claims description 37
- 239000003566 sealing material Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 18
- 238000007789 sealing Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 238000003801 milling Methods 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 129
- 239000000463 material Substances 0.000 description 15
- 230000008569 process Effects 0.000 description 14
- 239000002826 coolant Substances 0.000 description 11
- 238000002347 injection Methods 0.000 description 11
- 239000007924 injection Substances 0.000 description 11
- 238000005096 rolling process Methods 0.000 description 8
- 239000012212 insulator Substances 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 4
- 238000005219 brazing Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000008393 encapsulating agent Substances 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 239000012752 auxiliary agent Substances 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19194646 | 2019-08-30 | ||
| EP19194646.6A EP3626971B1 (de) | 2019-08-30 | 2019-08-30 | Vakuumpumpe |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021038745A JP2021038745A (ja) | 2021-03-11 |
| JP2021038745A5 true JP2021038745A5 (enrdf_load_stackoverflow) | 2021-11-04 |
| JP7092825B2 JP7092825B2 (ja) | 2022-06-28 |
Family
ID=67810495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020085580A Active JP7092825B2 (ja) | 2019-08-30 | 2020-05-15 | 真空ポンプ |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP3626971B1 (enrdf_load_stackoverflow) |
| JP (1) | JP7092825B2 (enrdf_load_stackoverflow) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006016405B4 (de) * | 2006-04-07 | 2024-08-01 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Antriebsgerät |
| DE202007012070U1 (de) * | 2007-08-30 | 2009-01-08 | Oerlikon Leybold Vacuum Gmbh | Stromdurchführung einer Vakuumpumpe |
| JP2014011120A (ja) * | 2012-07-02 | 2014-01-20 | Shimadzu Corp | 電気フィードスルー、真空ポンプおよびプリント基板 |
| JP6758865B2 (ja) * | 2016-03-04 | 2020-09-23 | エドワーズ株式会社 | 真空ポンプ |
| EP3431769B1 (de) * | 2017-07-21 | 2022-05-04 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
-
2019
- 2019-08-30 EP EP19194646.6A patent/EP3626971B1/de active Active
-
2020
- 2020-05-15 JP JP2020085580A patent/JP7092825B2/ja active Active
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